3/3/2012	10:37:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	10:37:55 AM	Recipe started at 10:37 AM
3/3/2012	10:37:55 AM	Helium valve closed
3/3/2012	10:37:55 AM	H2 valve closed
3/3/2012	10:37:55 AM	BCl3 valve closed
3/3/2012	10:37:55 AM	PH3 valve closed
3/3/2012	10:37:55 AM	SiCl4 pre valve closed
3/3/2012	10:37:55 AM	SiCl4 post valve closed
3/3/2012	10:37:55 AM	Main Vac valve closed
3/3/2012	10:37:55 AM	Bypass valve closed
3/3/2012	10:37:55 AM	Bubbler valve closed
3/3/2012	10:37:55 AM	Helium MFC set to  0.000000
3/3/2012	10:37:55 AM	H2 MFC set to  0.000000
3/3/2012	10:37:55 AM	BCl3 MFC set to  0.000000
3/3/2012	10:37:55 AM	PH3 MFC set to  0.000000
3/3/2012	10:37:55 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:37:55 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:37:55 AM	Tube furnace set to 0
3/3/2012	10:37:59 AM	H2 valve closed
3/3/2012	10:37:59 AM	BCl3 valve closed
3/3/2012	10:37:59 AM	PH3 valve closed
3/3/2012	10:37:59 AM	SiCl4 pre valve closed
3/3/2012	10:37:59 AM	SiCl4 post valve closed
3/3/2012	10:37:59 AM	Main Vac valve closed
3/3/2012	10:37:59 AM	Bypass valve closed
3/3/2012	10:37:59 AM	Bubbler valve closed
3/3/2012	10:37:59 AM	Helium valve opened
3/3/2012	10:37:59 AM	Helium MFC set to  500.000000
3/3/2012	10:37:59 AM	H2 MFC set to  0.000000
3/3/2012	10:37:59 AM	BCl3 MFC set to  0.000000
3/3/2012	10:37:59 AM	PH3 MFC set to  0.000000
3/3/2012	10:37:59 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:37:59 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:37:59 AM	Tube furnace set to 0
3/3/2012	10:39:03 AM	Helium valve closed
3/3/2012	10:39:03 AM	H2 valve closed
3/3/2012	10:39:03 AM	BCl3 valve closed
3/3/2012	10:39:03 AM	PH3 valve closed
3/3/2012	10:39:03 AM	SiCl4 pre valve closed
3/3/2012	10:39:03 AM	SiCl4 post valve closed
3/3/2012	10:39:03 AM	Main Vac valve closed
3/3/2012	10:39:03 AM	Bypass valve closed
3/3/2012	10:39:03 AM	Bubbler valve closed
3/3/2012	10:39:03 AM	Helium MFC set to  0.000000
3/3/2012	10:39:03 AM	H2 MFC set to  0.000000
3/3/2012	10:39:03 AM	BCl3 MFC set to  0.000000
3/3/2012	10:39:03 AM	PH3 MFC set to  0.000000
3/3/2012	10:39:03 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:39:03 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:39:03 AM	Tube furnace set to 0
3/3/2012	10:39:04 AM	Run finished at 10:39 AM
3/3/2012	10:39:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	10:46:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	10:46:13 AM	Recipe started at 10:46 AM
3/3/2012	10:46:13 AM	Helium valve closed
3/3/2012	10:46:13 AM	H2 valve closed
3/3/2012	10:46:13 AM	BCl3 valve closed
3/3/2012	10:46:13 AM	PH3 valve closed
3/3/2012	10:46:13 AM	SiCl4 pre valve closed
3/3/2012	10:46:13 AM	SiCl4 post valve closed
3/3/2012	10:46:13 AM	Main Vac valve closed
3/3/2012	10:46:13 AM	Bubbler valve closed
3/3/2012	10:46:13 AM	Bypass valve opened
3/3/2012	10:46:13 AM	Helium MFC set to  0.000000
3/3/2012	10:46:13 AM	H2 MFC set to  0.000000
3/3/2012	10:46:13 AM	BCl3 MFC set to  0.000000
3/3/2012	10:46:13 AM	PH3 MFC set to  0.000000
3/3/2012	10:46:13 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:46:13 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:46:13 AM	Tube furnace set to 0
3/3/2012	10:47:14 AM	Helium valve closed
3/3/2012	10:47:14 AM	H2 valve closed
3/3/2012	10:47:14 AM	BCl3 valve closed
3/3/2012	10:47:14 AM	PH3 valve closed
3/3/2012	10:47:14 AM	SiCl4 pre valve closed
3/3/2012	10:47:14 AM	SiCl4 post valve closed
3/3/2012	10:47:14 AM	Main Vac valve closed
3/3/2012	10:47:14 AM	Bubbler valve closed
3/3/2012	10:47:14 AM	Bypass valve opened
3/3/2012	10:47:14 AM	Helium MFC set to  0.000000
3/3/2012	10:47:14 AM	H2 MFC set to  0.000000
3/3/2012	10:47:14 AM	BCl3 MFC set to  0.000000
3/3/2012	10:47:14 AM	PH3 MFC set to  0.000000
3/3/2012	10:47:14 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:47:14 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:47:14 AM	Tube furnace set to 0
3/3/2012	10:48:14 AM	Helium valve closed
3/3/2012	10:48:14 AM	H2 valve closed
3/3/2012	10:48:14 AM	BCl3 valve closed
3/3/2012	10:48:14 AM	PH3 valve closed
3/3/2012	10:48:14 AM	SiCl4 pre valve closed
3/3/2012	10:48:14 AM	SiCl4 post valve closed
3/3/2012	10:48:14 AM	Bypass valve closed
3/3/2012	10:48:14 AM	Bubbler valve closed
3/3/2012	10:48:14 AM	Main Vac valve opened
3/3/2012	10:48:14 AM	Helium MFC set to  0.000000
3/3/2012	10:48:14 AM	H2 MFC set to  0.000000
3/3/2012	10:48:14 AM	BCl3 MFC set to  0.000000
3/3/2012	10:48:14 AM	PH3 MFC set to  0.000000
3/3/2012	10:48:14 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:48:14 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:48:15 AM	Tube furnace set to 0
3/3/2012	10:48:16 AM	Run finished at 10:48 AM
3/3/2012	10:48:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	10:49:14 AM	Recipe started at 10:49 AM
3/3/2012	10:49:14 AM	Helium valve closed
3/3/2012	10:49:14 AM	H2 valve closed
3/3/2012	10:49:14 AM	BCl3 valve closed
3/3/2012	10:49:14 AM	PH3 valve closed
3/3/2012	10:49:14 AM	SiCl4 pre valve closed
3/3/2012	10:49:14 AM	SiCl4 post valve closed
3/3/2012	10:49:14 AM	Bypass valve closed
3/3/2012	10:49:14 AM	Bubbler valve closed
3/3/2012	10:49:14 AM	Main Vac valve opened
3/3/2012	10:49:14 AM	Helium MFC set to  0.000000
3/3/2012	10:49:14 AM	H2 MFC set to  0.000000
3/3/2012	10:49:14 AM	BCl3 MFC set to  0.000000
3/3/2012	10:49:14 AM	PH3 MFC set to  0.000000
3/3/2012	10:49:14 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:49:14 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:49:14 AM	Tube furnace set to 150
3/3/2012	10:49:44 AM	H2 valve closed
3/3/2012	10:49:44 AM	BCl3 valve closed
3/3/2012	10:49:44 AM	PH3 valve closed
3/3/2012	10:49:44 AM	SiCl4 pre valve closed
3/3/2012	10:49:44 AM	SiCl4 post valve closed
3/3/2012	10:49:44 AM	Bypass valve closed
3/3/2012	10:49:44 AM	Bubbler valve closed
3/3/2012	10:49:44 AM	Helium valve opened
3/3/2012	10:49:44 AM	Main Vac valve opened
3/3/2012	10:49:44 AM	Helium MFC set to  20.000000
3/3/2012	10:49:44 AM	H2 MFC set to  0.000000
3/3/2012	10:49:44 AM	BCl3 MFC set to  0.000000
3/3/2012	10:49:44 AM	PH3 MFC set to  0.000000
3/3/2012	10:49:44 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:49:44 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:49:44 AM	Tube furnace set to 150
3/3/2012	10:50:14 AM	Helium valve closed
3/3/2012	10:50:14 AM	H2 valve closed
3/3/2012	10:50:14 AM	BCl3 valve closed
3/3/2012	10:50:14 AM	PH3 valve closed
3/3/2012	10:50:14 AM	SiCl4 pre valve closed
3/3/2012	10:50:14 AM	SiCl4 post valve closed
3/3/2012	10:50:14 AM	Bypass valve closed
3/3/2012	10:50:14 AM	Bubbler valve closed
3/3/2012	10:50:14 AM	Main Vac valve opened
3/3/2012	10:50:14 AM	Helium MFC set to  0.000000
3/3/2012	10:50:14 AM	H2 MFC set to  0.000000
3/3/2012	10:50:14 AM	BCl3 MFC set to  0.000000
3/3/2012	10:50:14 AM	PH3 MFC set to  0.000000
3/3/2012	10:50:14 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:50:14 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:50:15 AM	Tube furnace set to 150
3/3/2012	10:50:45 AM	H2 valve closed
3/3/2012	10:50:45 AM	BCl3 valve closed
3/3/2012	10:50:45 AM	PH3 valve closed
3/3/2012	10:50:45 AM	SiCl4 pre valve closed
3/3/2012	10:50:45 AM	SiCl4 post valve closed
3/3/2012	10:50:45 AM	Bypass valve closed
3/3/2012	10:50:45 AM	Bubbler valve closed
3/3/2012	10:50:45 AM	Helium valve opened
3/3/2012	10:50:45 AM	Main Vac valve opened
3/3/2012	10:50:45 AM	Helium MFC set to  20.000000
3/3/2012	10:50:45 AM	H2 MFC set to  0.000000
3/3/2012	10:50:45 AM	BCl3 MFC set to  0.000000
3/3/2012	10:50:45 AM	PH3 MFC set to  0.000000
3/3/2012	10:50:45 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:50:45 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:50:45 AM	Tube furnace set to 150
3/3/2012	10:51:15 AM	Helium valve closed
3/3/2012	10:51:15 AM	H2 valve closed
3/3/2012	10:51:15 AM	BCl3 valve closed
3/3/2012	10:51:15 AM	PH3 valve closed
3/3/2012	10:51:15 AM	SiCl4 pre valve closed
3/3/2012	10:51:15 AM	SiCl4 post valve closed
3/3/2012	10:51:15 AM	Bypass valve closed
3/3/2012	10:51:15 AM	Bubbler valve closed
3/3/2012	10:51:15 AM	Main Vac valve opened
3/3/2012	10:51:15 AM	Helium MFC set to  0.000000
3/3/2012	10:51:15 AM	H2 MFC set to  0.000000
3/3/2012	10:51:15 AM	BCl3 MFC set to  0.000000
3/3/2012	10:51:15 AM	PH3 MFC set to  0.000000
3/3/2012	10:51:15 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:51:15 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:51:15 AM	Tube furnace set to 150
3/3/2012	10:51:45 AM	H2 valve closed
3/3/2012	10:51:45 AM	BCl3 valve closed
3/3/2012	10:51:45 AM	PH3 valve closed
3/3/2012	10:51:45 AM	SiCl4 pre valve closed
3/3/2012	10:51:45 AM	SiCl4 post valve closed
3/3/2012	10:51:45 AM	Bypass valve closed
3/3/2012	10:51:45 AM	Bubbler valve closed
3/3/2012	10:51:45 AM	Helium valve opened
3/3/2012	10:51:45 AM	Main Vac valve opened
3/3/2012	10:51:45 AM	Helium MFC set to  20.000000
3/3/2012	10:51:45 AM	H2 MFC set to  0.000000
3/3/2012	10:51:45 AM	BCl3 MFC set to  0.000000
3/3/2012	10:51:45 AM	PH3 MFC set to  0.000000
3/3/2012	10:51:45 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:51:45 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:51:45 AM	Tube furnace set to 150
3/3/2012	10:52:15 AM	Helium valve closed
3/3/2012	10:52:15 AM	H2 valve closed
3/3/2012	10:52:15 AM	BCl3 valve closed
3/3/2012	10:52:15 AM	PH3 valve closed
3/3/2012	10:52:15 AM	SiCl4 pre valve closed
3/3/2012	10:52:15 AM	SiCl4 post valve closed
3/3/2012	10:52:15 AM	Bypass valve closed
3/3/2012	10:52:15 AM	Bubbler valve closed
3/3/2012	10:52:15 AM	Main Vac valve opened
3/3/2012	10:52:15 AM	Helium MFC set to  0.000000
3/3/2012	10:52:15 AM	H2 MFC set to  0.000000
3/3/2012	10:52:15 AM	BCl3 MFC set to  0.000000
3/3/2012	10:52:15 AM	PH3 MFC set to  0.000000
3/3/2012	10:52:15 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:52:15 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:52:15 AM	Tube furnace set to 150
3/3/2012	10:52:45 AM	H2 valve closed
3/3/2012	10:52:45 AM	BCl3 valve closed
3/3/2012	10:52:45 AM	PH3 valve closed
3/3/2012	10:52:45 AM	SiCl4 pre valve closed
3/3/2012	10:52:45 AM	SiCl4 post valve closed
3/3/2012	10:52:45 AM	Bypass valve closed
3/3/2012	10:52:45 AM	Bubbler valve closed
3/3/2012	10:52:45 AM	Helium valve opened
3/3/2012	10:52:45 AM	Main Vac valve opened
3/3/2012	10:52:45 AM	Helium MFC set to  20.000000
3/3/2012	10:52:45 AM	H2 MFC set to  0.000000
3/3/2012	10:52:45 AM	BCl3 MFC set to  0.000000
3/3/2012	10:52:45 AM	PH3 MFC set to  0.000000
3/3/2012	10:52:45 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:52:45 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:52:46 AM	Tube furnace set to 150
3/3/2012	10:53:16 AM	Helium valve closed
3/3/2012	10:53:16 AM	H2 valve closed
3/3/2012	10:53:16 AM	BCl3 valve closed
3/3/2012	10:53:16 AM	PH3 valve closed
3/3/2012	10:53:16 AM	SiCl4 pre valve closed
3/3/2012	10:53:16 AM	SiCl4 post valve closed
3/3/2012	10:53:16 AM	Bypass valve closed
3/3/2012	10:53:16 AM	Bubbler valve closed
3/3/2012	10:53:16 AM	Main Vac valve opened
3/3/2012	10:53:16 AM	Helium MFC set to  0.000000
3/3/2012	10:53:16 AM	H2 MFC set to  0.000000
3/3/2012	10:53:16 AM	BCl3 MFC set to  0.000000
3/3/2012	10:53:16 AM	PH3 MFC set to  0.000000
3/3/2012	10:53:16 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:53:16 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:53:16 AM	Tube furnace set to 150
3/3/2012	10:53:46 AM	H2 valve closed
3/3/2012	10:53:46 AM	BCl3 valve closed
3/3/2012	10:53:46 AM	PH3 valve closed
3/3/2012	10:53:46 AM	SiCl4 pre valve closed
3/3/2012	10:53:46 AM	SiCl4 post valve closed
3/3/2012	10:53:46 AM	Bypass valve closed
3/3/2012	10:53:46 AM	Bubbler valve closed
3/3/2012	10:53:46 AM	Helium valve opened
3/3/2012	10:53:46 AM	Main Vac valve opened
3/3/2012	10:53:46 AM	Helium MFC set to  20.000000
3/3/2012	10:53:46 AM	H2 MFC set to  0.000000
3/3/2012	10:53:46 AM	BCl3 MFC set to  0.000000
3/3/2012	10:53:46 AM	PH3 MFC set to  0.000000
3/3/2012	10:53:46 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:53:46 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:53:46 AM	Tube furnace set to 150
3/3/2012	10:54:16 AM	Helium valve closed
3/3/2012	10:54:16 AM	H2 valve closed
3/3/2012	10:54:16 AM	BCl3 valve closed
3/3/2012	10:54:16 AM	PH3 valve closed
3/3/2012	10:54:16 AM	SiCl4 pre valve closed
3/3/2012	10:54:16 AM	SiCl4 post valve closed
3/3/2012	10:54:16 AM	Bypass valve closed
3/3/2012	10:54:16 AM	Bubbler valve closed
3/3/2012	10:54:16 AM	Main Vac valve opened
3/3/2012	10:54:16 AM	Helium MFC set to  0.000000
3/3/2012	10:54:16 AM	H2 MFC set to  0.000000
3/3/2012	10:54:16 AM	BCl3 MFC set to  0.000000
3/3/2012	10:54:16 AM	PH3 MFC set to  0.000000
3/3/2012	10:54:16 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:54:16 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:54:16 AM	Tube furnace set to 150
3/3/2012	10:54:46 AM	H2 valve closed
3/3/2012	10:54:46 AM	BCl3 valve closed
3/3/2012	10:54:46 AM	PH3 valve closed
3/3/2012	10:54:46 AM	SiCl4 pre valve closed
3/3/2012	10:54:46 AM	SiCl4 post valve closed
3/3/2012	10:54:46 AM	Bypass valve closed
3/3/2012	10:54:46 AM	Bubbler valve closed
3/3/2012	10:54:46 AM	Helium valve opened
3/3/2012	10:54:46 AM	Main Vac valve opened
3/3/2012	10:54:46 AM	Helium MFC set to  20.000000
3/3/2012	10:54:46 AM	H2 MFC set to  0.000000
3/3/2012	10:54:46 AM	BCl3 MFC set to  0.000000
3/3/2012	10:54:46 AM	PH3 MFC set to  0.000000
3/3/2012	10:54:46 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:54:46 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:54:47 AM	Tube furnace set to 150
3/3/2012	10:55:17 AM	Helium valve closed
3/3/2012	10:55:17 AM	H2 valve closed
3/3/2012	10:55:17 AM	BCl3 valve closed
3/3/2012	10:55:17 AM	PH3 valve closed
3/3/2012	10:55:17 AM	SiCl4 pre valve closed
3/3/2012	10:55:17 AM	SiCl4 post valve closed
3/3/2012	10:55:17 AM	Bypass valve closed
3/3/2012	10:55:17 AM	Bubbler valve closed
3/3/2012	10:55:17 AM	Main Vac valve opened
3/3/2012	10:55:17 AM	Helium MFC set to  0.000000
3/3/2012	10:55:17 AM	H2 MFC set to  0.000000
3/3/2012	10:55:17 AM	BCl3 MFC set to  0.000000
3/3/2012	10:55:17 AM	PH3 MFC set to  0.000000
3/3/2012	10:55:17 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:55:17 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:55:17 AM	Tube furnace set to 150
3/3/2012	10:55:47 AM	H2 valve closed
3/3/2012	10:55:47 AM	BCl3 valve closed
3/3/2012	10:55:47 AM	PH3 valve closed
3/3/2012	10:55:47 AM	SiCl4 pre valve closed
3/3/2012	10:55:47 AM	SiCl4 post valve closed
3/3/2012	10:55:47 AM	Bypass valve closed
3/3/2012	10:55:47 AM	Bubbler valve closed
3/3/2012	10:55:47 AM	Helium valve opened
3/3/2012	10:55:47 AM	Main Vac valve opened
3/3/2012	10:55:47 AM	Helium MFC set to  20.000000
3/3/2012	10:55:47 AM	H2 MFC set to  0.000000
3/3/2012	10:55:47 AM	BCl3 MFC set to  0.000000
3/3/2012	10:55:47 AM	PH3 MFC set to  0.000000
3/3/2012	10:55:47 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:55:47 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:55:47 AM	Tube furnace set to 150
3/3/2012	10:56:17 AM	Helium valve closed
3/3/2012	10:56:17 AM	H2 valve closed
3/3/2012	10:56:17 AM	BCl3 valve closed
3/3/2012	10:56:17 AM	PH3 valve closed
3/3/2012	10:56:17 AM	SiCl4 pre valve closed
3/3/2012	10:56:17 AM	SiCl4 post valve closed
3/3/2012	10:56:17 AM	Bypass valve closed
3/3/2012	10:56:17 AM	Bubbler valve closed
3/3/2012	10:56:17 AM	Main Vac valve opened
3/3/2012	10:56:17 AM	Helium MFC set to  0.000000
3/3/2012	10:56:17 AM	H2 MFC set to  0.000000
3/3/2012	10:56:17 AM	BCl3 MFC set to  0.000000
3/3/2012	10:56:17 AM	PH3 MFC set to  0.000000
3/3/2012	10:56:17 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:56:17 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:56:17 AM	Tube furnace set to 150
3/3/2012	10:56:47 AM	H2 valve closed
3/3/2012	10:56:47 AM	BCl3 valve closed
3/3/2012	10:56:47 AM	PH3 valve closed
3/3/2012	10:56:47 AM	SiCl4 pre valve closed
3/3/2012	10:56:47 AM	SiCl4 post valve closed
3/3/2012	10:56:47 AM	Bypass valve closed
3/3/2012	10:56:47 AM	Bubbler valve closed
3/3/2012	10:56:47 AM	Helium valve opened
3/3/2012	10:56:47 AM	Main Vac valve opened
3/3/2012	10:56:47 AM	Helium MFC set to  20.000000
3/3/2012	10:56:47 AM	H2 MFC set to  0.000000
3/3/2012	10:56:47 AM	BCl3 MFC set to  0.000000
3/3/2012	10:56:47 AM	PH3 MFC set to  0.000000
3/3/2012	10:56:47 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:56:47 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:56:47 AM	Tube furnace set to 150
3/3/2012	10:57:17 AM	Helium valve closed
3/3/2012	10:57:17 AM	H2 valve closed
3/3/2012	10:57:17 AM	BCl3 valve closed
3/3/2012	10:57:17 AM	PH3 valve closed
3/3/2012	10:57:17 AM	SiCl4 pre valve closed
3/3/2012	10:57:17 AM	SiCl4 post valve closed
3/3/2012	10:57:18 AM	Bypass valve closed
3/3/2012	10:57:18 AM	Bubbler valve closed
3/3/2012	10:57:18 AM	Main Vac valve opened
3/3/2012	10:57:18 AM	Helium MFC set to  0.000000
3/3/2012	10:57:18 AM	H2 MFC set to  0.000000
3/3/2012	10:57:18 AM	BCl3 MFC set to  0.000000
3/3/2012	10:57:18 AM	PH3 MFC set to  0.000000
3/3/2012	10:57:18 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:57:18 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:57:18 AM	Tube furnace set to 150
3/3/2012	10:57:48 AM	H2 valve closed
3/3/2012	10:57:48 AM	BCl3 valve closed
3/3/2012	10:57:48 AM	PH3 valve closed
3/3/2012	10:57:48 AM	SiCl4 pre valve closed
3/3/2012	10:57:48 AM	SiCl4 post valve closed
3/3/2012	10:57:48 AM	Bypass valve closed
3/3/2012	10:57:48 AM	Bubbler valve closed
3/3/2012	10:57:48 AM	Helium valve opened
3/3/2012	10:57:48 AM	Main Vac valve opened
3/3/2012	10:57:48 AM	Helium MFC set to  20.000000
3/3/2012	10:57:48 AM	H2 MFC set to  0.000000
3/3/2012	10:57:48 AM	BCl3 MFC set to  0.000000
3/3/2012	10:57:48 AM	PH3 MFC set to  0.000000
3/3/2012	10:57:48 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:57:48 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:57:48 AM	Tube furnace set to 150
3/3/2012	10:58:18 AM	Helium valve closed
3/3/2012	10:58:18 AM	H2 valve closed
3/3/2012	10:58:18 AM	BCl3 valve closed
3/3/2012	10:58:18 AM	PH3 valve closed
3/3/2012	10:58:18 AM	SiCl4 pre valve closed
3/3/2012	10:58:18 AM	SiCl4 post valve closed
3/3/2012	10:58:18 AM	Bypass valve closed
3/3/2012	10:58:18 AM	Bubbler valve closed
3/3/2012	10:58:18 AM	Main Vac valve opened
3/3/2012	10:58:18 AM	Helium MFC set to  0.000000
3/3/2012	10:58:18 AM	H2 MFC set to  0.000000
3/3/2012	10:58:18 AM	BCl3 MFC set to  0.000000
3/3/2012	10:58:18 AM	PH3 MFC set to  0.000000
3/3/2012	10:58:18 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:58:18 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:58:18 AM	Tube furnace set to 150
3/3/2012	10:58:48 AM	H2 valve closed
3/3/2012	10:58:48 AM	BCl3 valve closed
3/3/2012	10:58:48 AM	PH3 valve closed
3/3/2012	10:58:48 AM	SiCl4 pre valve closed
3/3/2012	10:58:48 AM	SiCl4 post valve closed
3/3/2012	10:58:48 AM	Bypass valve closed
3/3/2012	10:58:48 AM	Bubbler valve closed
3/3/2012	10:58:48 AM	Helium valve opened
3/3/2012	10:58:48 AM	Main Vac valve opened
3/3/2012	10:58:48 AM	Helium MFC set to  20.000000
3/3/2012	10:58:48 AM	H2 MFC set to  0.000000
3/3/2012	10:58:48 AM	BCl3 MFC set to  0.000000
3/3/2012	10:58:48 AM	PH3 MFC set to  0.000000
3/3/2012	10:58:48 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:58:48 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:58:48 AM	Tube furnace set to 150
3/3/2012	10:59:18 AM	Helium valve closed
3/3/2012	10:59:18 AM	H2 valve closed
3/3/2012	10:59:18 AM	BCl3 valve closed
3/3/2012	10:59:18 AM	PH3 valve closed
3/3/2012	10:59:18 AM	SiCl4 pre valve closed
3/3/2012	10:59:18 AM	SiCl4 post valve closed
3/3/2012	10:59:18 AM	Bypass valve closed
3/3/2012	10:59:18 AM	Bubbler valve closed
3/3/2012	10:59:18 AM	Main Vac valve opened
3/3/2012	10:59:18 AM	Helium MFC set to  0.000000
3/3/2012	10:59:18 AM	H2 MFC set to  0.000000
3/3/2012	10:59:18 AM	BCl3 MFC set to  0.000000
3/3/2012	10:59:18 AM	PH3 MFC set to  0.000000
3/3/2012	10:59:18 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:59:18 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:59:18 AM	Tube furnace set to 150
3/3/2012	10:59:19 AM	Run finished at 10:59 AM
3/3/2012	10:59:30 AM	Recipe started at 10:59 AM
3/3/2012	10:59:30 AM	Helium valve closed
3/3/2012	10:59:30 AM	H2 valve closed
3/3/2012	10:59:30 AM	BCl3 valve closed
3/3/2012	10:59:30 AM	PH3 valve closed
3/3/2012	10:59:30 AM	SiCl4 pre valve closed
3/3/2012	10:59:30 AM	SiCl4 post valve closed
3/3/2012	10:59:30 AM	Bypass valve closed
3/3/2012	10:59:30 AM	Bubbler valve closed
3/3/2012	10:59:30 AM	Main Vac valve opened
3/3/2012	10:59:30 AM	Helium MFC set to  0.000000
3/3/2012	10:59:30 AM	H2 MFC set to  0.000000
3/3/2012	10:59:30 AM	BCl3 MFC set to  0.000000
3/3/2012	10:59:30 AM	PH3 MFC set to  0.000000
3/3/2012	10:59:30 AM	SiCl4 MFC set to  0.000000
3/3/2012	10:59:30 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	10:59:30 AM	Tube furnace set to 150
3/3/2012	11:00:00 AM	H2 valve closed
3/3/2012	11:00:00 AM	BCl3 valve closed
3/3/2012	11:00:00 AM	PH3 valve closed
3/3/2012	11:00:00 AM	SiCl4 pre valve closed
3/3/2012	11:00:00 AM	SiCl4 post valve closed
3/3/2012	11:00:00 AM	Bypass valve closed
3/3/2012	11:00:00 AM	Bubbler valve closed
3/3/2012	11:00:00 AM	Helium valve opened
3/3/2012	11:00:00 AM	Main Vac valve opened
3/3/2012	11:00:00 AM	Helium MFC set to  20.000000
3/3/2012	11:00:00 AM	H2 MFC set to  0.000000
3/3/2012	11:00:00 AM	BCl3 MFC set to  0.000000
3/3/2012	11:00:00 AM	PH3 MFC set to  0.000000
3/3/2012	11:00:00 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:00:00 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:00:00 AM	Tube furnace set to 150
3/3/2012	11:00:30 AM	Helium valve closed
3/3/2012	11:00:30 AM	H2 valve closed
3/3/2012	11:00:30 AM	BCl3 valve closed
3/3/2012	11:00:30 AM	PH3 valve closed
3/3/2012	11:00:30 AM	SiCl4 pre valve closed
3/3/2012	11:00:30 AM	SiCl4 post valve closed
3/3/2012	11:00:30 AM	Bypass valve closed
3/3/2012	11:00:30 AM	Bubbler valve closed
3/3/2012	11:00:30 AM	Main Vac valve opened
3/3/2012	11:00:30 AM	Helium MFC set to  0.000000
3/3/2012	11:00:30 AM	H2 MFC set to  0.000000
3/3/2012	11:00:30 AM	BCl3 MFC set to  0.000000
3/3/2012	11:00:30 AM	PH3 MFC set to  0.000000
3/3/2012	11:00:30 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:00:30 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:00:30 AM	Tube furnace set to 150
3/3/2012	11:01:00 AM	H2 valve closed
3/3/2012	11:01:00 AM	BCl3 valve closed
3/3/2012	11:01:00 AM	PH3 valve closed
3/3/2012	11:01:00 AM	SiCl4 pre valve closed
3/3/2012	11:01:00 AM	SiCl4 post valve closed
3/3/2012	11:01:00 AM	Bypass valve closed
3/3/2012	11:01:00 AM	Bubbler valve closed
3/3/2012	11:01:00 AM	Helium valve opened
3/3/2012	11:01:00 AM	Main Vac valve opened
3/3/2012	11:01:00 AM	Helium MFC set to  20.000000
3/3/2012	11:01:00 AM	H2 MFC set to  0.000000
3/3/2012	11:01:00 AM	BCl3 MFC set to  0.000000
3/3/2012	11:01:00 AM	PH3 MFC set to  0.000000
3/3/2012	11:01:00 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:01:00 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:01:01 AM	Tube furnace set to 150
3/3/2012	11:01:31 AM	Helium valve closed
3/3/2012	11:01:31 AM	H2 valve closed
3/3/2012	11:01:31 AM	BCl3 valve closed
3/3/2012	11:01:31 AM	PH3 valve closed
3/3/2012	11:01:31 AM	SiCl4 pre valve closed
3/3/2012	11:01:31 AM	SiCl4 post valve closed
3/3/2012	11:01:31 AM	Bypass valve closed
3/3/2012	11:01:31 AM	Bubbler valve closed
3/3/2012	11:01:31 AM	Main Vac valve opened
3/3/2012	11:01:31 AM	Helium MFC set to  0.000000
3/3/2012	11:01:31 AM	H2 MFC set to  0.000000
3/3/2012	11:01:31 AM	BCl3 MFC set to  0.000000
3/3/2012	11:01:31 AM	PH3 MFC set to  0.000000
3/3/2012	11:01:31 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:01:31 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:01:31 AM	Tube furnace set to 150
3/3/2012	11:02:01 AM	H2 valve closed
3/3/2012	11:02:01 AM	BCl3 valve closed
3/3/2012	11:02:01 AM	PH3 valve closed
3/3/2012	11:02:01 AM	SiCl4 pre valve closed
3/3/2012	11:02:01 AM	SiCl4 post valve closed
3/3/2012	11:02:01 AM	Bypass valve closed
3/3/2012	11:02:01 AM	Bubbler valve closed
3/3/2012	11:02:01 AM	Helium valve opened
3/3/2012	11:02:01 AM	Main Vac valve opened
3/3/2012	11:02:01 AM	Helium MFC set to  20.000000
3/3/2012	11:02:01 AM	H2 MFC set to  0.000000
3/3/2012	11:02:01 AM	BCl3 MFC set to  0.000000
3/3/2012	11:02:01 AM	PH3 MFC set to  0.000000
3/3/2012	11:02:01 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:02:01 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:02:01 AM	Tube furnace set to 150
3/3/2012	11:02:31 AM	Helium valve closed
3/3/2012	11:02:31 AM	H2 valve closed
3/3/2012	11:02:31 AM	BCl3 valve closed
3/3/2012	11:02:31 AM	PH3 valve closed
3/3/2012	11:02:31 AM	SiCl4 pre valve closed
3/3/2012	11:02:31 AM	SiCl4 post valve closed
3/3/2012	11:02:31 AM	Bypass valve closed
3/3/2012	11:02:31 AM	Bubbler valve closed
3/3/2012	11:02:31 AM	Main Vac valve opened
3/3/2012	11:02:31 AM	Helium MFC set to  0.000000
3/3/2012	11:02:31 AM	H2 MFC set to  0.000000
3/3/2012	11:02:31 AM	BCl3 MFC set to  0.000000
3/3/2012	11:02:31 AM	PH3 MFC set to  0.000000
3/3/2012	11:02:31 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:02:31 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:02:31 AM	Tube furnace set to 150
3/3/2012	11:03:01 AM	H2 valve closed
3/3/2012	11:03:01 AM	BCl3 valve closed
3/3/2012	11:03:01 AM	PH3 valve closed
3/3/2012	11:03:01 AM	SiCl4 pre valve closed
3/3/2012	11:03:01 AM	SiCl4 post valve closed
3/3/2012	11:03:01 AM	Bypass valve closed
3/3/2012	11:03:01 AM	Bubbler valve closed
3/3/2012	11:03:01 AM	Helium valve opened
3/3/2012	11:03:01 AM	Main Vac valve opened
3/3/2012	11:03:01 AM	Helium MFC set to  20.000000
3/3/2012	11:03:01 AM	H2 MFC set to  0.000000
3/3/2012	11:03:01 AM	BCl3 MFC set to  0.000000
3/3/2012	11:03:01 AM	PH3 MFC set to  0.000000
3/3/2012	11:03:01 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:03:01 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:03:01 AM	Tube furnace set to 150
3/3/2012	11:03:31 AM	Helium valve closed
3/3/2012	11:03:31 AM	H2 valve closed
3/3/2012	11:03:31 AM	BCl3 valve closed
3/3/2012	11:03:31 AM	PH3 valve closed
3/3/2012	11:03:31 AM	SiCl4 pre valve closed
3/3/2012	11:03:31 AM	SiCl4 post valve closed
3/3/2012	11:03:31 AM	Bypass valve closed
3/3/2012	11:03:31 AM	Bubbler valve closed
3/3/2012	11:03:31 AM	Main Vac valve opened
3/3/2012	11:03:31 AM	Helium MFC set to  0.000000
3/3/2012	11:03:31 AM	H2 MFC set to  0.000000
3/3/2012	11:03:31 AM	BCl3 MFC set to  0.000000
3/3/2012	11:03:31 AM	PH3 MFC set to  0.000000
3/3/2012	11:03:31 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:03:31 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:03:32 AM	Tube furnace set to 150
3/3/2012	11:04:02 AM	H2 valve closed
3/3/2012	11:04:02 AM	BCl3 valve closed
3/3/2012	11:04:02 AM	PH3 valve closed
3/3/2012	11:04:02 AM	SiCl4 pre valve closed
3/3/2012	11:04:02 AM	SiCl4 post valve closed
3/3/2012	11:04:02 AM	Bypass valve closed
3/3/2012	11:04:02 AM	Bubbler valve closed
3/3/2012	11:04:02 AM	Helium valve opened
3/3/2012	11:04:02 AM	Main Vac valve opened
3/3/2012	11:04:02 AM	Helium MFC set to  20.000000
3/3/2012	11:04:02 AM	H2 MFC set to  0.000000
3/3/2012	11:04:02 AM	BCl3 MFC set to  0.000000
3/3/2012	11:04:02 AM	PH3 MFC set to  0.000000
3/3/2012	11:04:02 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:04:02 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:04:02 AM	Tube furnace set to 150
3/3/2012	11:04:32 AM	Helium valve closed
3/3/2012	11:04:32 AM	H2 valve closed
3/3/2012	11:04:32 AM	BCl3 valve closed
3/3/2012	11:04:32 AM	PH3 valve closed
3/3/2012	11:04:32 AM	SiCl4 pre valve closed
3/3/2012	11:04:32 AM	SiCl4 post valve closed
3/3/2012	11:04:32 AM	Bypass valve closed
3/3/2012	11:04:32 AM	Bubbler valve closed
3/3/2012	11:04:32 AM	Main Vac valve opened
3/3/2012	11:04:32 AM	Helium MFC set to  0.000000
3/3/2012	11:04:32 AM	H2 MFC set to  0.000000
3/3/2012	11:04:32 AM	BCl3 MFC set to  0.000000
3/3/2012	11:04:32 AM	PH3 MFC set to  0.000000
3/3/2012	11:04:32 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:04:32 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:04:32 AM	Tube furnace set to 150
3/3/2012	11:05:00 AM	H2 valve closed
3/3/2012	11:05:00 AM	BCl3 valve closed
3/3/2012	11:05:00 AM	PH3 valve closed
3/3/2012	11:05:00 AM	SiCl4 pre valve closed
3/3/2012	11:05:00 AM	SiCl4 post valve closed
3/3/2012	11:05:00 AM	Bypass valve closed
3/3/2012	11:05:00 AM	Bubbler valve closed
3/3/2012	11:05:00 AM	Helium valve opened
3/3/2012	11:05:00 AM	Main Vac valve opened
3/3/2012	11:05:00 AM	Helium MFC set to  20.000000
3/3/2012	11:05:00 AM	H2 MFC set to  0.000000
3/3/2012	11:05:00 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:00 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:00 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:00 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:00 AM	Tube furnace set to 150
3/3/2012	11:05:00 AM	Helium valve closed
3/3/2012	11:05:00 AM	H2 valve closed
3/3/2012	11:05:00 AM	BCl3 valve closed
3/3/2012	11:05:00 AM	PH3 valve closed
3/3/2012	11:05:00 AM	SiCl4 pre valve closed
3/3/2012	11:05:00 AM	SiCl4 post valve closed
3/3/2012	11:05:00 AM	Bypass valve closed
3/3/2012	11:05:00 AM	Bubbler valve closed
3/3/2012	11:05:00 AM	Main Vac valve opened
3/3/2012	11:05:00 AM	Helium MFC set to  0.000000
3/3/2012	11:05:00 AM	H2 MFC set to  0.000000
3/3/2012	11:05:00 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:00 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:00 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:00 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:01 AM	Tube furnace set to 150
3/3/2012	11:05:01 AM	H2 valve closed
3/3/2012	11:05:01 AM	BCl3 valve closed
3/3/2012	11:05:01 AM	PH3 valve closed
3/3/2012	11:05:01 AM	SiCl4 pre valve closed
3/3/2012	11:05:01 AM	SiCl4 post valve closed
3/3/2012	11:05:01 AM	Bypass valve closed
3/3/2012	11:05:01 AM	Bubbler valve closed
3/3/2012	11:05:01 AM	Helium valve opened
3/3/2012	11:05:01 AM	Main Vac valve opened
3/3/2012	11:05:01 AM	Helium MFC set to  20.000000
3/3/2012	11:05:01 AM	H2 MFC set to  0.000000
3/3/2012	11:05:01 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:01 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:01 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:01 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:02 AM	Tube furnace set to 150
3/3/2012	11:05:03 AM	Helium valve closed
3/3/2012	11:05:03 AM	H2 valve closed
3/3/2012	11:05:03 AM	BCl3 valve closed
3/3/2012	11:05:03 AM	PH3 valve closed
3/3/2012	11:05:03 AM	SiCl4 pre valve closed
3/3/2012	11:05:03 AM	SiCl4 post valve closed
3/3/2012	11:05:03 AM	Bypass valve closed
3/3/2012	11:05:03 AM	Bubbler valve closed
3/3/2012	11:05:03 AM	Main Vac valve opened
3/3/2012	11:05:03 AM	Helium MFC set to  0.000000
3/3/2012	11:05:03 AM	H2 MFC set to  0.000000
3/3/2012	11:05:03 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:03 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:03 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:03 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:03 AM	Tube furnace set to 150
3/3/2012	11:05:03 AM	H2 valve closed
3/3/2012	11:05:03 AM	BCl3 valve closed
3/3/2012	11:05:03 AM	PH3 valve closed
3/3/2012	11:05:03 AM	SiCl4 pre valve closed
3/3/2012	11:05:03 AM	SiCl4 post valve closed
3/3/2012	11:05:03 AM	Bypass valve closed
3/3/2012	11:05:03 AM	Bubbler valve closed
3/3/2012	11:05:03 AM	Helium valve opened
3/3/2012	11:05:03 AM	Main Vac valve opened
3/3/2012	11:05:03 AM	Helium MFC set to  20.000000
3/3/2012	11:05:03 AM	H2 MFC set to  0.000000
3/3/2012	11:05:03 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:03 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:03 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:03 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:03 AM	Tube furnace set to 150
3/3/2012	11:05:04 AM	Helium valve closed
3/3/2012	11:05:04 AM	H2 valve closed
3/3/2012	11:05:04 AM	BCl3 valve closed
3/3/2012	11:05:04 AM	PH3 valve closed
3/3/2012	11:05:04 AM	SiCl4 pre valve closed
3/3/2012	11:05:04 AM	SiCl4 post valve closed
3/3/2012	11:05:04 AM	Bypass valve closed
3/3/2012	11:05:04 AM	Bubbler valve closed
3/3/2012	11:05:04 AM	Main Vac valve opened
3/3/2012	11:05:04 AM	Helium MFC set to  0.000000
3/3/2012	11:05:04 AM	H2 MFC set to  0.000000
3/3/2012	11:05:04 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:04 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:04 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:04 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:04 AM	Tube furnace set to 150
3/3/2012	11:05:04 AM	H2 valve closed
3/3/2012	11:05:04 AM	BCl3 valve closed
3/3/2012	11:05:04 AM	PH3 valve closed
3/3/2012	11:05:04 AM	SiCl4 pre valve closed
3/3/2012	11:05:04 AM	SiCl4 post valve closed
3/3/2012	11:05:04 AM	Bypass valve closed
3/3/2012	11:05:04 AM	Bubbler valve closed
3/3/2012	11:05:04 AM	Helium valve opened
3/3/2012	11:05:04 AM	Main Vac valve opened
3/3/2012	11:05:04 AM	Helium MFC set to  20.000000
3/3/2012	11:05:04 AM	H2 MFC set to  0.000000
3/3/2012	11:05:04 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:05 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:05 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:05 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:05 AM	Tube furnace set to 150
3/3/2012	11:05:05 AM	Helium valve closed
3/3/2012	11:05:05 AM	H2 valve closed
3/3/2012	11:05:05 AM	BCl3 valve closed
3/3/2012	11:05:05 AM	PH3 valve closed
3/3/2012	11:05:05 AM	SiCl4 pre valve closed
3/3/2012	11:05:05 AM	SiCl4 post valve closed
3/3/2012	11:05:05 AM	Bypass valve closed
3/3/2012	11:05:05 AM	Bubbler valve closed
3/3/2012	11:05:05 AM	Main Vac valve opened
3/3/2012	11:05:05 AM	Helium MFC set to  0.000000
3/3/2012	11:05:05 AM	H2 MFC set to  0.000000
3/3/2012	11:05:05 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:05 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:05 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:05 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:05 AM	Tube furnace set to 150
3/3/2012	11:05:06 AM	H2 valve closed
3/3/2012	11:05:06 AM	BCl3 valve closed
3/3/2012	11:05:06 AM	PH3 valve closed
3/3/2012	11:05:06 AM	SiCl4 pre valve closed
3/3/2012	11:05:06 AM	SiCl4 post valve closed
3/3/2012	11:05:06 AM	Bypass valve closed
3/3/2012	11:05:06 AM	Bubbler valve closed
3/3/2012	11:05:06 AM	Helium valve opened
3/3/2012	11:05:06 AM	Main Vac valve opened
3/3/2012	11:05:06 AM	Helium MFC set to  20.000000
3/3/2012	11:05:06 AM	H2 MFC set to  0.000000
3/3/2012	11:05:06 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:06 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:06 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:06 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:06 AM	Tube furnace set to 150
3/3/2012	11:05:36 AM	Helium valve closed
3/3/2012	11:05:36 AM	H2 valve closed
3/3/2012	11:05:36 AM	BCl3 valve closed
3/3/2012	11:05:36 AM	PH3 valve closed
3/3/2012	11:05:36 AM	SiCl4 pre valve closed
3/3/2012	11:05:36 AM	SiCl4 post valve closed
3/3/2012	11:05:36 AM	Bypass valve closed
3/3/2012	11:05:36 AM	Bubbler valve closed
3/3/2012	11:05:36 AM	Main Vac valve opened
3/3/2012	11:05:36 AM	Helium MFC set to  0.000000
3/3/2012	11:05:36 AM	H2 MFC set to  0.000000
3/3/2012	11:05:36 AM	BCl3 MFC set to  0.000000
3/3/2012	11:05:36 AM	PH3 MFC set to  0.000000
3/3/2012	11:05:36 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:05:36 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:05:36 AM	Tube furnace set to 150
3/3/2012	11:05:37 AM	Run finished at 11:05 AM
3/3/2012	11:08:38 AM	Main Vac valve closed
3/3/2012	11:08:44 AM	Main Vac valve opened
3/3/2012	11:09:57 AM	Recipe started at 11:09 AM
3/3/2012	11:09:57 AM	Helium valve closed
3/3/2012	11:09:57 AM	H2 valve closed
3/3/2012	11:09:57 AM	BCl3 valve closed
3/3/2012	11:09:57 AM	PH3 valve closed
3/3/2012	11:09:57 AM	SiCl4 pre valve closed
3/3/2012	11:09:57 AM	SiCl4 post valve closed
3/3/2012	11:09:57 AM	Main Vac valve closed
3/3/2012	11:09:57 AM	Bypass valve closed
3/3/2012	11:09:57 AM	Bubbler valve closed
3/3/2012	11:09:57 AM	Helium MFC set to  0.000000
3/3/2012	11:09:57 AM	H2 MFC set to  0.000000
3/3/2012	11:09:57 AM	BCl3 MFC set to  0.000000
3/3/2012	11:09:57 AM	PH3 MFC set to  0.000000
3/3/2012	11:09:57 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:09:57 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:09:57 AM	Tube furnace set to 0
3/3/2012	11:10:00 AM	Helium valve closed
3/3/2012	11:10:00 AM	BCl3 valve closed
3/3/2012	11:10:00 AM	PH3 valve closed
3/3/2012	11:10:00 AM	SiCl4 pre valve closed
3/3/2012	11:10:00 AM	SiCl4 post valve closed
3/3/2012	11:10:00 AM	Main Vac valve closed
3/3/2012	11:10:00 AM	Bypass valve closed
3/3/2012	11:10:00 AM	Bubbler valve closed
3/3/2012	11:10:00 AM	H2 valve opened
3/3/2012	11:10:00 AM	Helium MFC set to  0.000000
3/3/2012	11:10:00 AM	H2 MFC set to  500.000000
3/3/2012	11:10:00 AM	BCl3 MFC set to  0.000000
3/3/2012	11:10:00 AM	PH3 MFC set to  0.000000
3/3/2012	11:10:00 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:10:00 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:10:00 AM	Tube furnace set to 0
3/3/2012	11:11:03 AM	Helium valve closed
3/3/2012	11:11:03 AM	BCl3 valve closed
3/3/2012	11:11:03 AM	PH3 valve closed
3/3/2012	11:11:03 AM	SiCl4 pre valve closed
3/3/2012	11:11:03 AM	SiCl4 post valve closed
3/3/2012	11:11:03 AM	Main Vac valve closed
3/3/2012	11:11:03 AM	Bypass valve closed
3/3/2012	11:11:03 AM	H2 valve opened
3/3/2012	11:11:03 AM	Bubbler valve opened
3/3/2012	11:11:03 AM	Helium MFC set to  0.000000
3/3/2012	11:11:03 AM	H2 MFC set to  500.000000
3/3/2012	11:11:03 AM	BCl3 MFC set to  0.000000
3/3/2012	11:11:03 AM	PH3 MFC set to  0.000000
3/3/2012	11:11:03 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:11:03 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:11:03 AM	Tube furnace set to 0
3/3/2012	11:11:04 AM	Helium valve closed
3/3/2012	11:11:04 AM	BCl3 valve closed
3/3/2012	11:11:04 AM	PH3 valve closed
3/3/2012	11:11:04 AM	SiCl4 pre valve closed
3/3/2012	11:11:04 AM	SiCl4 post valve closed
3/3/2012	11:11:04 AM	Main Vac valve closed
3/3/2012	11:11:04 AM	Bypass valve closed
3/3/2012	11:11:04 AM	H2 valve opened
3/3/2012	11:11:04 AM	Bubbler valve opened
3/3/2012	11:11:04 AM	Helium MFC set to  0.000000
3/3/2012	11:11:04 AM	H2 MFC set to  500.000000
3/3/2012	11:11:04 AM	BCl3 MFC set to  0.000000
3/3/2012	11:11:04 AM	PH3 MFC set to  0.000000
3/3/2012	11:11:04 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:11:04 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:11:04 AM	Tube furnace set to 1000
3/3/2012	11:31:05 AM	Helium valve closed
3/3/2012	11:31:05 AM	PH3 valve closed
3/3/2012	11:31:05 AM	Main Vac valve closed
3/3/2012	11:31:05 AM	Bypass valve closed
3/3/2012	11:31:05 AM	H2 valve opened
3/3/2012	11:31:05 AM	BCl3 valve opened
3/3/2012	11:31:05 AM	SiCl4 pre valve opened
3/3/2012	11:31:05 AM	SiCl4 post valve opened
3/3/2012	11:31:05 AM	Bubbler valve opened
3/3/2012	11:31:05 AM	Helium MFC set to  0.000000
3/3/2012	11:31:05 AM	H2 MFC set to  500.000000
3/3/2012	11:31:05 AM	BCl3 MFC set to  1.500000
3/3/2012	11:31:05 AM	PH3 MFC set to  0.000000
3/3/2012	11:31:05 AM	SiCl4 MFC set to  50.000000
3/3/2012	11:31:05 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:31:05 AM	Tube furnace set to 1000
3/3/2012	11:46:05 AM	Helium valve closed
3/3/2012	11:46:05 AM	BCl3 valve closed
3/3/2012	11:46:05 AM	PH3 valve closed
3/3/2012	11:46:05 AM	SiCl4 pre valve closed
3/3/2012	11:46:05 AM	SiCl4 post valve closed
3/3/2012	11:46:05 AM	Main Vac valve closed
3/3/2012	11:46:05 AM	Bypass valve closed
3/3/2012	11:46:05 AM	H2 valve opened
3/3/2012	11:46:05 AM	Bubbler valve opened
3/3/2012	11:46:05 AM	Helium MFC set to  0.000000
3/3/2012	11:46:05 AM	H2 MFC set to  500.000000
3/3/2012	11:46:05 AM	BCl3 MFC set to  0.000000
3/3/2012	11:46:05 AM	PH3 MFC set to  0.000000
3/3/2012	11:46:05 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:46:05 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:46:05 AM	Tube furnace set to 750
3/3/2012	11:51:05 AM	H2 valve closed
3/3/2012	11:51:05 AM	BCl3 valve closed
3/3/2012	11:51:05 AM	PH3 valve closed
3/3/2012	11:51:05 AM	SiCl4 pre valve closed
3/3/2012	11:51:05 AM	SiCl4 post valve closed
3/3/2012	11:51:05 AM	Main Vac valve closed
3/3/2012	11:51:05 AM	Bypass valve closed
3/3/2012	11:51:05 AM	Helium valve opened
3/3/2012	11:51:05 AM	Bubbler valve opened
3/3/2012	11:51:05 AM	Helium MFC set to  500.000000
3/3/2012	11:51:05 AM	H2 MFC set to  0.000000
3/3/2012	11:51:05 AM	BCl3 MFC set to  0.000000
3/3/2012	11:51:05 AM	PH3 MFC set to  0.000000
3/3/2012	11:51:05 AM	SiCl4 MFC set to  0.000000
3/3/2012	11:51:05 AM	Bypass solenoid MFC set to  0.000000
3/3/2012	11:51:05 AM	Tube furnace set to 0
3/3/2012	12:06:40 PM	Run aborted at 12:06 PM
3/3/2012	12:06:40 PM	Helium valve closed
3/3/2012	12:06:40 PM	H2 valve closed
3/3/2012	12:06:40 PM	BCl3 valve closed
3/3/2012	12:06:40 PM	PH3 valve closed
3/3/2012	12:06:40 PM	SiCl4 pre valve closed
3/3/2012	12:06:40 PM	SiCl4 post valve closed
3/3/2012	12:06:40 PM	Bypass valve closed
3/3/2012	12:06:40 PM	Main Vac valve closed
3/3/2012	12:06:40 PM	Bubbler valve closed
3/3/2012	12:06:40 PM	Helium MFC set to  0.000000
3/3/2012	12:06:40 PM	H2 MFC set to  0.000000
3/3/2012	12:06:40 PM	BCl3 MFC set to  0.000000
3/3/2012	12:06:40 PM	PH3 MFC set to  0.000000
3/3/2012	12:06:40 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:06:40 PM	Tube furnace set to 0
3/3/2012	12:06:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	12:06:46 PM	Recipe started at 12:06 PM
3/3/2012	12:06:46 PM	Helium valve closed
3/3/2012	12:06:46 PM	H2 valve closed
3/3/2012	12:06:46 PM	BCl3 valve closed
3/3/2012	12:06:46 PM	PH3 valve closed
3/3/2012	12:06:46 PM	SiCl4 pre valve closed
3/3/2012	12:06:46 PM	SiCl4 post valve closed
3/3/2012	12:06:46 PM	Main Vac valve closed
3/3/2012	12:06:46 PM	Bypass valve closed
3/3/2012	12:06:46 PM	Bubbler valve closed
3/3/2012	12:06:46 PM	Helium MFC set to  0.000000
3/3/2012	12:06:46 PM	H2 MFC set to  0.000000
3/3/2012	12:06:46 PM	BCl3 MFC set to  0.000000
3/3/2012	12:06:46 PM	PH3 MFC set to  0.000000
3/3/2012	12:06:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:06:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:06:46 PM	Tube furnace set to 0
3/3/2012	12:06:49 PM	H2 valve closed
3/3/2012	12:06:49 PM	BCl3 valve closed
3/3/2012	12:06:49 PM	PH3 valve closed
3/3/2012	12:06:49 PM	SiCl4 pre valve closed
3/3/2012	12:06:49 PM	SiCl4 post valve closed
3/3/2012	12:06:49 PM	Main Vac valve closed
3/3/2012	12:06:49 PM	Bypass valve closed
3/3/2012	12:06:49 PM	Bubbler valve closed
3/3/2012	12:06:49 PM	Helium valve opened
3/3/2012	12:06:49 PM	Helium MFC set to  500.000000
3/3/2012	12:06:49 PM	H2 MFC set to  0.000000
3/3/2012	12:06:49 PM	BCl3 MFC set to  0.000000
3/3/2012	12:06:49 PM	PH3 MFC set to  0.000000
3/3/2012	12:06:49 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:06:49 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:06:49 PM	Tube furnace set to 0
3/3/2012	12:06:49 PM	Helium valve closed
3/3/2012	12:06:49 PM	H2 valve closed
3/3/2012	12:06:49 PM	BCl3 valve closed
3/3/2012	12:06:50 PM	PH3 valve closed
3/3/2012	12:06:50 PM	SiCl4 pre valve closed
3/3/2012	12:06:50 PM	SiCl4 post valve closed
3/3/2012	12:06:50 PM	Main Vac valve closed
3/3/2012	12:06:50 PM	Bypass valve closed
3/3/2012	12:06:50 PM	Bubbler valve closed
3/3/2012	12:06:50 PM	Helium MFC set to  0.000000
3/3/2012	12:06:50 PM	H2 MFC set to  0.000000
3/3/2012	12:06:50 PM	BCl3 MFC set to  0.000000
3/3/2012	12:06:50 PM	PH3 MFC set to  0.000000
3/3/2012	12:06:50 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:06:50 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:06:50 PM	Tube furnace set to 0
3/3/2012	12:06:51 PM	Run finished at 12:06 PM
3/3/2012	12:06:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	12:12:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	12:12:01 PM	Recipe started at 12:12 PM
3/3/2012	12:12:01 PM	Helium valve closed
3/3/2012	12:12:01 PM	H2 valve closed
3/3/2012	12:12:01 PM	BCl3 valve closed
3/3/2012	12:12:01 PM	PH3 valve closed
3/3/2012	12:12:01 PM	SiCl4 pre valve closed
3/3/2012	12:12:01 PM	SiCl4 post valve closed
3/3/2012	12:12:01 PM	Main Vac valve closed
3/3/2012	12:12:01 PM	Bubbler valve closed
3/3/2012	12:12:01 PM	Bypass valve opened
3/3/2012	12:12:01 PM	Helium MFC set to  0.000000
3/3/2012	12:12:01 PM	H2 MFC set to  0.000000
3/3/2012	12:12:01 PM	BCl3 MFC set to  0.000000
3/3/2012	12:12:01 PM	PH3 MFC set to  0.000000
3/3/2012	12:12:01 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:12:01 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:12:01 PM	Tube furnace set to 0
3/3/2012	12:12:59 PM	Helium valve closed
3/3/2012	12:12:59 PM	H2 valve closed
3/3/2012	12:12:59 PM	BCl3 valve closed
3/3/2012	12:12:59 PM	PH3 valve closed
3/3/2012	12:12:59 PM	SiCl4 pre valve closed
3/3/2012	12:12:59 PM	SiCl4 post valve closed
3/3/2012	12:12:59 PM	Main Vac valve closed
3/3/2012	12:12:59 PM	Bubbler valve closed
3/3/2012	12:12:59 PM	Bypass valve opened
3/3/2012	12:12:59 PM	Helium MFC set to  0.000000
3/3/2012	12:12:59 PM	H2 MFC set to  0.000000
3/3/2012	12:12:59 PM	BCl3 MFC set to  0.000000
3/3/2012	12:12:59 PM	PH3 MFC set to  0.000000
3/3/2012	12:12:59 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:12:59 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:13:00 PM	Tube furnace set to 0
3/3/2012	12:14:00 PM	Helium valve closed
3/3/2012	12:14:00 PM	H2 valve closed
3/3/2012	12:14:00 PM	BCl3 valve closed
3/3/2012	12:14:00 PM	PH3 valve closed
3/3/2012	12:14:00 PM	SiCl4 pre valve closed
3/3/2012	12:14:00 PM	SiCl4 post valve closed
3/3/2012	12:14:00 PM	Bypass valve closed
3/3/2012	12:14:00 PM	Bubbler valve closed
3/3/2012	12:14:00 PM	Main Vac valve opened
3/3/2012	12:14:00 PM	Helium MFC set to  0.000000
3/3/2012	12:14:00 PM	H2 MFC set to  0.000000
3/3/2012	12:14:00 PM	BCl3 MFC set to  0.000000
3/3/2012	12:14:00 PM	PH3 MFC set to  0.000000
3/3/2012	12:14:00 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:14:00 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:14:00 PM	Tube furnace set to 0
3/3/2012	12:14:01 PM	Run finished at 12:14 PM
3/3/2012	12:14:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	12:16:15 PM	Recipe started at 12:16 PM
3/3/2012	12:16:15 PM	Helium valve closed
3/3/2012	12:16:15 PM	H2 valve closed
3/3/2012	12:16:15 PM	BCl3 valve closed
3/3/2012	12:16:15 PM	PH3 valve closed
3/3/2012	12:16:15 PM	SiCl4 pre valve closed
3/3/2012	12:16:15 PM	SiCl4 post valve closed
3/3/2012	12:16:15 PM	Bypass valve closed
3/3/2012	12:16:15 PM	Bubbler valve closed
3/3/2012	12:16:15 PM	Main Vac valve opened
3/3/2012	12:16:15 PM	Helium MFC set to  0.000000
3/3/2012	12:16:15 PM	H2 MFC set to  0.000000
3/3/2012	12:16:15 PM	BCl3 MFC set to  0.000000
3/3/2012	12:16:15 PM	PH3 MFC set to  0.000000
3/3/2012	12:16:15 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:16:15 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:16:15 PM	Tube furnace set to 150
3/3/2012	12:16:45 PM	H2 valve closed
3/3/2012	12:16:45 PM	BCl3 valve closed
3/3/2012	12:16:45 PM	PH3 valve closed
3/3/2012	12:16:45 PM	SiCl4 pre valve closed
3/3/2012	12:16:45 PM	SiCl4 post valve closed
3/3/2012	12:16:45 PM	Bypass valve closed
3/3/2012	12:16:45 PM	Bubbler valve closed
3/3/2012	12:16:45 PM	Helium valve opened
3/3/2012	12:16:45 PM	Main Vac valve opened
3/3/2012	12:16:45 PM	Helium MFC set to  20.000000
3/3/2012	12:16:45 PM	H2 MFC set to  0.000000
3/3/2012	12:16:45 PM	BCl3 MFC set to  0.000000
3/3/2012	12:16:45 PM	PH3 MFC set to  0.000000
3/3/2012	12:16:45 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:16:45 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:16:45 PM	Tube furnace set to 150
3/3/2012	12:17:15 PM	Helium valve closed
3/3/2012	12:17:15 PM	H2 valve closed
3/3/2012	12:17:15 PM	BCl3 valve closed
3/3/2012	12:17:15 PM	PH3 valve closed
3/3/2012	12:17:16 PM	SiCl4 pre valve closed
3/3/2012	12:17:16 PM	SiCl4 post valve closed
3/3/2012	12:17:16 PM	Bypass valve closed
3/3/2012	12:17:16 PM	Bubbler valve closed
3/3/2012	12:17:16 PM	Main Vac valve opened
3/3/2012	12:17:16 PM	Helium MFC set to  0.000000
3/3/2012	12:17:16 PM	H2 MFC set to  0.000000
3/3/2012	12:17:16 PM	BCl3 MFC set to  0.000000
3/3/2012	12:17:16 PM	PH3 MFC set to  0.000000
3/3/2012	12:17:16 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:17:16 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:17:16 PM	Tube furnace set to 150
3/3/2012	12:17:46 PM	H2 valve closed
3/3/2012	12:17:46 PM	BCl3 valve closed
3/3/2012	12:17:46 PM	PH3 valve closed
3/3/2012	12:17:46 PM	SiCl4 pre valve closed
3/3/2012	12:17:46 PM	SiCl4 post valve closed
3/3/2012	12:17:46 PM	Bypass valve closed
3/3/2012	12:17:46 PM	Bubbler valve closed
3/3/2012	12:17:46 PM	Helium valve opened
3/3/2012	12:17:46 PM	Main Vac valve opened
3/3/2012	12:17:46 PM	Helium MFC set to  20.000000
3/3/2012	12:17:46 PM	H2 MFC set to  0.000000
3/3/2012	12:17:46 PM	BCl3 MFC set to  0.000000
3/3/2012	12:17:46 PM	PH3 MFC set to  0.000000
3/3/2012	12:17:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:17:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:17:46 PM	Tube furnace set to 150
3/3/2012	12:18:16 PM	Helium valve closed
3/3/2012	12:18:16 PM	H2 valve closed
3/3/2012	12:18:16 PM	BCl3 valve closed
3/3/2012	12:18:16 PM	PH3 valve closed
3/3/2012	12:18:16 PM	SiCl4 pre valve closed
3/3/2012	12:18:16 PM	SiCl4 post valve closed
3/3/2012	12:18:16 PM	Bypass valve closed
3/3/2012	12:18:16 PM	Bubbler valve closed
3/3/2012	12:18:16 PM	Main Vac valve opened
3/3/2012	12:18:16 PM	Helium MFC set to  0.000000
3/3/2012	12:18:16 PM	H2 MFC set to  0.000000
3/3/2012	12:18:16 PM	BCl3 MFC set to  0.000000
3/3/2012	12:18:16 PM	PH3 MFC set to  0.000000
3/3/2012	12:18:16 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:18:16 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:18:16 PM	Tube furnace set to 150
3/3/2012	12:18:46 PM	H2 valve closed
3/3/2012	12:18:46 PM	BCl3 valve closed
3/3/2012	12:18:46 PM	PH3 valve closed
3/3/2012	12:18:46 PM	SiCl4 pre valve closed
3/3/2012	12:18:46 PM	SiCl4 post valve closed
3/3/2012	12:18:46 PM	Bypass valve closed
3/3/2012	12:18:46 PM	Bubbler valve closed
3/3/2012	12:18:46 PM	Helium valve opened
3/3/2012	12:18:46 PM	Main Vac valve opened
3/3/2012	12:18:46 PM	Helium MFC set to  20.000000
3/3/2012	12:18:46 PM	H2 MFC set to  0.000000
3/3/2012	12:18:46 PM	BCl3 MFC set to  0.000000
3/3/2012	12:18:46 PM	PH3 MFC set to  0.000000
3/3/2012	12:18:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:18:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:18:46 PM	Tube furnace set to 150
3/3/2012	12:19:16 PM	Helium valve closed
3/3/2012	12:19:16 PM	H2 valve closed
3/3/2012	12:19:16 PM	BCl3 valve closed
3/3/2012	12:19:16 PM	PH3 valve closed
3/3/2012	12:19:16 PM	SiCl4 pre valve closed
3/3/2012	12:19:16 PM	SiCl4 post valve closed
3/3/2012	12:19:16 PM	Bypass valve closed
3/3/2012	12:19:16 PM	Bubbler valve closed
3/3/2012	12:19:16 PM	Main Vac valve opened
3/3/2012	12:19:16 PM	Helium MFC set to  0.000000
3/3/2012	12:19:16 PM	H2 MFC set to  0.000000
3/3/2012	12:19:16 PM	BCl3 MFC set to  0.000000
3/3/2012	12:19:16 PM	PH3 MFC set to  0.000000
3/3/2012	12:19:16 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:19:16 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:19:17 PM	Tube furnace set to 150
3/3/2012	12:19:47 PM	H2 valve closed
3/3/2012	12:19:47 PM	BCl3 valve closed
3/3/2012	12:19:47 PM	PH3 valve closed
3/3/2012	12:19:47 PM	SiCl4 pre valve closed
3/3/2012	12:19:47 PM	SiCl4 post valve closed
3/3/2012	12:19:47 PM	Bypass valve closed
3/3/2012	12:19:47 PM	Bubbler valve closed
3/3/2012	12:19:47 PM	Helium valve opened
3/3/2012	12:19:47 PM	Main Vac valve opened
3/3/2012	12:19:47 PM	Helium MFC set to  20.000000
3/3/2012	12:19:47 PM	H2 MFC set to  0.000000
3/3/2012	12:19:47 PM	BCl3 MFC set to  0.000000
3/3/2012	12:19:47 PM	PH3 MFC set to  0.000000
3/3/2012	12:19:47 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:19:47 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:19:47 PM	Tube furnace set to 150
3/3/2012	12:20:17 PM	Helium valve closed
3/3/2012	12:20:17 PM	H2 valve closed
3/3/2012	12:20:17 PM	BCl3 valve closed
3/3/2012	12:20:17 PM	PH3 valve closed
3/3/2012	12:20:17 PM	SiCl4 pre valve closed
3/3/2012	12:20:17 PM	SiCl4 post valve closed
3/3/2012	12:20:17 PM	Bypass valve closed
3/3/2012	12:20:17 PM	Bubbler valve closed
3/3/2012	12:20:17 PM	Main Vac valve opened
3/3/2012	12:20:17 PM	Helium MFC set to  0.000000
3/3/2012	12:20:17 PM	H2 MFC set to  0.000000
3/3/2012	12:20:17 PM	BCl3 MFC set to  0.000000
3/3/2012	12:20:17 PM	PH3 MFC set to  0.000000
3/3/2012	12:20:17 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:20:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:20:17 PM	Tube furnace set to 150
3/3/2012	12:20:47 PM	H2 valve closed
3/3/2012	12:20:47 PM	BCl3 valve closed
3/3/2012	12:20:47 PM	PH3 valve closed
3/3/2012	12:20:47 PM	SiCl4 pre valve closed
3/3/2012	12:20:47 PM	SiCl4 post valve closed
3/3/2012	12:20:47 PM	Bypass valve closed
3/3/2012	12:20:47 PM	Bubbler valve closed
3/3/2012	12:20:47 PM	Helium valve opened
3/3/2012	12:20:47 PM	Main Vac valve opened
3/3/2012	12:20:47 PM	Helium MFC set to  20.000000
3/3/2012	12:20:47 PM	H2 MFC set to  0.000000
3/3/2012	12:20:47 PM	BCl3 MFC set to  0.000000
3/3/2012	12:20:47 PM	PH3 MFC set to  0.000000
3/3/2012	12:20:47 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:20:47 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:20:47 PM	Tube furnace set to 150
3/3/2012	12:21:17 PM	Helium valve closed
3/3/2012	12:21:17 PM	H2 valve closed
3/3/2012	12:21:17 PM	BCl3 valve closed
3/3/2012	12:21:17 PM	PH3 valve closed
3/3/2012	12:21:17 PM	SiCl4 pre valve closed
3/3/2012	12:21:17 PM	SiCl4 post valve closed
3/3/2012	12:21:17 PM	Bypass valve closed
3/3/2012	12:21:17 PM	Bubbler valve closed
3/3/2012	12:21:17 PM	Main Vac valve opened
3/3/2012	12:21:17 PM	Helium MFC set to  0.000000
3/3/2012	12:21:17 PM	H2 MFC set to  0.000000
3/3/2012	12:21:17 PM	BCl3 MFC set to  0.000000
3/3/2012	12:21:17 PM	PH3 MFC set to  0.000000
3/3/2012	12:21:17 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:21:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:21:17 PM	Tube furnace set to 150
3/3/2012	12:21:47 PM	H2 valve closed
3/3/2012	12:21:47 PM	BCl3 valve closed
3/3/2012	12:21:47 PM	PH3 valve closed
3/3/2012	12:21:47 PM	SiCl4 pre valve closed
3/3/2012	12:21:47 PM	SiCl4 post valve closed
3/3/2012	12:21:47 PM	Bypass valve closed
3/3/2012	12:21:47 PM	Bubbler valve closed
3/3/2012	12:21:47 PM	Helium valve opened
3/3/2012	12:21:47 PM	Main Vac valve opened
3/3/2012	12:21:47 PM	Helium MFC set to  20.000000
3/3/2012	12:21:47 PM	H2 MFC set to  0.000000
3/3/2012	12:21:47 PM	BCl3 MFC set to  0.000000
3/3/2012	12:21:47 PM	PH3 MFC set to  0.000000
3/3/2012	12:21:47 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:21:47 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:21:48 PM	Tube furnace set to 150
3/3/2012	12:22:18 PM	Helium valve closed
3/3/2012	12:22:18 PM	H2 valve closed
3/3/2012	12:22:18 PM	BCl3 valve closed
3/3/2012	12:22:18 PM	PH3 valve closed
3/3/2012	12:22:18 PM	SiCl4 pre valve closed
3/3/2012	12:22:18 PM	SiCl4 post valve closed
3/3/2012	12:22:18 PM	Bypass valve closed
3/3/2012	12:22:18 PM	Bubbler valve closed
3/3/2012	12:22:18 PM	Main Vac valve opened
3/3/2012	12:22:18 PM	Helium MFC set to  0.000000
3/3/2012	12:22:18 PM	H2 MFC set to  0.000000
3/3/2012	12:22:18 PM	BCl3 MFC set to  0.000000
3/3/2012	12:22:18 PM	PH3 MFC set to  0.000000
3/3/2012	12:22:18 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:22:18 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:22:18 PM	Tube furnace set to 150
3/3/2012	12:22:48 PM	H2 valve closed
3/3/2012	12:22:48 PM	BCl3 valve closed
3/3/2012	12:22:48 PM	PH3 valve closed
3/3/2012	12:22:48 PM	SiCl4 pre valve closed
3/3/2012	12:22:48 PM	SiCl4 post valve closed
3/3/2012	12:22:48 PM	Bypass valve closed
3/3/2012	12:22:48 PM	Bubbler valve closed
3/3/2012	12:22:48 PM	Helium valve opened
3/3/2012	12:22:48 PM	Main Vac valve opened
3/3/2012	12:22:48 PM	Helium MFC set to  20.000000
3/3/2012	12:22:48 PM	H2 MFC set to  0.000000
3/3/2012	12:22:48 PM	BCl3 MFC set to  0.000000
3/3/2012	12:22:48 PM	PH3 MFC set to  0.000000
3/3/2012	12:22:48 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:22:48 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:22:48 PM	Tube furnace set to 150
3/3/2012	12:23:18 PM	Helium valve closed
3/3/2012	12:23:18 PM	H2 valve closed
3/3/2012	12:23:18 PM	BCl3 valve closed
3/3/2012	12:23:18 PM	PH3 valve closed
3/3/2012	12:23:18 PM	SiCl4 pre valve closed
3/3/2012	12:23:18 PM	SiCl4 post valve closed
3/3/2012	12:23:18 PM	Bypass valve closed
3/3/2012	12:23:18 PM	Bubbler valve closed
3/3/2012	12:23:18 PM	Main Vac valve opened
3/3/2012	12:23:18 PM	Helium MFC set to  0.000000
3/3/2012	12:23:18 PM	H2 MFC set to  0.000000
3/3/2012	12:23:18 PM	BCl3 MFC set to  0.000000
3/3/2012	12:23:18 PM	PH3 MFC set to  0.000000
3/3/2012	12:23:18 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:23:18 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:23:18 PM	Tube furnace set to 150
3/3/2012	12:23:48 PM	H2 valve closed
3/3/2012	12:23:48 PM	BCl3 valve closed
3/3/2012	12:23:48 PM	PH3 valve closed
3/3/2012	12:23:48 PM	SiCl4 pre valve closed
3/3/2012	12:23:48 PM	SiCl4 post valve closed
3/3/2012	12:23:48 PM	Bypass valve closed
3/3/2012	12:23:48 PM	Bubbler valve closed
3/3/2012	12:23:48 PM	Helium valve opened
3/3/2012	12:23:48 PM	Main Vac valve opened
3/3/2012	12:23:48 PM	Helium MFC set to  20.000000
3/3/2012	12:23:48 PM	H2 MFC set to  0.000000
3/3/2012	12:23:48 PM	BCl3 MFC set to  0.000000
3/3/2012	12:23:48 PM	PH3 MFC set to  0.000000
3/3/2012	12:23:48 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:23:48 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:23:48 PM	Tube furnace set to 150
3/3/2012	12:24:18 PM	Helium valve closed
3/3/2012	12:24:18 PM	H2 valve closed
3/3/2012	12:24:18 PM	BCl3 valve closed
3/3/2012	12:24:18 PM	PH3 valve closed
3/3/2012	12:24:18 PM	SiCl4 pre valve closed
3/3/2012	12:24:18 PM	SiCl4 post valve closed
3/3/2012	12:24:19 PM	Bypass valve closed
3/3/2012	12:24:19 PM	Bubbler valve closed
3/3/2012	12:24:19 PM	Main Vac valve opened
3/3/2012	12:24:19 PM	Helium MFC set to  0.000000
3/3/2012	12:24:19 PM	H2 MFC set to  0.000000
3/3/2012	12:24:19 PM	BCl3 MFC set to  0.000000
3/3/2012	12:24:19 PM	PH3 MFC set to  0.000000
3/3/2012	12:24:19 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:24:19 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:24:19 PM	Tube furnace set to 150
3/3/2012	12:24:49 PM	H2 valve closed
3/3/2012	12:24:49 PM	BCl3 valve closed
3/3/2012	12:24:49 PM	PH3 valve closed
3/3/2012	12:24:49 PM	SiCl4 pre valve closed
3/3/2012	12:24:49 PM	SiCl4 post valve closed
3/3/2012	12:24:49 PM	Bypass valve closed
3/3/2012	12:24:49 PM	Bubbler valve closed
3/3/2012	12:24:49 PM	Helium valve opened
3/3/2012	12:24:49 PM	Main Vac valve opened
3/3/2012	12:24:49 PM	Helium MFC set to  20.000000
3/3/2012	12:24:49 PM	H2 MFC set to  0.000000
3/3/2012	12:24:49 PM	BCl3 MFC set to  0.000000
3/3/2012	12:24:49 PM	PH3 MFC set to  0.000000
3/3/2012	12:24:49 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:24:49 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:24:49 PM	Tube furnace set to 150
3/3/2012	12:25:19 PM	Helium valve closed
3/3/2012	12:25:19 PM	H2 valve closed
3/3/2012	12:25:19 PM	BCl3 valve closed
3/3/2012	12:25:19 PM	PH3 valve closed
3/3/2012	12:25:19 PM	SiCl4 pre valve closed
3/3/2012	12:25:19 PM	SiCl4 post valve closed
3/3/2012	12:25:19 PM	Bypass valve closed
3/3/2012	12:25:19 PM	Bubbler valve closed
3/3/2012	12:25:19 PM	Main Vac valve opened
3/3/2012	12:25:19 PM	Helium MFC set to  0.000000
3/3/2012	12:25:19 PM	H2 MFC set to  0.000000
3/3/2012	12:25:19 PM	BCl3 MFC set to  0.000000
3/3/2012	12:25:19 PM	PH3 MFC set to  0.000000
3/3/2012	12:25:19 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:25:19 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:25:19 PM	Tube furnace set to 150
3/3/2012	12:25:49 PM	H2 valve closed
3/3/2012	12:25:49 PM	BCl3 valve closed
3/3/2012	12:25:49 PM	PH3 valve closed
3/3/2012	12:25:49 PM	SiCl4 pre valve closed
3/3/2012	12:25:49 PM	SiCl4 post valve closed
3/3/2012	12:25:49 PM	Bypass valve closed
3/3/2012	12:25:49 PM	Bubbler valve closed
3/3/2012	12:25:49 PM	Helium valve opened
3/3/2012	12:25:49 PM	Main Vac valve opened
3/3/2012	12:25:49 PM	Helium MFC set to  20.000000
3/3/2012	12:25:49 PM	H2 MFC set to  0.000000
3/3/2012	12:25:49 PM	BCl3 MFC set to  0.000000
3/3/2012	12:25:49 PM	PH3 MFC set to  0.000000
3/3/2012	12:25:49 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:25:49 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:25:49 PM	Tube furnace set to 150
3/3/2012	12:26:19 PM	Helium valve closed
3/3/2012	12:26:19 PM	H2 valve closed
3/3/2012	12:26:19 PM	BCl3 valve closed
3/3/2012	12:26:19 PM	PH3 valve closed
3/3/2012	12:26:19 PM	SiCl4 pre valve closed
3/3/2012	12:26:19 PM	SiCl4 post valve closed
3/3/2012	12:26:19 PM	Bypass valve closed
3/3/2012	12:26:19 PM	Bubbler valve closed
3/3/2012	12:26:19 PM	Main Vac valve opened
3/3/2012	12:26:19 PM	Helium MFC set to  0.000000
3/3/2012	12:26:19 PM	H2 MFC set to  0.000000
3/3/2012	12:26:19 PM	BCl3 MFC set to  0.000000
3/3/2012	12:26:19 PM	PH3 MFC set to  0.000000
3/3/2012	12:26:19 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:26:19 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:26:20 PM	Tube furnace set to 150
3/3/2012	12:26:21 PM	Run finished at 12:26 PM
3/3/2012	12:28:58 PM	Recipe started at 12:28 PM
3/3/2012	12:28:58 PM	Helium valve closed
3/3/2012	12:28:58 PM	H2 valve closed
3/3/2012	12:28:58 PM	BCl3 valve closed
3/3/2012	12:28:58 PM	PH3 valve closed
3/3/2012	12:28:58 PM	SiCl4 pre valve closed
3/3/2012	12:28:58 PM	SiCl4 post valve closed
3/3/2012	12:28:58 PM	Main Vac valve closed
3/3/2012	12:28:58 PM	Bypass valve closed
3/3/2012	12:28:58 PM	Bubbler valve closed
3/3/2012	12:28:58 PM	Helium MFC set to  0.000000
3/3/2012	12:28:58 PM	H2 MFC set to  0.000000
3/3/2012	12:28:58 PM	BCl3 MFC set to  0.000000
3/3/2012	12:28:58 PM	PH3 MFC set to  0.000000
3/3/2012	12:28:58 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:28:58 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:28:58 PM	Tube furnace set to 0
3/3/2012	12:29:01 PM	Helium valve closed
3/3/2012	12:29:01 PM	BCl3 valve closed
3/3/2012	12:29:01 PM	PH3 valve closed
3/3/2012	12:29:01 PM	SiCl4 pre valve closed
3/3/2012	12:29:01 PM	SiCl4 post valve closed
3/3/2012	12:29:01 PM	Main Vac valve closed
3/3/2012	12:29:01 PM	Bypass valve closed
3/3/2012	12:29:01 PM	Bubbler valve closed
3/3/2012	12:29:01 PM	H2 valve opened
3/3/2012	12:29:01 PM	Helium MFC set to  0.000000
3/3/2012	12:29:01 PM	H2 MFC set to  500.000000
3/3/2012	12:29:01 PM	BCl3 MFC set to  0.000000
3/3/2012	12:29:01 PM	PH3 MFC set to  0.000000
3/3/2012	12:29:01 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:29:01 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:29:01 PM	Tube furnace set to 0
3/3/2012	12:30:04 PM	Helium valve closed
3/3/2012	12:30:04 PM	BCl3 valve closed
3/3/2012	12:30:04 PM	PH3 valve closed
3/3/2012	12:30:04 PM	SiCl4 pre valve closed
3/3/2012	12:30:04 PM	SiCl4 post valve closed
3/3/2012	12:30:04 PM	Main Vac valve closed
3/3/2012	12:30:04 PM	Bypass valve closed
3/3/2012	12:30:04 PM	H2 valve opened
3/3/2012	12:30:04 PM	Bubbler valve opened
3/3/2012	12:30:04 PM	Helium MFC set to  0.000000
3/3/2012	12:30:04 PM	H2 MFC set to  500.000000
3/3/2012	12:30:04 PM	BCl3 MFC set to  0.000000
3/3/2012	12:30:04 PM	PH3 MFC set to  0.000000
3/3/2012	12:30:04 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:30:04 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:30:04 PM	Tube furnace set to 0
3/3/2012	12:30:05 PM	Helium valve closed
3/3/2012	12:30:05 PM	BCl3 valve closed
3/3/2012	12:30:05 PM	PH3 valve closed
3/3/2012	12:30:05 PM	SiCl4 pre valve closed
3/3/2012	12:30:05 PM	SiCl4 post valve closed
3/3/2012	12:30:05 PM	Main Vac valve closed
3/3/2012	12:30:05 PM	Bypass valve closed
3/3/2012	12:30:05 PM	H2 valve opened
3/3/2012	12:30:05 PM	Bubbler valve opened
3/3/2012	12:30:05 PM	Helium MFC set to  0.000000
3/3/2012	12:30:05 PM	H2 MFC set to  500.000000
3/3/2012	12:30:05 PM	BCl3 MFC set to  0.000000
3/3/2012	12:30:05 PM	PH3 MFC set to  0.000000
3/3/2012	12:30:05 PM	SiCl4 MFC set to  0.000000
3/3/2012	12:30:05 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:30:05 PM	Tube furnace set to 1000
3/3/2012	12:50:05 PM	Helium valve closed
3/3/2012	12:50:05 PM	PH3 valve closed
3/3/2012	12:50:05 PM	Main Vac valve closed
3/3/2012	12:50:05 PM	Bypass valve closed
3/3/2012	12:50:05 PM	H2 valve opened
3/3/2012	12:50:05 PM	BCl3 valve opened
3/3/2012	12:50:05 PM	SiCl4 pre valve opened
3/3/2012	12:50:05 PM	SiCl4 post valve opened
3/3/2012	12:50:05 PM	Bubbler valve opened
3/3/2012	12:50:05 PM	Helium MFC set to  0.000000
3/3/2012	12:50:05 PM	H2 MFC set to  500.000000
3/3/2012	12:50:05 PM	BCl3 MFC set to  1.500000
3/3/2012	12:50:05 PM	PH3 MFC set to  0.000000
3/3/2012	12:50:05 PM	SiCl4 MFC set to  50.000000
3/3/2012	12:50:05 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	12:50:05 PM	Tube furnace set to 1000
3/3/2012	1:05:05 PM	Helium valve closed
3/3/2012	1:05:05 PM	BCl3 valve closed
3/3/2012	1:05:05 PM	PH3 valve closed
3/3/2012	1:05:05 PM	SiCl4 pre valve closed
3/3/2012	1:05:05 PM	SiCl4 post valve closed
3/3/2012	1:05:05 PM	Main Vac valve closed
3/3/2012	1:05:05 PM	Bypass valve closed
3/3/2012	1:05:05 PM	H2 valve opened
3/3/2012	1:05:05 PM	Bubbler valve opened
3/3/2012	1:05:05 PM	Helium MFC set to  0.000000
3/3/2012	1:05:05 PM	H2 MFC set to  500.000000
3/3/2012	1:05:05 PM	BCl3 MFC set to  0.000000
3/3/2012	1:05:05 PM	PH3 MFC set to  0.000000
3/3/2012	1:05:05 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:05:05 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:05:05 PM	Tube furnace set to 750
3/3/2012	1:10:06 PM	H2 valve closed
3/3/2012	1:10:06 PM	BCl3 valve closed
3/3/2012	1:10:06 PM	PH3 valve closed
3/3/2012	1:10:06 PM	SiCl4 pre valve closed
3/3/2012	1:10:06 PM	SiCl4 post valve closed
3/3/2012	1:10:06 PM	Main Vac valve closed
3/3/2012	1:10:06 PM	Bypass valve closed
3/3/2012	1:10:06 PM	Helium valve opened
3/3/2012	1:10:06 PM	Bubbler valve opened
3/3/2012	1:10:06 PM	Helium MFC set to  500.000000
3/3/2012	1:10:06 PM	H2 MFC set to  0.000000
3/3/2012	1:10:06 PM	BCl3 MFC set to  0.000000
3/3/2012	1:10:06 PM	PH3 MFC set to  0.000000
3/3/2012	1:10:06 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:10:06 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:10:06 PM	Tube furnace set to 0
3/3/2012	1:16:55 PM	Run aborted at 1:16 PM
3/3/2012	1:16:55 PM	Helium valve closed
3/3/2012	1:16:55 PM	H2 valve closed
3/3/2012	1:16:55 PM	BCl3 valve closed
3/3/2012	1:16:55 PM	PH3 valve closed
3/3/2012	1:16:55 PM	SiCl4 pre valve closed
3/3/2012	1:16:55 PM	SiCl4 post valve closed
3/3/2012	1:16:55 PM	Bypass valve closed
3/3/2012	1:16:55 PM	Main Vac valve closed
3/3/2012	1:16:55 PM	Bubbler valve closed
3/3/2012	1:16:55 PM	Helium MFC set to  0.000000
3/3/2012	1:16:55 PM	H2 MFC set to  0.000000
3/3/2012	1:16:55 PM	BCl3 MFC set to  0.000000
3/3/2012	1:16:55 PM	PH3 MFC set to  0.000000
3/3/2012	1:16:55 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:16:55 PM	Tube furnace set to 0
3/3/2012	1:16:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	1:16:57 PM	Recipe started at 1:16 PM
3/3/2012	1:16:57 PM	Helium valve closed
3/3/2012	1:16:57 PM	H2 valve closed
3/3/2012	1:16:57 PM	BCl3 valve closed
3/3/2012	1:16:57 PM	PH3 valve closed
3/3/2012	1:16:57 PM	SiCl4 pre valve closed
3/3/2012	1:16:57 PM	SiCl4 post valve closed
3/3/2012	1:16:57 PM	Main Vac valve closed
3/3/2012	1:16:57 PM	Bypass valve closed
3/3/2012	1:16:57 PM	Bubbler valve closed
3/3/2012	1:16:57 PM	Helium MFC set to  0.000000
3/3/2012	1:16:57 PM	H2 MFC set to  0.000000
3/3/2012	1:16:57 PM	BCl3 MFC set to  0.000000
3/3/2012	1:16:57 PM	PH3 MFC set to  0.000000
3/3/2012	1:16:57 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:16:57 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:16:58 PM	Tube furnace set to 0
3/3/2012	1:17:01 PM	H2 valve closed
3/3/2012	1:17:01 PM	BCl3 valve closed
3/3/2012	1:17:01 PM	PH3 valve closed
3/3/2012	1:17:01 PM	SiCl4 pre valve closed
3/3/2012	1:17:01 PM	SiCl4 post valve closed
3/3/2012	1:17:01 PM	Main Vac valve closed
3/3/2012	1:17:01 PM	Bypass valve closed
3/3/2012	1:17:01 PM	Bubbler valve closed
3/3/2012	1:17:01 PM	Helium valve opened
3/3/2012	1:17:01 PM	Helium MFC set to  500.000000
3/3/2012	1:17:01 PM	H2 MFC set to  0.000000
3/3/2012	1:17:01 PM	BCl3 MFC set to  0.000000
3/3/2012	1:17:01 PM	PH3 MFC set to  0.000000
3/3/2012	1:17:01 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:17:01 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:17:01 PM	Tube furnace set to 0
3/3/2012	1:17:01 PM	Helium valve closed
3/3/2012	1:17:01 PM	H2 valve closed
3/3/2012	1:17:01 PM	BCl3 valve closed
3/3/2012	1:17:01 PM	PH3 valve closed
3/3/2012	1:17:01 PM	SiCl4 pre valve closed
3/3/2012	1:17:01 PM	SiCl4 post valve closed
3/3/2012	1:17:01 PM	Main Vac valve closed
3/3/2012	1:17:01 PM	Bypass valve closed
3/3/2012	1:17:01 PM	Bubbler valve closed
3/3/2012	1:17:01 PM	Helium MFC set to  0.000000
3/3/2012	1:17:01 PM	H2 MFC set to  0.000000
3/3/2012	1:17:01 PM	BCl3 MFC set to  0.000000
3/3/2012	1:17:01 PM	PH3 MFC set to  0.000000
3/3/2012	1:17:01 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:17:01 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:17:01 PM	Tube furnace set to 0
3/3/2012	1:17:02 PM	Run finished at 1:17 PM
3/3/2012	1:17:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	1:20:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	1:20:59 PM	Recipe started at 1:20 PM
3/3/2012	1:20:59 PM	Helium valve closed
3/3/2012	1:20:59 PM	H2 valve closed
3/3/2012	1:20:59 PM	BCl3 valve closed
3/3/2012	1:20:59 PM	PH3 valve closed
3/3/2012	1:20:59 PM	SiCl4 pre valve closed
3/3/2012	1:20:59 PM	SiCl4 post valve closed
3/3/2012	1:20:59 PM	Main Vac valve closed
3/3/2012	1:20:59 PM	Bubbler valve closed
3/3/2012	1:20:59 PM	Bypass valve opened
3/3/2012	1:20:59 PM	Helium MFC set to  0.000000
3/3/2012	1:20:59 PM	H2 MFC set to  0.000000
3/3/2012	1:20:59 PM	BCl3 MFC set to  0.000000
3/3/2012	1:20:59 PM	PH3 MFC set to  0.000000
3/3/2012	1:20:59 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:20:59 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:20:59 PM	Tube furnace set to 0
3/3/2012	1:21:57 PM	Helium valve closed
3/3/2012	1:21:57 PM	H2 valve closed
3/3/2012	1:21:57 PM	BCl3 valve closed
3/3/2012	1:21:57 PM	PH3 valve closed
3/3/2012	1:21:57 PM	SiCl4 pre valve closed
3/3/2012	1:21:57 PM	SiCl4 post valve closed
3/3/2012	1:21:57 PM	Main Vac valve closed
3/3/2012	1:21:57 PM	Bubbler valve closed
3/3/2012	1:21:57 PM	Bypass valve opened
3/3/2012	1:21:57 PM	Helium MFC set to  0.000000
3/3/2012	1:21:57 PM	H2 MFC set to  0.000000
3/3/2012	1:21:57 PM	BCl3 MFC set to  0.000000
3/3/2012	1:21:57 PM	PH3 MFC set to  0.000000
3/3/2012	1:21:57 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:21:57 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:21:57 PM	Tube furnace set to 0
3/3/2012	1:22:57 PM	Helium valve closed
3/3/2012	1:22:57 PM	H2 valve closed
3/3/2012	1:22:57 PM	BCl3 valve closed
3/3/2012	1:22:57 PM	PH3 valve closed
3/3/2012	1:22:57 PM	SiCl4 pre valve closed
3/3/2012	1:22:57 PM	SiCl4 post valve closed
3/3/2012	1:22:57 PM	Bypass valve closed
3/3/2012	1:22:57 PM	Bubbler valve closed
3/3/2012	1:22:57 PM	Main Vac valve opened
3/3/2012	1:22:57 PM	Helium MFC set to  0.000000
3/3/2012	1:22:57 PM	H2 MFC set to  0.000000
3/3/2012	1:22:57 PM	BCl3 MFC set to  0.000000
3/3/2012	1:22:57 PM	PH3 MFC set to  0.000000
3/3/2012	1:22:57 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:22:57 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:22:57 PM	Tube furnace set to 0
3/3/2012	1:22:58 PM	Run finished at 1:22 PM
3/3/2012	1:22:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	1:32:16 PM	Recipe started at 1:32 PM
3/3/2012	1:32:16 PM	Helium valve closed
3/3/2012	1:32:16 PM	H2 valve closed
3/3/2012	1:32:16 PM	BCl3 valve closed
3/3/2012	1:32:16 PM	PH3 valve closed
3/3/2012	1:32:16 PM	SiCl4 pre valve closed
3/3/2012	1:32:16 PM	SiCl4 post valve closed
3/3/2012	1:32:16 PM	Bypass valve closed
3/3/2012	1:32:16 PM	Bubbler valve closed
3/3/2012	1:32:16 PM	Main Vac valve opened
3/3/2012	1:32:16 PM	Helium MFC set to  0.000000
3/3/2012	1:32:16 PM	H2 MFC set to  0.000000
3/3/2012	1:32:16 PM	BCl3 MFC set to  0.000000
3/3/2012	1:32:16 PM	PH3 MFC set to  0.000000
3/3/2012	1:32:16 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:32:16 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:32:16 PM	Tube furnace set to 150
3/3/2012	1:32:46 PM	H2 valve closed
3/3/2012	1:32:46 PM	BCl3 valve closed
3/3/2012	1:32:46 PM	PH3 valve closed
3/3/2012	1:32:46 PM	SiCl4 pre valve closed
3/3/2012	1:32:46 PM	SiCl4 post valve closed
3/3/2012	1:32:46 PM	Bypass valve closed
3/3/2012	1:32:46 PM	Bubbler valve closed
3/3/2012	1:32:46 PM	Helium valve opened
3/3/2012	1:32:46 PM	Main Vac valve opened
3/3/2012	1:32:46 PM	Helium MFC set to  20.000000
3/3/2012	1:32:46 PM	H2 MFC set to  0.000000
3/3/2012	1:32:46 PM	BCl3 MFC set to  0.000000
3/3/2012	1:32:46 PM	PH3 MFC set to  0.000000
3/3/2012	1:32:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:32:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:32:46 PM	Tube furnace set to 150
3/3/2012	1:33:16 PM	Helium valve closed
3/3/2012	1:33:16 PM	H2 valve closed
3/3/2012	1:33:16 PM	BCl3 valve closed
3/3/2012	1:33:16 PM	PH3 valve closed
3/3/2012	1:33:16 PM	SiCl4 pre valve closed
3/3/2012	1:33:16 PM	SiCl4 post valve closed
3/3/2012	1:33:16 PM	Bypass valve closed
3/3/2012	1:33:16 PM	Bubbler valve closed
3/3/2012	1:33:16 PM	Main Vac valve opened
3/3/2012	1:33:16 PM	Helium MFC set to  0.000000
3/3/2012	1:33:16 PM	H2 MFC set to  0.000000
3/3/2012	1:33:16 PM	BCl3 MFC set to  0.000000
3/3/2012	1:33:16 PM	PH3 MFC set to  0.000000
3/3/2012	1:33:16 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:33:16 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:33:16 PM	Tube furnace set to 150
3/3/2012	1:33:46 PM	H2 valve closed
3/3/2012	1:33:46 PM	BCl3 valve closed
3/3/2012	1:33:46 PM	PH3 valve closed
3/3/2012	1:33:46 PM	SiCl4 pre valve closed
3/3/2012	1:33:46 PM	SiCl4 post valve closed
3/3/2012	1:33:46 PM	Bypass valve closed
3/3/2012	1:33:46 PM	Bubbler valve closed
3/3/2012	1:33:46 PM	Helium valve opened
3/3/2012	1:33:46 PM	Main Vac valve opened
3/3/2012	1:33:46 PM	Helium MFC set to  20.000000
3/3/2012	1:33:46 PM	H2 MFC set to  0.000000
3/3/2012	1:33:46 PM	BCl3 MFC set to  0.000000
3/3/2012	1:33:46 PM	PH3 MFC set to  0.000000
3/3/2012	1:33:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:33:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:33:47 PM	Tube furnace set to 150
3/3/2012	1:34:17 PM	Helium valve closed
3/3/2012	1:34:17 PM	H2 valve closed
3/3/2012	1:34:17 PM	BCl3 valve closed
3/3/2012	1:34:17 PM	PH3 valve closed
3/3/2012	1:34:17 PM	SiCl4 pre valve closed
3/3/2012	1:34:17 PM	SiCl4 post valve closed
3/3/2012	1:34:17 PM	Bypass valve closed
3/3/2012	1:34:17 PM	Bubbler valve closed
3/3/2012	1:34:17 PM	Main Vac valve opened
3/3/2012	1:34:17 PM	Helium MFC set to  0.000000
3/3/2012	1:34:17 PM	H2 MFC set to  0.000000
3/3/2012	1:34:17 PM	BCl3 MFC set to  0.000000
3/3/2012	1:34:17 PM	PH3 MFC set to  0.000000
3/3/2012	1:34:17 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:34:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:34:17 PM	Tube furnace set to 150
3/3/2012	1:34:47 PM	H2 valve closed
3/3/2012	1:34:47 PM	BCl3 valve closed
3/3/2012	1:34:47 PM	PH3 valve closed
3/3/2012	1:34:47 PM	SiCl4 pre valve closed
3/3/2012	1:34:47 PM	SiCl4 post valve closed
3/3/2012	1:34:47 PM	Bypass valve closed
3/3/2012	1:34:47 PM	Bubbler valve closed
3/3/2012	1:34:47 PM	Helium valve opened
3/3/2012	1:34:47 PM	Main Vac valve opened
3/3/2012	1:34:47 PM	Helium MFC set to  20.000000
3/3/2012	1:34:47 PM	H2 MFC set to  0.000000
3/3/2012	1:34:47 PM	BCl3 MFC set to  0.000000
3/3/2012	1:34:47 PM	PH3 MFC set to  0.000000
3/3/2012	1:34:47 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:34:47 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:34:47 PM	Tube furnace set to 150
3/3/2012	1:35:17 PM	Helium valve closed
3/3/2012	1:35:17 PM	H2 valve closed
3/3/2012	1:35:17 PM	BCl3 valve closed
3/3/2012	1:35:17 PM	PH3 valve closed
3/3/2012	1:35:17 PM	SiCl4 pre valve closed
3/3/2012	1:35:17 PM	SiCl4 post valve closed
3/3/2012	1:35:17 PM	Bypass valve closed
3/3/2012	1:35:17 PM	Bubbler valve closed
3/3/2012	1:35:17 PM	Main Vac valve opened
3/3/2012	1:35:17 PM	Helium MFC set to  0.000000
3/3/2012	1:35:17 PM	H2 MFC set to  0.000000
3/3/2012	1:35:17 PM	BCl3 MFC set to  0.000000
3/3/2012	1:35:17 PM	PH3 MFC set to  0.000000
3/3/2012	1:35:17 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:35:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:35:17 PM	Tube furnace set to 150
3/3/2012	1:35:47 PM	H2 valve closed
3/3/2012	1:35:47 PM	BCl3 valve closed
3/3/2012	1:35:47 PM	PH3 valve closed
3/3/2012	1:35:47 PM	SiCl4 pre valve closed
3/3/2012	1:35:47 PM	SiCl4 post valve closed
3/3/2012	1:35:47 PM	Bypass valve closed
3/3/2012	1:35:47 PM	Bubbler valve closed
3/3/2012	1:35:47 PM	Helium valve opened
3/3/2012	1:35:47 PM	Main Vac valve opened
3/3/2012	1:35:47 PM	Helium MFC set to  20.000000
3/3/2012	1:35:47 PM	H2 MFC set to  0.000000
3/3/2012	1:35:47 PM	BCl3 MFC set to  0.000000
3/3/2012	1:35:47 PM	PH3 MFC set to  0.000000
3/3/2012	1:35:47 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:35:47 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:35:47 PM	Tube furnace set to 150
3/3/2012	1:36:17 PM	Helium valve closed
3/3/2012	1:36:17 PM	H2 valve closed
3/3/2012	1:36:17 PM	BCl3 valve closed
3/3/2012	1:36:17 PM	PH3 valve closed
3/3/2012	1:36:17 PM	SiCl4 pre valve closed
3/3/2012	1:36:17 PM	SiCl4 post valve closed
3/3/2012	1:36:17 PM	Bypass valve closed
3/3/2012	1:36:17 PM	Bubbler valve closed
3/3/2012	1:36:17 PM	Main Vac valve opened
3/3/2012	1:36:17 PM	Helium MFC set to  0.000000
3/3/2012	1:36:17 PM	H2 MFC set to  0.000000
3/3/2012	1:36:17 PM	BCl3 MFC set to  0.000000
3/3/2012	1:36:17 PM	PH3 MFC set to  0.000000
3/3/2012	1:36:17 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:36:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:36:18 PM	Tube furnace set to 150
3/3/2012	1:36:48 PM	H2 valve closed
3/3/2012	1:36:48 PM	BCl3 valve closed
3/3/2012	1:36:48 PM	PH3 valve closed
3/3/2012	1:36:48 PM	SiCl4 pre valve closed
3/3/2012	1:36:48 PM	SiCl4 post valve closed
3/3/2012	1:36:48 PM	Bypass valve closed
3/3/2012	1:36:48 PM	Bubbler valve closed
3/3/2012	1:36:48 PM	Helium valve opened
3/3/2012	1:36:48 PM	Main Vac valve opened
3/3/2012	1:36:48 PM	Helium MFC set to  20.000000
3/3/2012	1:36:48 PM	H2 MFC set to  0.000000
3/3/2012	1:36:48 PM	BCl3 MFC set to  0.000000
3/3/2012	1:36:48 PM	PH3 MFC set to  0.000000
3/3/2012	1:36:48 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:36:48 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:36:48 PM	Tube furnace set to 150
3/3/2012	1:37:18 PM	Helium valve closed
3/3/2012	1:37:18 PM	H2 valve closed
3/3/2012	1:37:18 PM	BCl3 valve closed
3/3/2012	1:37:18 PM	PH3 valve closed
3/3/2012	1:37:18 PM	SiCl4 pre valve closed
3/3/2012	1:37:18 PM	SiCl4 post valve closed
3/3/2012	1:37:18 PM	Bypass valve closed
3/3/2012	1:37:18 PM	Bubbler valve closed
3/3/2012	1:37:18 PM	Main Vac valve opened
3/3/2012	1:37:18 PM	Helium MFC set to  0.000000
3/3/2012	1:37:18 PM	H2 MFC set to  0.000000
3/3/2012	1:37:18 PM	BCl3 MFC set to  0.000000
3/3/2012	1:37:18 PM	PH3 MFC set to  0.000000
3/3/2012	1:37:18 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:37:18 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:37:18 PM	Tube furnace set to 150
3/3/2012	1:37:48 PM	H2 valve closed
3/3/2012	1:37:48 PM	BCl3 valve closed
3/3/2012	1:37:48 PM	PH3 valve closed
3/3/2012	1:37:48 PM	SiCl4 pre valve closed
3/3/2012	1:37:48 PM	SiCl4 post valve closed
3/3/2012	1:37:48 PM	Bypass valve closed
3/3/2012	1:37:48 PM	Bubbler valve closed
3/3/2012	1:37:48 PM	Helium valve opened
3/3/2012	1:37:48 PM	Main Vac valve opened
3/3/2012	1:37:48 PM	Helium MFC set to  20.000000
3/3/2012	1:37:48 PM	H2 MFC set to  0.000000
3/3/2012	1:37:48 PM	BCl3 MFC set to  0.000000
3/3/2012	1:37:48 PM	PH3 MFC set to  0.000000
3/3/2012	1:37:48 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:37:48 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:37:48 PM	Tube furnace set to 150
3/3/2012	1:38:18 PM	Helium valve closed
3/3/2012	1:38:18 PM	H2 valve closed
3/3/2012	1:38:18 PM	BCl3 valve closed
3/3/2012	1:38:18 PM	PH3 valve closed
3/3/2012	1:38:18 PM	SiCl4 pre valve closed
3/3/2012	1:38:18 PM	SiCl4 post valve closed
3/3/2012	1:38:18 PM	Bypass valve closed
3/3/2012	1:38:18 PM	Bubbler valve closed
3/3/2012	1:38:18 PM	Main Vac valve opened
3/3/2012	1:38:18 PM	Helium MFC set to  0.000000
3/3/2012	1:38:18 PM	H2 MFC set to  0.000000
3/3/2012	1:38:18 PM	BCl3 MFC set to  0.000000
3/3/2012	1:38:18 PM	PH3 MFC set to  0.000000
3/3/2012	1:38:18 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:38:18 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:38:18 PM	Tube furnace set to 150
3/3/2012	1:38:48 PM	H2 valve closed
3/3/2012	1:38:48 PM	BCl3 valve closed
3/3/2012	1:38:48 PM	PH3 valve closed
3/3/2012	1:38:48 PM	SiCl4 pre valve closed
3/3/2012	1:38:48 PM	SiCl4 post valve closed
3/3/2012	1:38:48 PM	Bypass valve closed
3/3/2012	1:38:48 PM	Bubbler valve closed
3/3/2012	1:38:48 PM	Helium valve opened
3/3/2012	1:38:48 PM	Main Vac valve opened
3/3/2012	1:38:48 PM	Helium MFC set to  20.000000
3/3/2012	1:38:48 PM	H2 MFC set to  0.000000
3/3/2012	1:38:48 PM	BCl3 MFC set to  0.000000
3/3/2012	1:38:48 PM	PH3 MFC set to  0.000000
3/3/2012	1:38:48 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:38:48 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:38:49 PM	Tube furnace set to 150
3/3/2012	1:39:19 PM	Helium valve closed
3/3/2012	1:39:19 PM	H2 valve closed
3/3/2012	1:39:19 PM	BCl3 valve closed
3/3/2012	1:39:19 PM	PH3 valve closed
3/3/2012	1:39:19 PM	SiCl4 pre valve closed
3/3/2012	1:39:19 PM	SiCl4 post valve closed
3/3/2012	1:39:19 PM	Bypass valve closed
3/3/2012	1:39:19 PM	Bubbler valve closed
3/3/2012	1:39:19 PM	Main Vac valve opened
3/3/2012	1:39:19 PM	Helium MFC set to  0.000000
3/3/2012	1:39:19 PM	H2 MFC set to  0.000000
3/3/2012	1:39:19 PM	BCl3 MFC set to  0.000000
3/3/2012	1:39:19 PM	PH3 MFC set to  0.000000
3/3/2012	1:39:19 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:39:19 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:39:19 PM	Tube furnace set to 150
3/3/2012	1:39:49 PM	H2 valve closed
3/3/2012	1:39:49 PM	BCl3 valve closed
3/3/2012	1:39:49 PM	PH3 valve closed
3/3/2012	1:39:49 PM	SiCl4 pre valve closed
3/3/2012	1:39:49 PM	SiCl4 post valve closed
3/3/2012	1:39:49 PM	Bypass valve closed
3/3/2012	1:39:49 PM	Bubbler valve closed
3/3/2012	1:39:49 PM	Helium valve opened
3/3/2012	1:39:49 PM	Main Vac valve opened
3/3/2012	1:39:49 PM	Helium MFC set to  20.000000
3/3/2012	1:39:49 PM	H2 MFC set to  0.000000
3/3/2012	1:39:49 PM	BCl3 MFC set to  0.000000
3/3/2012	1:39:49 PM	PH3 MFC set to  0.000000
3/3/2012	1:39:49 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:39:49 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:39:49 PM	Tube furnace set to 150
3/3/2012	1:40:19 PM	Helium valve closed
3/3/2012	1:40:19 PM	H2 valve closed
3/3/2012	1:40:19 PM	BCl3 valve closed
3/3/2012	1:40:19 PM	PH3 valve closed
3/3/2012	1:40:19 PM	SiCl4 pre valve closed
3/3/2012	1:40:19 PM	SiCl4 post valve closed
3/3/2012	1:40:19 PM	Bypass valve closed
3/3/2012	1:40:19 PM	Bubbler valve closed
3/3/2012	1:40:19 PM	Main Vac valve opened
3/3/2012	1:40:19 PM	Helium MFC set to  0.000000
3/3/2012	1:40:19 PM	H2 MFC set to  0.000000
3/3/2012	1:40:19 PM	BCl3 MFC set to  0.000000
3/3/2012	1:40:19 PM	PH3 MFC set to  0.000000
3/3/2012	1:40:19 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:40:19 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:40:19 PM	Tube furnace set to 150
3/3/2012	1:40:49 PM	H2 valve closed
3/3/2012	1:40:49 PM	BCl3 valve closed
3/3/2012	1:40:49 PM	PH3 valve closed
3/3/2012	1:40:49 PM	SiCl4 pre valve closed
3/3/2012	1:40:49 PM	SiCl4 post valve closed
3/3/2012	1:40:49 PM	Bypass valve closed
3/3/2012	1:40:49 PM	Bubbler valve closed
3/3/2012	1:40:49 PM	Helium valve opened
3/3/2012	1:40:49 PM	Main Vac valve opened
3/3/2012	1:40:49 PM	Helium MFC set to  20.000000
3/3/2012	1:40:49 PM	H2 MFC set to  0.000000
3/3/2012	1:40:49 PM	BCl3 MFC set to  0.000000
3/3/2012	1:40:49 PM	PH3 MFC set to  0.000000
3/3/2012	1:40:49 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:40:49 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:40:49 PM	Tube furnace set to 150
3/3/2012	1:41:19 PM	Helium valve closed
3/3/2012	1:41:19 PM	H2 valve closed
3/3/2012	1:41:19 PM	BCl3 valve closed
3/3/2012	1:41:19 PM	PH3 valve closed
3/3/2012	1:41:19 PM	SiCl4 pre valve closed
3/3/2012	1:41:19 PM	SiCl4 post valve closed
3/3/2012	1:41:19 PM	Bypass valve closed
3/3/2012	1:41:19 PM	Bubbler valve closed
3/3/2012	1:41:19 PM	Main Vac valve opened
3/3/2012	1:41:19 PM	Helium MFC set to  0.000000
3/3/2012	1:41:19 PM	H2 MFC set to  0.000000
3/3/2012	1:41:19 PM	BCl3 MFC set to  0.000000
3/3/2012	1:41:19 PM	PH3 MFC set to  0.000000
3/3/2012	1:41:19 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:41:19 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:41:20 PM	Tube furnace set to 150
3/3/2012	1:41:50 PM	H2 valve closed
3/3/2012	1:41:50 PM	BCl3 valve closed
3/3/2012	1:41:50 PM	PH3 valve closed
3/3/2012	1:41:50 PM	SiCl4 pre valve closed
3/3/2012	1:41:50 PM	SiCl4 post valve closed
3/3/2012	1:41:50 PM	Bypass valve closed
3/3/2012	1:41:50 PM	Bubbler valve closed
3/3/2012	1:41:50 PM	Helium valve opened
3/3/2012	1:41:50 PM	Main Vac valve opened
3/3/2012	1:41:50 PM	Helium MFC set to  20.000000
3/3/2012	1:41:50 PM	H2 MFC set to  0.000000
3/3/2012	1:41:50 PM	BCl3 MFC set to  0.000000
3/3/2012	1:41:50 PM	PH3 MFC set to  0.000000
3/3/2012	1:41:50 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:41:50 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:41:50 PM	Tube furnace set to 150
3/3/2012	1:42:20 PM	Helium valve closed
3/3/2012	1:42:20 PM	H2 valve closed
3/3/2012	1:42:20 PM	BCl3 valve closed
3/3/2012	1:42:20 PM	PH3 valve closed
3/3/2012	1:42:20 PM	SiCl4 pre valve closed
3/3/2012	1:42:20 PM	SiCl4 post valve closed
3/3/2012	1:42:20 PM	Bypass valve closed
3/3/2012	1:42:20 PM	Bubbler valve closed
3/3/2012	1:42:20 PM	Main Vac valve opened
3/3/2012	1:42:20 PM	Helium MFC set to  0.000000
3/3/2012	1:42:20 PM	H2 MFC set to  0.000000
3/3/2012	1:42:20 PM	BCl3 MFC set to  0.000000
3/3/2012	1:42:20 PM	PH3 MFC set to  0.000000
3/3/2012	1:42:20 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:42:20 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:42:20 PM	Tube furnace set to 150
3/3/2012	1:42:21 PM	Run finished at 1:42 PM
3/3/2012	1:48:22 PM	Helium MFC set to  20.000000
3/3/2012	1:48:23 PM	Helium valve opened
3/3/2012	1:48:41 PM	Helium valve closed
3/3/2012	1:48:44 PM	Helium MFC set to  0.000000
3/3/2012	1:49:51 PM	Recipe started at 1:49 PM
3/3/2012	1:49:51 PM	Helium valve closed
3/3/2012	1:49:51 PM	H2 valve closed
3/3/2012	1:49:51 PM	BCl3 valve closed
3/3/2012	1:49:51 PM	PH3 valve closed
3/3/2012	1:49:51 PM	SiCl4 pre valve closed
3/3/2012	1:49:51 PM	SiCl4 post valve closed
3/3/2012	1:49:51 PM	Main Vac valve closed
3/3/2012	1:49:51 PM	Bypass valve closed
3/3/2012	1:49:51 PM	Bubbler valve closed
3/3/2012	1:49:51 PM	Helium MFC set to  0.000000
3/3/2012	1:49:51 PM	H2 MFC set to  0.000000
3/3/2012	1:49:51 PM	BCl3 MFC set to  0.000000
3/3/2012	1:49:51 PM	PH3 MFC set to  0.000000
3/3/2012	1:49:51 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:49:51 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:49:51 PM	Tube furnace set to 0
3/3/2012	1:49:54 PM	Helium valve closed
3/3/2012	1:49:54 PM	BCl3 valve closed
3/3/2012	1:49:54 PM	PH3 valve closed
3/3/2012	1:49:54 PM	SiCl4 pre valve closed
3/3/2012	1:49:54 PM	SiCl4 post valve closed
3/3/2012	1:49:54 PM	Main Vac valve closed
3/3/2012	1:49:54 PM	Bypass valve closed
3/3/2012	1:49:54 PM	Bubbler valve closed
3/3/2012	1:49:54 PM	H2 valve opened
3/3/2012	1:49:54 PM	Helium MFC set to  0.000000
3/3/2012	1:49:54 PM	H2 MFC set to  500.000000
3/3/2012	1:49:54 PM	BCl3 MFC set to  0.000000
3/3/2012	1:49:54 PM	PH3 MFC set to  0.000000
3/3/2012	1:49:54 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:49:54 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:49:54 PM	Tube furnace set to 0
3/3/2012	1:50:57 PM	Helium valve closed
3/3/2012	1:50:57 PM	BCl3 valve closed
3/3/2012	1:50:57 PM	PH3 valve closed
3/3/2012	1:50:57 PM	SiCl4 pre valve closed
3/3/2012	1:50:57 PM	SiCl4 post valve closed
3/3/2012	1:50:57 PM	Main Vac valve closed
3/3/2012	1:50:57 PM	Bypass valve closed
3/3/2012	1:50:57 PM	H2 valve opened
3/3/2012	1:50:57 PM	Bubbler valve opened
3/3/2012	1:50:57 PM	Helium MFC set to  0.000000
3/3/2012	1:50:57 PM	H2 MFC set to  500.000000
3/3/2012	1:50:57 PM	BCl3 MFC set to  0.000000
3/3/2012	1:50:57 PM	PH3 MFC set to  0.000000
3/3/2012	1:50:57 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:50:57 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:50:57 PM	Tube furnace set to 0
3/3/2012	1:50:58 PM	Helium valve closed
3/3/2012	1:50:58 PM	BCl3 valve closed
3/3/2012	1:50:58 PM	PH3 valve closed
3/3/2012	1:50:58 PM	SiCl4 pre valve closed
3/3/2012	1:50:58 PM	SiCl4 post valve closed
3/3/2012	1:50:58 PM	Main Vac valve closed
3/3/2012	1:50:58 PM	Bypass valve closed
3/3/2012	1:50:58 PM	H2 valve opened
3/3/2012	1:50:58 PM	Bubbler valve opened
3/3/2012	1:50:58 PM	Helium MFC set to  0.000000
3/3/2012	1:50:58 PM	H2 MFC set to  500.000000
3/3/2012	1:50:58 PM	BCl3 MFC set to  0.000000
3/3/2012	1:50:58 PM	PH3 MFC set to  0.000000
3/3/2012	1:50:58 PM	SiCl4 MFC set to  0.000000
3/3/2012	1:50:58 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	1:50:58 PM	Tube furnace set to 1000
3/3/2012	2:10:58 PM	Helium valve closed
3/3/2012	2:10:58 PM	PH3 valve closed
3/3/2012	2:10:58 PM	Main Vac valve closed
3/3/2012	2:10:58 PM	Bypass valve closed
3/3/2012	2:10:58 PM	H2 valve opened
3/3/2012	2:10:58 PM	BCl3 valve opened
3/3/2012	2:10:58 PM	SiCl4 pre valve opened
3/3/2012	2:10:58 PM	SiCl4 post valve opened
3/3/2012	2:10:58 PM	Bubbler valve opened
3/3/2012	2:10:58 PM	Helium MFC set to  0.000000
3/3/2012	2:10:58 PM	H2 MFC set to  500.000000
3/3/2012	2:10:58 PM	BCl3 MFC set to  1.500000
3/3/2012	2:10:58 PM	PH3 MFC set to  0.000000
3/3/2012	2:10:58 PM	SiCl4 MFC set to  50.000000
3/3/2012	2:10:58 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	2:10:58 PM	Tube furnace set to 1000
3/3/2012	2:25:58 PM	Helium valve closed
3/3/2012	2:25:58 PM	BCl3 valve closed
3/3/2012	2:25:58 PM	PH3 valve closed
3/3/2012	2:25:58 PM	SiCl4 pre valve closed
3/3/2012	2:25:58 PM	SiCl4 post valve closed
3/3/2012	2:25:58 PM	Main Vac valve closed
3/3/2012	2:25:58 PM	Bypass valve closed
3/3/2012	2:25:58 PM	H2 valve opened
3/3/2012	2:25:58 PM	Bubbler valve opened
3/3/2012	2:25:58 PM	Helium MFC set to  0.000000
3/3/2012	2:25:58 PM	H2 MFC set to  500.000000
3/3/2012	2:25:58 PM	BCl3 MFC set to  0.000000
3/3/2012	2:25:58 PM	PH3 MFC set to  0.000000
3/3/2012	2:25:58 PM	SiCl4 MFC set to  0.000000
3/3/2012	2:25:58 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	2:25:59 PM	Tube furnace set to 750
3/3/2012	2:30:59 PM	H2 valve closed
3/3/2012	2:30:59 PM	BCl3 valve closed
3/3/2012	2:30:59 PM	PH3 valve closed
3/3/2012	2:30:59 PM	SiCl4 pre valve closed
3/3/2012	2:30:59 PM	SiCl4 post valve closed
3/3/2012	2:30:59 PM	Main Vac valve closed
3/3/2012	2:30:59 PM	Bypass valve closed
3/3/2012	2:30:59 PM	Helium valve opened
3/3/2012	2:30:59 PM	Bubbler valve opened
3/3/2012	2:30:59 PM	Helium MFC set to  500.000000
3/3/2012	2:30:59 PM	H2 MFC set to  0.000000
3/3/2012	2:30:59 PM	BCl3 MFC set to  0.000000
3/3/2012	2:30:59 PM	PH3 MFC set to  0.000000
3/3/2012	2:30:59 PM	SiCl4 MFC set to  0.000000
3/3/2012	2:30:59 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	2:30:59 PM	Tube furnace set to 0
3/3/2012	2:50:59 PM	Helium valve closed
3/3/2012	2:50:59 PM	H2 valve closed
3/3/2012	2:50:59 PM	BCl3 valve closed
3/3/2012	2:50:59 PM	PH3 valve closed
3/3/2012	2:50:59 PM	SiCl4 pre valve closed
3/3/2012	2:50:59 PM	SiCl4 post valve closed
3/3/2012	2:50:59 PM	Main Vac valve closed
3/3/2012	2:50:59 PM	Bypass valve closed
3/3/2012	2:50:59 PM	Bubbler valve closed
3/3/2012	2:50:59 PM	Helium MFC set to  0.000000
3/3/2012	2:50:59 PM	H2 MFC set to  0.000000
3/3/2012	2:50:59 PM	BCl3 MFC set to  0.000000
3/3/2012	2:50:59 PM	PH3 MFC set to  0.000000
3/3/2012	2:50:59 PM	SiCl4 MFC set to  0.000000
3/3/2012	2:50:59 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	2:50:59 PM	Tube furnace set to 0
3/3/2012	2:51:00 PM	Run finished at 2:51 PM
3/3/2012	3:09:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	3:09:38 PM	Recipe started at 3:09 PM
3/3/2012	3:09:38 PM	Helium valve closed
3/3/2012	3:09:38 PM	H2 valve closed
3/3/2012	3:09:38 PM	BCl3 valve closed
3/3/2012	3:09:38 PM	PH3 valve closed
3/3/2012	3:09:38 PM	SiCl4 pre valve closed
3/3/2012	3:09:38 PM	SiCl4 post valve closed
3/3/2012	3:09:38 PM	Main Vac valve closed
3/3/2012	3:09:38 PM	Bypass valve closed
3/3/2012	3:09:38 PM	Bubbler valve closed
3/3/2012	3:09:38 PM	Helium MFC set to  0.000000
3/3/2012	3:09:38 PM	H2 MFC set to  0.000000
3/3/2012	3:09:38 PM	BCl3 MFC set to  0.000000
3/3/2012	3:09:38 PM	PH3 MFC set to  0.000000
3/3/2012	3:09:38 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:09:38 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:09:38 PM	Tube furnace set to 0
3/3/2012	3:09:41 PM	H2 valve closed
3/3/2012	3:09:41 PM	BCl3 valve closed
3/3/2012	3:09:41 PM	PH3 valve closed
3/3/2012	3:09:41 PM	SiCl4 pre valve closed
3/3/2012	3:09:41 PM	SiCl4 post valve closed
3/3/2012	3:09:41 PM	Main Vac valve closed
3/3/2012	3:09:41 PM	Bypass valve closed
3/3/2012	3:09:41 PM	Bubbler valve closed
3/3/2012	3:09:41 PM	Helium valve opened
3/3/2012	3:09:41 PM	Helium MFC set to  500.000000
3/3/2012	3:09:41 PM	H2 MFC set to  0.000000
3/3/2012	3:09:41 PM	BCl3 MFC set to  0.000000
3/3/2012	3:09:41 PM	PH3 MFC set to  0.000000
3/3/2012	3:09:41 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:09:41 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:09:41 PM	Tube furnace set to 0
3/3/2012	3:09:42 PM	Helium valve closed
3/3/2012	3:09:42 PM	H2 valve closed
3/3/2012	3:09:42 PM	BCl3 valve closed
3/3/2012	3:09:42 PM	PH3 valve closed
3/3/2012	3:09:42 PM	SiCl4 pre valve closed
3/3/2012	3:09:42 PM	SiCl4 post valve closed
3/3/2012	3:09:42 PM	Main Vac valve closed
3/3/2012	3:09:42 PM	Bypass valve closed
3/3/2012	3:09:42 PM	Bubbler valve closed
3/3/2012	3:09:42 PM	Helium MFC set to  0.000000
3/3/2012	3:09:42 PM	H2 MFC set to  0.000000
3/3/2012	3:09:42 PM	BCl3 MFC set to  0.000000
3/3/2012	3:09:42 PM	PH3 MFC set to  0.000000
3/3/2012	3:09:42 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:09:42 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:09:42 PM	Tube furnace set to 0
3/3/2012	3:09:43 PM	Run finished at 3:09 PM
3/3/2012	3:09:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	3:14:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	3:14:05 PM	Recipe started at 3:14 PM
3/3/2012	3:14:05 PM	Helium valve closed
3/3/2012	3:14:05 PM	H2 valve closed
3/3/2012	3:14:05 PM	BCl3 valve closed
3/3/2012	3:14:05 PM	PH3 valve closed
3/3/2012	3:14:05 PM	SiCl4 pre valve closed
3/3/2012	3:14:05 PM	SiCl4 post valve closed
3/3/2012	3:14:05 PM	Main Vac valve closed
3/3/2012	3:14:05 PM	Bubbler valve closed
3/3/2012	3:14:05 PM	Bypass valve opened
3/3/2012	3:14:05 PM	Helium MFC set to  0.000000
3/3/2012	3:14:05 PM	H2 MFC set to  0.000000
3/3/2012	3:14:05 PM	BCl3 MFC set to  0.000000
3/3/2012	3:14:05 PM	PH3 MFC set to  0.000000
3/3/2012	3:14:05 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:14:05 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:14:05 PM	Tube furnace set to 0
3/3/2012	3:15:01 PM	Helium valve closed
3/3/2012	3:15:01 PM	H2 valve closed
3/3/2012	3:15:01 PM	BCl3 valve closed
3/3/2012	3:15:01 PM	PH3 valve closed
3/3/2012	3:15:01 PM	SiCl4 pre valve closed
3/3/2012	3:15:01 PM	SiCl4 post valve closed
3/3/2012	3:15:01 PM	Main Vac valve closed
3/3/2012	3:15:01 PM	Bubbler valve closed
3/3/2012	3:15:01 PM	Bypass valve opened
3/3/2012	3:15:01 PM	Helium MFC set to  0.000000
3/3/2012	3:15:01 PM	H2 MFC set to  0.000000
3/3/2012	3:15:01 PM	BCl3 MFC set to  0.000000
3/3/2012	3:15:01 PM	PH3 MFC set to  0.000000
3/3/2012	3:15:01 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:15:01 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:15:01 PM	Tube furnace set to 0
3/3/2012	3:16:01 PM	Helium valve closed
3/3/2012	3:16:01 PM	H2 valve closed
3/3/2012	3:16:01 PM	BCl3 valve closed
3/3/2012	3:16:01 PM	PH3 valve closed
3/3/2012	3:16:01 PM	SiCl4 pre valve closed
3/3/2012	3:16:01 PM	SiCl4 post valve closed
3/3/2012	3:16:01 PM	Bypass valve closed
3/3/2012	3:16:01 PM	Bubbler valve closed
3/3/2012	3:16:01 PM	Main Vac valve opened
3/3/2012	3:16:01 PM	Helium MFC set to  0.000000
3/3/2012	3:16:01 PM	H2 MFC set to  0.000000
3/3/2012	3:16:01 PM	BCl3 MFC set to  0.000000
3/3/2012	3:16:01 PM	PH3 MFC set to  0.000000
3/3/2012	3:16:01 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:16:01 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:16:02 PM	Tube furnace set to 0
3/3/2012	3:16:03 PM	Run finished at 3:16 PM
3/3/2012	3:16:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	3:21:42 PM	Recipe started at 3:21 PM
3/3/2012	3:21:42 PM	Helium valve closed
3/3/2012	3:21:42 PM	H2 valve closed
3/3/2012	3:21:42 PM	BCl3 valve closed
3/3/2012	3:21:42 PM	PH3 valve closed
3/3/2012	3:21:42 PM	SiCl4 pre valve closed
3/3/2012	3:21:42 PM	SiCl4 post valve closed
3/3/2012	3:21:42 PM	Bypass valve closed
3/3/2012	3:21:42 PM	Bubbler valve closed
3/3/2012	3:21:42 PM	Main Vac valve opened
3/3/2012	3:21:42 PM	Helium MFC set to  0.000000
3/3/2012	3:21:42 PM	H2 MFC set to  0.000000
3/3/2012	3:21:42 PM	BCl3 MFC set to  0.000000
3/3/2012	3:21:42 PM	PH3 MFC set to  0.000000
3/3/2012	3:21:42 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:21:42 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:21:43 PM	Tube furnace set to 150
3/3/2012	3:22:13 PM	H2 valve closed
3/3/2012	3:22:13 PM	BCl3 valve closed
3/3/2012	3:22:13 PM	PH3 valve closed
3/3/2012	3:22:13 PM	SiCl4 pre valve closed
3/3/2012	3:22:13 PM	SiCl4 post valve closed
3/3/2012	3:22:13 PM	Bypass valve closed
3/3/2012	3:22:13 PM	Bubbler valve closed
3/3/2012	3:22:13 PM	Helium valve opened
3/3/2012	3:22:13 PM	Main Vac valve opened
3/3/2012	3:22:13 PM	Helium MFC set to  20.000000
3/3/2012	3:22:13 PM	H2 MFC set to  0.000000
3/3/2012	3:22:13 PM	BCl3 MFC set to  0.000000
3/3/2012	3:22:13 PM	PH3 MFC set to  0.000000
3/3/2012	3:22:13 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:22:13 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:22:13 PM	Tube furnace set to 150
3/3/2012	3:22:43 PM	Helium valve closed
3/3/2012	3:22:43 PM	H2 valve closed
3/3/2012	3:22:43 PM	BCl3 valve closed
3/3/2012	3:22:43 PM	PH3 valve closed
3/3/2012	3:22:43 PM	SiCl4 pre valve closed
3/3/2012	3:22:43 PM	SiCl4 post valve closed
3/3/2012	3:22:43 PM	Bypass valve closed
3/3/2012	3:22:43 PM	Bubbler valve closed
3/3/2012	3:22:43 PM	Main Vac valve opened
3/3/2012	3:22:43 PM	Helium MFC set to  0.000000
3/3/2012	3:22:43 PM	H2 MFC set to  0.000000
3/3/2012	3:22:43 PM	BCl3 MFC set to  0.000000
3/3/2012	3:22:43 PM	PH3 MFC set to  0.000000
3/3/2012	3:22:43 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:22:43 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:22:43 PM	Tube furnace set to 150
3/3/2012	3:23:13 PM	H2 valve closed
3/3/2012	3:23:13 PM	BCl3 valve closed
3/3/2012	3:23:13 PM	PH3 valve closed
3/3/2012	3:23:13 PM	SiCl4 pre valve closed
3/3/2012	3:23:13 PM	SiCl4 post valve closed
3/3/2012	3:23:13 PM	Bypass valve closed
3/3/2012	3:23:13 PM	Bubbler valve closed
3/3/2012	3:23:13 PM	Helium valve opened
3/3/2012	3:23:13 PM	Main Vac valve opened
3/3/2012	3:23:13 PM	Helium MFC set to  20.000000
3/3/2012	3:23:13 PM	H2 MFC set to  0.000000
3/3/2012	3:23:13 PM	BCl3 MFC set to  0.000000
3/3/2012	3:23:13 PM	PH3 MFC set to  0.000000
3/3/2012	3:23:13 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:23:13 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:23:13 PM	Tube furnace set to 150
3/3/2012	3:23:43 PM	Helium valve closed
3/3/2012	3:23:43 PM	H2 valve closed
3/3/2012	3:23:43 PM	BCl3 valve closed
3/3/2012	3:23:43 PM	PH3 valve closed
3/3/2012	3:23:43 PM	SiCl4 pre valve closed
3/3/2012	3:23:43 PM	SiCl4 post valve closed
3/3/2012	3:23:43 PM	Bypass valve closed
3/3/2012	3:23:43 PM	Bubbler valve closed
3/3/2012	3:23:43 PM	Main Vac valve opened
3/3/2012	3:23:43 PM	Helium MFC set to  0.000000
3/3/2012	3:23:43 PM	H2 MFC set to  0.000000
3/3/2012	3:23:43 PM	BCl3 MFC set to  0.000000
3/3/2012	3:23:43 PM	PH3 MFC set to  0.000000
3/3/2012	3:23:43 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:23:43 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:23:43 PM	Tube furnace set to 150
3/3/2012	3:24:13 PM	H2 valve closed
3/3/2012	3:24:13 PM	BCl3 valve closed
3/3/2012	3:24:13 PM	PH3 valve closed
3/3/2012	3:24:13 PM	SiCl4 pre valve closed
3/3/2012	3:24:13 PM	SiCl4 post valve closed
3/3/2012	3:24:13 PM	Bypass valve closed
3/3/2012	3:24:13 PM	Bubbler valve closed
3/3/2012	3:24:13 PM	Helium valve opened
3/3/2012	3:24:13 PM	Main Vac valve opened
3/3/2012	3:24:13 PM	Helium MFC set to  20.000000
3/3/2012	3:24:13 PM	H2 MFC set to  0.000000
3/3/2012	3:24:13 PM	BCl3 MFC set to  0.000000
3/3/2012	3:24:13 PM	PH3 MFC set to  0.000000
3/3/2012	3:24:13 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:24:13 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:24:14 PM	Tube furnace set to 150
3/3/2012	3:24:44 PM	Helium valve closed
3/3/2012	3:24:44 PM	H2 valve closed
3/3/2012	3:24:44 PM	BCl3 valve closed
3/3/2012	3:24:44 PM	PH3 valve closed
3/3/2012	3:24:44 PM	SiCl4 pre valve closed
3/3/2012	3:24:44 PM	SiCl4 post valve closed
3/3/2012	3:24:44 PM	Bypass valve closed
3/3/2012	3:24:44 PM	Bubbler valve closed
3/3/2012	3:24:44 PM	Main Vac valve opened
3/3/2012	3:24:44 PM	Helium MFC set to  0.000000
3/3/2012	3:24:44 PM	H2 MFC set to  0.000000
3/3/2012	3:24:44 PM	BCl3 MFC set to  0.000000
3/3/2012	3:24:44 PM	PH3 MFC set to  0.000000
3/3/2012	3:24:44 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:24:44 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:24:44 PM	Tube furnace set to 150
3/3/2012	3:25:14 PM	H2 valve closed
3/3/2012	3:25:14 PM	BCl3 valve closed
3/3/2012	3:25:14 PM	PH3 valve closed
3/3/2012	3:25:14 PM	SiCl4 pre valve closed
3/3/2012	3:25:14 PM	SiCl4 post valve closed
3/3/2012	3:25:14 PM	Bypass valve closed
3/3/2012	3:25:14 PM	Bubbler valve closed
3/3/2012	3:25:14 PM	Helium valve opened
3/3/2012	3:25:14 PM	Main Vac valve opened
3/3/2012	3:25:14 PM	Helium MFC set to  20.000000
3/3/2012	3:25:14 PM	H2 MFC set to  0.000000
3/3/2012	3:25:14 PM	BCl3 MFC set to  0.000000
3/3/2012	3:25:14 PM	PH3 MFC set to  0.000000
3/3/2012	3:25:14 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:25:14 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:25:14 PM	Tube furnace set to 150
3/3/2012	3:25:44 PM	Helium valve closed
3/3/2012	3:25:44 PM	H2 valve closed
3/3/2012	3:25:44 PM	BCl3 valve closed
3/3/2012	3:25:44 PM	PH3 valve closed
3/3/2012	3:25:44 PM	SiCl4 pre valve closed
3/3/2012	3:25:44 PM	SiCl4 post valve closed
3/3/2012	3:25:44 PM	Bypass valve closed
3/3/2012	3:25:44 PM	Bubbler valve closed
3/3/2012	3:25:44 PM	Main Vac valve opened
3/3/2012	3:25:44 PM	Helium MFC set to  0.000000
3/3/2012	3:25:44 PM	H2 MFC set to  0.000000
3/3/2012	3:25:44 PM	BCl3 MFC set to  0.000000
3/3/2012	3:25:44 PM	PH3 MFC set to  0.000000
3/3/2012	3:25:44 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:25:44 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:25:44 PM	Tube furnace set to 150
3/3/2012	3:26:14 PM	H2 valve closed
3/3/2012	3:26:14 PM	BCl3 valve closed
3/3/2012	3:26:14 PM	PH3 valve closed
3/3/2012	3:26:14 PM	SiCl4 pre valve closed
3/3/2012	3:26:14 PM	SiCl4 post valve closed
3/3/2012	3:26:14 PM	Bypass valve closed
3/3/2012	3:26:14 PM	Bubbler valve closed
3/3/2012	3:26:14 PM	Helium valve opened
3/3/2012	3:26:14 PM	Main Vac valve opened
3/3/2012	3:26:14 PM	Helium MFC set to  20.000000
3/3/2012	3:26:14 PM	H2 MFC set to  0.000000
3/3/2012	3:26:14 PM	BCl3 MFC set to  0.000000
3/3/2012	3:26:14 PM	PH3 MFC set to  0.000000
3/3/2012	3:26:14 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:26:14 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:26:14 PM	Tube furnace set to 150
3/3/2012	3:26:44 PM	Helium valve closed
3/3/2012	3:26:44 PM	H2 valve closed
3/3/2012	3:26:44 PM	BCl3 valve closed
3/3/2012	3:26:44 PM	PH3 valve closed
3/3/2012	3:26:44 PM	SiCl4 pre valve closed
3/3/2012	3:26:44 PM	SiCl4 post valve closed
3/3/2012	3:26:44 PM	Bypass valve closed
3/3/2012	3:26:44 PM	Bubbler valve closed
3/3/2012	3:26:44 PM	Main Vac valve opened
3/3/2012	3:26:44 PM	Helium MFC set to  0.000000
3/3/2012	3:26:44 PM	H2 MFC set to  0.000000
3/3/2012	3:26:45 PM	BCl3 MFC set to  0.000000
3/3/2012	3:26:45 PM	PH3 MFC set to  0.000000
3/3/2012	3:26:45 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:26:45 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:26:45 PM	Tube furnace set to 150
3/3/2012	3:27:15 PM	H2 valve closed
3/3/2012	3:27:15 PM	BCl3 valve closed
3/3/2012	3:27:15 PM	PH3 valve closed
3/3/2012	3:27:15 PM	SiCl4 pre valve closed
3/3/2012	3:27:15 PM	SiCl4 post valve closed
3/3/2012	3:27:15 PM	Bypass valve closed
3/3/2012	3:27:15 PM	Bubbler valve closed
3/3/2012	3:27:15 PM	Helium valve opened
3/3/2012	3:27:15 PM	Main Vac valve opened
3/3/2012	3:27:15 PM	Helium MFC set to  20.000000
3/3/2012	3:27:15 PM	H2 MFC set to  0.000000
3/3/2012	3:27:15 PM	BCl3 MFC set to  0.000000
3/3/2012	3:27:15 PM	PH3 MFC set to  0.000000
3/3/2012	3:27:15 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:27:15 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:27:15 PM	Tube furnace set to 150
3/3/2012	3:27:45 PM	Helium valve closed
3/3/2012	3:27:45 PM	H2 valve closed
3/3/2012	3:27:45 PM	BCl3 valve closed
3/3/2012	3:27:45 PM	PH3 valve closed
3/3/2012	3:27:45 PM	SiCl4 pre valve closed
3/3/2012	3:27:45 PM	SiCl4 post valve closed
3/3/2012	3:27:45 PM	Bypass valve closed
3/3/2012	3:27:45 PM	Bubbler valve closed
3/3/2012	3:27:45 PM	Main Vac valve opened
3/3/2012	3:27:45 PM	Helium MFC set to  0.000000
3/3/2012	3:27:45 PM	H2 MFC set to  0.000000
3/3/2012	3:27:45 PM	BCl3 MFC set to  0.000000
3/3/2012	3:27:45 PM	PH3 MFC set to  0.000000
3/3/2012	3:27:45 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:27:45 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:27:45 PM	Tube furnace set to 150
3/3/2012	3:28:15 PM	H2 valve closed
3/3/2012	3:28:15 PM	BCl3 valve closed
3/3/2012	3:28:15 PM	PH3 valve closed
3/3/2012	3:28:15 PM	SiCl4 pre valve closed
3/3/2012	3:28:15 PM	SiCl4 post valve closed
3/3/2012	3:28:15 PM	Bypass valve closed
3/3/2012	3:28:15 PM	Bubbler valve closed
3/3/2012	3:28:15 PM	Helium valve opened
3/3/2012	3:28:15 PM	Main Vac valve opened
3/3/2012	3:28:15 PM	Helium MFC set to  20.000000
3/3/2012	3:28:15 PM	H2 MFC set to  0.000000
3/3/2012	3:28:15 PM	BCl3 MFC set to  0.000000
3/3/2012	3:28:15 PM	PH3 MFC set to  0.000000
3/3/2012	3:28:15 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:28:15 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:28:15 PM	Tube furnace set to 150
3/3/2012	3:28:28 PM	Helium valve closed
3/3/2012	3:28:28 PM	H2 valve closed
3/3/2012	3:28:28 PM	BCl3 valve closed
3/3/2012	3:28:28 PM	PH3 valve closed
3/3/2012	3:28:28 PM	SiCl4 pre valve closed
3/3/2012	3:28:28 PM	SiCl4 post valve closed
3/3/2012	3:28:28 PM	Bypass valve closed
3/3/2012	3:28:28 PM	Bubbler valve closed
3/3/2012	3:28:28 PM	Main Vac valve opened
3/3/2012	3:28:28 PM	Helium MFC set to  0.000000
3/3/2012	3:28:28 PM	H2 MFC set to  0.000000
3/3/2012	3:28:28 PM	BCl3 MFC set to  0.000000
3/3/2012	3:28:28 PM	PH3 MFC set to  0.000000
3/3/2012	3:28:28 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:28:28 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:28:28 PM	Tube furnace set to 150
3/3/2012	3:28:28 PM	H2 valve closed
3/3/2012	3:28:28 PM	BCl3 valve closed
3/3/2012	3:28:28 PM	PH3 valve closed
3/3/2012	3:28:28 PM	SiCl4 pre valve closed
3/3/2012	3:28:28 PM	SiCl4 post valve closed
3/3/2012	3:28:28 PM	Bypass valve closed
3/3/2012	3:28:28 PM	Bubbler valve closed
3/3/2012	3:28:28 PM	Helium valve opened
3/3/2012	3:28:28 PM	Main Vac valve opened
3/3/2012	3:28:28 PM	Helium MFC set to  20.000000
3/3/2012	3:28:28 PM	H2 MFC set to  0.000000
3/3/2012	3:28:28 PM	BCl3 MFC set to  0.000000
3/3/2012	3:28:28 PM	PH3 MFC set to  0.000000
3/3/2012	3:28:28 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:28:28 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:28:28 PM	Tube furnace set to 150
3/3/2012	3:28:29 PM	Helium valve closed
3/3/2012	3:28:29 PM	H2 valve closed
3/3/2012	3:28:29 PM	BCl3 valve closed
3/3/2012	3:28:29 PM	PH3 valve closed
3/3/2012	3:28:29 PM	SiCl4 pre valve closed
3/3/2012	3:28:29 PM	SiCl4 post valve closed
3/3/2012	3:28:29 PM	Bypass valve closed
3/3/2012	3:28:29 PM	Bubbler valve closed
3/3/2012	3:28:29 PM	Main Vac valve opened
3/3/2012	3:28:29 PM	Helium MFC set to  0.000000
3/3/2012	3:28:29 PM	H2 MFC set to  0.000000
3/3/2012	3:28:29 PM	BCl3 MFC set to  0.000000
3/3/2012	3:28:29 PM	PH3 MFC set to  0.000000
3/3/2012	3:28:29 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:28:29 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:28:29 PM	Tube furnace set to 150
3/3/2012	3:28:29 PM	H2 valve closed
3/3/2012	3:28:29 PM	BCl3 valve closed
3/3/2012	3:28:29 PM	PH3 valve closed
3/3/2012	3:28:29 PM	SiCl4 pre valve closed
3/3/2012	3:28:29 PM	SiCl4 post valve closed
3/3/2012	3:28:29 PM	Bypass valve closed
3/3/2012	3:28:29 PM	Bubbler valve closed
3/3/2012	3:28:29 PM	Helium valve opened
3/3/2012	3:28:29 PM	Main Vac valve opened
3/3/2012	3:28:29 PM	Helium MFC set to  20.000000
3/3/2012	3:28:29 PM	H2 MFC set to  0.000000
3/3/2012	3:28:29 PM	BCl3 MFC set to  0.000000
3/3/2012	3:28:29 PM	PH3 MFC set to  0.000000
3/3/2012	3:28:29 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:28:29 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:28:29 PM	Tube furnace set to 150
3/3/2012	3:28:30 PM	Helium valve closed
3/3/2012	3:28:30 PM	H2 valve closed
3/3/2012	3:28:30 PM	BCl3 valve closed
3/3/2012	3:28:30 PM	PH3 valve closed
3/3/2012	3:28:30 PM	SiCl4 pre valve closed
3/3/2012	3:28:30 PM	SiCl4 post valve closed
3/3/2012	3:28:30 PM	Bypass valve closed
3/3/2012	3:28:30 PM	Bubbler valve closed
3/3/2012	3:28:30 PM	Main Vac valve opened
3/3/2012	3:28:30 PM	Helium MFC set to  0.000000
3/3/2012	3:28:30 PM	H2 MFC set to  0.000000
3/3/2012	3:28:30 PM	BCl3 MFC set to  0.000000
3/3/2012	3:28:30 PM	PH3 MFC set to  0.000000
3/3/2012	3:28:30 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:28:30 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:28:30 PM	Tube furnace set to 150
3/3/2012	3:28:30 PM	H2 valve closed
3/3/2012	3:28:30 PM	BCl3 valve closed
3/3/2012	3:28:30 PM	PH3 valve closed
3/3/2012	3:28:30 PM	SiCl4 pre valve closed
3/3/2012	3:28:30 PM	SiCl4 post valve closed
3/3/2012	3:28:30 PM	Bypass valve closed
3/3/2012	3:28:30 PM	Bubbler valve closed
3/3/2012	3:28:30 PM	Helium valve opened
3/3/2012	3:28:30 PM	Main Vac valve opened
3/3/2012	3:28:30 PM	Helium MFC set to  20.000000
3/3/2012	3:28:30 PM	H2 MFC set to  0.000000
3/3/2012	3:28:30 PM	BCl3 MFC set to  0.000000
3/3/2012	3:28:30 PM	PH3 MFC set to  0.000000
3/3/2012	3:28:30 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:28:30 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:28:30 PM	Tube furnace set to 150
3/3/2012	3:29:00 PM	Helium valve closed
3/3/2012	3:29:00 PM	H2 valve closed
3/3/2012	3:29:00 PM	BCl3 valve closed
3/3/2012	3:29:00 PM	PH3 valve closed
3/3/2012	3:29:00 PM	SiCl4 pre valve closed
3/3/2012	3:29:00 PM	SiCl4 post valve closed
3/3/2012	3:29:00 PM	Bypass valve closed
3/3/2012	3:29:00 PM	Bubbler valve closed
3/3/2012	3:29:00 PM	Main Vac valve opened
3/3/2012	3:29:00 PM	Helium MFC set to  0.000000
3/3/2012	3:29:00 PM	H2 MFC set to  0.000000
3/3/2012	3:29:00 PM	BCl3 MFC set to  0.000000
3/3/2012	3:29:00 PM	PH3 MFC set to  0.000000
3/3/2012	3:29:00 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:29:00 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:29:00 PM	Tube furnace set to 150
3/3/2012	3:29:01 PM	Run finished at 3:29 PM
3/3/2012	3:29:45 PM	Recipe started at 3:29 PM
3/3/2012	3:29:45 PM	Helium valve closed
3/3/2012	3:29:45 PM	H2 valve closed
3/3/2012	3:29:45 PM	BCl3 valve closed
3/3/2012	3:29:45 PM	PH3 valve closed
3/3/2012	3:29:45 PM	SiCl4 pre valve closed
3/3/2012	3:29:45 PM	SiCl4 post valve closed
3/3/2012	3:29:45 PM	Main Vac valve closed
3/3/2012	3:29:45 PM	Bypass valve closed
3/3/2012	3:29:45 PM	Bubbler valve closed
3/3/2012	3:29:45 PM	Helium MFC set to  0.000000
3/3/2012	3:29:45 PM	H2 MFC set to  0.000000
3/3/2012	3:29:45 PM	BCl3 MFC set to  0.000000
3/3/2012	3:29:45 PM	PH3 MFC set to  0.000000
3/3/2012	3:29:45 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:29:45 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:29:45 PM	Tube furnace set to 0
3/3/2012	3:29:48 PM	Helium valve closed
3/3/2012	3:29:48 PM	BCl3 valve closed
3/3/2012	3:29:48 PM	PH3 valve closed
3/3/2012	3:29:48 PM	SiCl4 pre valve closed
3/3/2012	3:29:48 PM	SiCl4 post valve closed
3/3/2012	3:29:48 PM	Main Vac valve closed
3/3/2012	3:29:48 PM	Bypass valve closed
3/3/2012	3:29:48 PM	Bubbler valve closed
3/3/2012	3:29:48 PM	H2 valve opened
3/3/2012	3:29:48 PM	Helium MFC set to  0.000000
3/3/2012	3:29:48 PM	H2 MFC set to  500.000000
3/3/2012	3:29:48 PM	BCl3 MFC set to  0.000000
3/3/2012	3:29:48 PM	PH3 MFC set to  0.000000
3/3/2012	3:29:48 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:29:48 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:29:48 PM	Tube furnace set to 0
3/3/2012	3:30:51 PM	Helium valve closed
3/3/2012	3:30:51 PM	BCl3 valve closed
3/3/2012	3:30:51 PM	PH3 valve closed
3/3/2012	3:30:51 PM	SiCl4 pre valve closed
3/3/2012	3:30:51 PM	SiCl4 post valve closed
3/3/2012	3:30:51 PM	Main Vac valve closed
3/3/2012	3:30:51 PM	Bypass valve closed
3/3/2012	3:30:51 PM	H2 valve opened
3/3/2012	3:30:51 PM	Bubbler valve opened
3/3/2012	3:30:51 PM	Helium MFC set to  0.000000
3/3/2012	3:30:51 PM	H2 MFC set to  500.000000
3/3/2012	3:30:51 PM	BCl3 MFC set to  0.000000
3/3/2012	3:30:51 PM	PH3 MFC set to  0.000000
3/3/2012	3:30:51 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:30:51 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:30:51 PM	Tube furnace set to 0
3/3/2012	3:30:52 PM	Helium valve closed
3/3/2012	3:30:52 PM	BCl3 valve closed
3/3/2012	3:30:52 PM	PH3 valve closed
3/3/2012	3:30:52 PM	SiCl4 pre valve closed
3/3/2012	3:30:52 PM	SiCl4 post valve closed
3/3/2012	3:30:52 PM	Main Vac valve closed
3/3/2012	3:30:52 PM	Bypass valve closed
3/3/2012	3:30:52 PM	H2 valve opened
3/3/2012	3:30:52 PM	Bubbler valve opened
3/3/2012	3:30:52 PM	Helium MFC set to  0.000000
3/3/2012	3:30:52 PM	H2 MFC set to  500.000000
3/3/2012	3:30:52 PM	BCl3 MFC set to  0.000000
3/3/2012	3:30:52 PM	PH3 MFC set to  0.000000
3/3/2012	3:30:52 PM	SiCl4 MFC set to  0.000000
3/3/2012	3:30:52 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:30:52 PM	Tube furnace set to 1000
3/3/2012	3:50:52 PM	Helium valve closed
3/3/2012	3:50:52 PM	PH3 valve closed
3/3/2012	3:50:52 PM	Main Vac valve closed
3/3/2012	3:50:52 PM	Bypass valve closed
3/3/2012	3:50:52 PM	H2 valve opened
3/3/2012	3:50:52 PM	BCl3 valve opened
3/3/2012	3:50:52 PM	SiCl4 pre valve opened
3/3/2012	3:50:52 PM	SiCl4 post valve opened
3/3/2012	3:50:52 PM	Bubbler valve opened
3/3/2012	3:50:52 PM	Helium MFC set to  0.000000
3/3/2012	3:50:52 PM	H2 MFC set to  500.000000
3/3/2012	3:50:52 PM	BCl3 MFC set to  1.500000
3/3/2012	3:50:52 PM	PH3 MFC set to  0.000000
3/3/2012	3:50:52 PM	SiCl4 MFC set to  50.000000
3/3/2012	3:50:52 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	3:50:52 PM	Tube furnace set to 1000
3/3/2012	4:05:52 PM	Helium valve closed
3/3/2012	4:05:52 PM	BCl3 valve closed
3/3/2012	4:05:52 PM	PH3 valve closed
3/3/2012	4:05:52 PM	SiCl4 pre valve closed
3/3/2012	4:05:52 PM	SiCl4 post valve closed
3/3/2012	4:05:52 PM	Main Vac valve closed
3/3/2012	4:05:52 PM	Bypass valve closed
3/3/2012	4:05:52 PM	H2 valve opened
3/3/2012	4:05:52 PM	Bubbler valve opened
3/3/2012	4:05:52 PM	Helium MFC set to  0.000000
3/3/2012	4:05:52 PM	H2 MFC set to  500.000000
3/3/2012	4:05:52 PM	BCl3 MFC set to  0.000000
3/3/2012	4:05:52 PM	PH3 MFC set to  0.000000
3/3/2012	4:05:52 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:05:52 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:05:52 PM	Tube furnace set to 750
3/3/2012	4:10:52 PM	H2 valve closed
3/3/2012	4:10:52 PM	BCl3 valve closed
3/3/2012	4:10:52 PM	PH3 valve closed
3/3/2012	4:10:52 PM	SiCl4 pre valve closed
3/3/2012	4:10:52 PM	SiCl4 post valve closed
3/3/2012	4:10:52 PM	Main Vac valve closed
3/3/2012	4:10:52 PM	Bypass valve closed
3/3/2012	4:10:52 PM	Helium valve opened
3/3/2012	4:10:52 PM	Bubbler valve opened
3/3/2012	4:10:52 PM	Helium MFC set to  500.000000
3/3/2012	4:10:52 PM	H2 MFC set to  0.000000
3/3/2012	4:10:52 PM	BCl3 MFC set to  0.000000
3/3/2012	4:10:52 PM	PH3 MFC set to  0.000000
3/3/2012	4:10:52 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:10:52 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:10:53 PM	Tube furnace set to 0
3/3/2012	4:19:51 PM	Run aborted at 4:19 PM
3/3/2012	4:19:51 PM	Helium valve closed
3/3/2012	4:19:51 PM	H2 valve closed
3/3/2012	4:19:51 PM	BCl3 valve closed
3/3/2012	4:19:51 PM	PH3 valve closed
3/3/2012	4:19:51 PM	SiCl4 pre valve closed
3/3/2012	4:19:51 PM	SiCl4 post valve closed
3/3/2012	4:19:51 PM	Bypass valve closed
3/3/2012	4:19:51 PM	Main Vac valve closed
3/3/2012	4:19:51 PM	Bubbler valve closed
3/3/2012	4:19:51 PM	Helium MFC set to  0.000000
3/3/2012	4:19:51 PM	H2 MFC set to  0.000000
3/3/2012	4:19:51 PM	BCl3 MFC set to  0.000000
3/3/2012	4:19:51 PM	PH3 MFC set to  0.000000
3/3/2012	4:19:51 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:19:51 PM	Tube furnace set to 0
3/3/2012	4:19:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	4:19:54 PM	Recipe started at 4:19 PM
3/3/2012	4:19:54 PM	Helium valve closed
3/3/2012	4:19:54 PM	H2 valve closed
3/3/2012	4:19:54 PM	BCl3 valve closed
3/3/2012	4:19:54 PM	PH3 valve closed
3/3/2012	4:19:54 PM	SiCl4 pre valve closed
3/3/2012	4:19:54 PM	SiCl4 post valve closed
3/3/2012	4:19:54 PM	Main Vac valve closed
3/3/2012	4:19:54 PM	Bypass valve closed
3/3/2012	4:19:54 PM	Bubbler valve closed
3/3/2012	4:19:54 PM	Helium MFC set to  0.000000
3/3/2012	4:19:54 PM	H2 MFC set to  0.000000
3/3/2012	4:19:54 PM	BCl3 MFC set to  0.000000
3/3/2012	4:19:54 PM	PH3 MFC set to  0.000000
3/3/2012	4:19:54 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:19:54 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:19:55 PM	Tube furnace set to 0
3/3/2012	4:19:58 PM	H2 valve closed
3/3/2012	4:19:58 PM	BCl3 valve closed
3/3/2012	4:19:58 PM	PH3 valve closed
3/3/2012	4:19:58 PM	SiCl4 pre valve closed
3/3/2012	4:19:58 PM	SiCl4 post valve closed
3/3/2012	4:19:58 PM	Main Vac valve closed
3/3/2012	4:19:58 PM	Bypass valve closed
3/3/2012	4:19:58 PM	Bubbler valve closed
3/3/2012	4:19:58 PM	Helium valve opened
3/3/2012	4:19:58 PM	Helium MFC set to  500.000000
3/3/2012	4:19:58 PM	H2 MFC set to  0.000000
3/3/2012	4:19:58 PM	BCl3 MFC set to  0.000000
3/3/2012	4:19:58 PM	PH3 MFC set to  0.000000
3/3/2012	4:19:58 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:19:58 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:19:58 PM	Tube furnace set to 0
3/3/2012	4:19:58 PM	Helium valve closed
3/3/2012	4:19:58 PM	H2 valve closed
3/3/2012	4:19:58 PM	BCl3 valve closed
3/3/2012	4:19:58 PM	PH3 valve closed
3/3/2012	4:19:58 PM	SiCl4 pre valve closed
3/3/2012	4:19:58 PM	SiCl4 post valve closed
3/3/2012	4:19:58 PM	Main Vac valve closed
3/3/2012	4:19:58 PM	Bypass valve closed
3/3/2012	4:19:58 PM	Bubbler valve closed
3/3/2012	4:19:58 PM	Helium MFC set to  0.000000
3/3/2012	4:19:58 PM	H2 MFC set to  0.000000
3/3/2012	4:19:58 PM	BCl3 MFC set to  0.000000
3/3/2012	4:19:58 PM	PH3 MFC set to  0.000000
3/3/2012	4:19:58 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:19:58 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:19:58 PM	Tube furnace set to 0
3/3/2012	4:19:59 PM	Run finished at 4:19 PM
3/3/2012	4:19:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	4:22:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	4:22:52 PM	Recipe started at 4:22 PM
3/3/2012	4:22:52 PM	Helium valve closed
3/3/2012	4:22:52 PM	H2 valve closed
3/3/2012	4:22:52 PM	BCl3 valve closed
3/3/2012	4:22:52 PM	PH3 valve closed
3/3/2012	4:22:52 PM	SiCl4 pre valve closed
3/3/2012	4:22:52 PM	SiCl4 post valve closed
3/3/2012	4:22:52 PM	Main Vac valve closed
3/3/2012	4:22:52 PM	Bubbler valve closed
3/3/2012	4:22:52 PM	Bypass valve opened
3/3/2012	4:22:52 PM	Helium MFC set to  0.000000
3/3/2012	4:22:52 PM	H2 MFC set to  0.000000
3/3/2012	4:22:52 PM	BCl3 MFC set to  0.000000
3/3/2012	4:22:52 PM	PH3 MFC set to  0.000000
3/3/2012	4:22:52 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:22:52 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:22:52 PM	Tube furnace set to 0
3/3/2012	4:23:46 PM	Helium valve closed
3/3/2012	4:23:46 PM	H2 valve closed
3/3/2012	4:23:46 PM	BCl3 valve closed
3/3/2012	4:23:46 PM	PH3 valve closed
3/3/2012	4:23:46 PM	SiCl4 pre valve closed
3/3/2012	4:23:46 PM	SiCl4 post valve closed
3/3/2012	4:23:46 PM	Main Vac valve closed
3/3/2012	4:23:46 PM	Bubbler valve closed
3/3/2012	4:23:46 PM	Bypass valve opened
3/3/2012	4:23:46 PM	Helium MFC set to  0.000000
3/3/2012	4:23:46 PM	H2 MFC set to  0.000000
3/3/2012	4:23:46 PM	BCl3 MFC set to  0.000000
3/3/2012	4:23:46 PM	PH3 MFC set to  0.000000
3/3/2012	4:23:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:23:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:23:47 PM	Tube furnace set to 0
3/3/2012	4:24:47 PM	Helium valve closed
3/3/2012	4:24:47 PM	H2 valve closed
3/3/2012	4:24:47 PM	BCl3 valve closed
3/3/2012	4:24:47 PM	PH3 valve closed
3/3/2012	4:24:47 PM	SiCl4 pre valve closed
3/3/2012	4:24:47 PM	SiCl4 post valve closed
3/3/2012	4:24:47 PM	Bypass valve closed
3/3/2012	4:24:47 PM	Bubbler valve closed
3/3/2012	4:24:47 PM	Main Vac valve opened
3/3/2012	4:24:47 PM	Helium MFC set to  0.000000
3/3/2012	4:24:47 PM	H2 MFC set to  0.000000
3/3/2012	4:24:47 PM	BCl3 MFC set to  0.000000
3/3/2012	4:24:47 PM	PH3 MFC set to  0.000000
3/3/2012	4:24:47 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:24:47 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:24:47 PM	Tube furnace set to 0
3/3/2012	4:24:48 PM	Run finished at 4:24 PM
3/3/2012	4:24:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	4:25:13 PM	Recipe started at 4:25 PM
3/3/2012	4:25:13 PM	Helium valve closed
3/3/2012	4:25:13 PM	H2 valve closed
3/3/2012	4:25:13 PM	BCl3 valve closed
3/3/2012	4:25:13 PM	PH3 valve closed
3/3/2012	4:25:13 PM	SiCl4 pre valve closed
3/3/2012	4:25:13 PM	SiCl4 post valve closed
3/3/2012	4:25:13 PM	Bypass valve closed
3/3/2012	4:25:13 PM	Bubbler valve closed
3/3/2012	4:25:13 PM	Main Vac valve opened
3/3/2012	4:25:13 PM	Helium MFC set to  0.000000
3/3/2012	4:25:13 PM	H2 MFC set to  0.000000
3/3/2012	4:25:13 PM	BCl3 MFC set to  0.000000
3/3/2012	4:25:13 PM	PH3 MFC set to  0.000000
3/3/2012	4:25:13 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:25:13 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:25:13 PM	Tube furnace set to 150
3/3/2012	4:25:43 PM	H2 valve closed
3/3/2012	4:25:43 PM	BCl3 valve closed
3/3/2012	4:25:43 PM	PH3 valve closed
3/3/2012	4:25:43 PM	SiCl4 pre valve closed
3/3/2012	4:25:43 PM	SiCl4 post valve closed
3/3/2012	4:25:43 PM	Bypass valve closed
3/3/2012	4:25:43 PM	Bubbler valve closed
3/3/2012	4:25:43 PM	Helium valve opened
3/3/2012	4:25:43 PM	Main Vac valve opened
3/3/2012	4:25:43 PM	Helium MFC set to  20.000000
3/3/2012	4:25:43 PM	H2 MFC set to  0.000000
3/3/2012	4:25:43 PM	BCl3 MFC set to  0.000000
3/3/2012	4:25:43 PM	PH3 MFC set to  0.000000
3/3/2012	4:25:43 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:25:43 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:25:44 PM	Tube furnace set to 150
3/3/2012	4:26:14 PM	Helium valve closed
3/3/2012	4:26:14 PM	H2 valve closed
3/3/2012	4:26:14 PM	BCl3 valve closed
3/3/2012	4:26:14 PM	PH3 valve closed
3/3/2012	4:26:14 PM	SiCl4 pre valve closed
3/3/2012	4:26:14 PM	SiCl4 post valve closed
3/3/2012	4:26:14 PM	Bypass valve closed
3/3/2012	4:26:14 PM	Bubbler valve closed
3/3/2012	4:26:14 PM	Main Vac valve opened
3/3/2012	4:26:14 PM	Helium MFC set to  0.000000
3/3/2012	4:26:14 PM	H2 MFC set to  0.000000
3/3/2012	4:26:14 PM	BCl3 MFC set to  0.000000
3/3/2012	4:26:14 PM	PH3 MFC set to  0.000000
3/3/2012	4:26:14 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:26:14 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:26:14 PM	Tube furnace set to 150
3/3/2012	4:26:44 PM	H2 valve closed
3/3/2012	4:26:44 PM	BCl3 valve closed
3/3/2012	4:26:44 PM	PH3 valve closed
3/3/2012	4:26:44 PM	SiCl4 pre valve closed
3/3/2012	4:26:44 PM	SiCl4 post valve closed
3/3/2012	4:26:44 PM	Bypass valve closed
3/3/2012	4:26:44 PM	Bubbler valve closed
3/3/2012	4:26:44 PM	Helium valve opened
3/3/2012	4:26:44 PM	Main Vac valve opened
3/3/2012	4:26:44 PM	Helium MFC set to  20.000000
3/3/2012	4:26:44 PM	H2 MFC set to  0.000000
3/3/2012	4:26:44 PM	BCl3 MFC set to  0.000000
3/3/2012	4:26:44 PM	PH3 MFC set to  0.000000
3/3/2012	4:26:44 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:26:44 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:26:44 PM	Tube furnace set to 150
3/3/2012	4:27:14 PM	Helium valve closed
3/3/2012	4:27:14 PM	H2 valve closed
3/3/2012	4:27:14 PM	BCl3 valve closed
3/3/2012	4:27:14 PM	PH3 valve closed
3/3/2012	4:27:14 PM	SiCl4 pre valve closed
3/3/2012	4:27:14 PM	SiCl4 post valve closed
3/3/2012	4:27:14 PM	Bypass valve closed
3/3/2012	4:27:14 PM	Bubbler valve closed
3/3/2012	4:27:14 PM	Main Vac valve opened
3/3/2012	4:27:14 PM	Helium MFC set to  0.000000
3/3/2012	4:27:14 PM	H2 MFC set to  0.000000
3/3/2012	4:27:14 PM	BCl3 MFC set to  0.000000
3/3/2012	4:27:14 PM	PH3 MFC set to  0.000000
3/3/2012	4:27:14 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:27:14 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:27:14 PM	Tube furnace set to 150
3/3/2012	4:27:44 PM	H2 valve closed
3/3/2012	4:27:44 PM	BCl3 valve closed
3/3/2012	4:27:44 PM	PH3 valve closed
3/3/2012	4:27:44 PM	SiCl4 pre valve closed
3/3/2012	4:27:44 PM	SiCl4 post valve closed
3/3/2012	4:27:44 PM	Bypass valve closed
3/3/2012	4:27:44 PM	Bubbler valve closed
3/3/2012	4:27:44 PM	Helium valve opened
3/3/2012	4:27:44 PM	Main Vac valve opened
3/3/2012	4:27:44 PM	Helium MFC set to  20.000000
3/3/2012	4:27:44 PM	H2 MFC set to  0.000000
3/3/2012	4:27:44 PM	BCl3 MFC set to  0.000000
3/3/2012	4:27:44 PM	PH3 MFC set to  0.000000
3/3/2012	4:27:44 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:27:44 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:27:44 PM	Tube furnace set to 150
3/3/2012	4:28:14 PM	Helium valve closed
3/3/2012	4:28:14 PM	H2 valve closed
3/3/2012	4:28:14 PM	BCl3 valve closed
3/3/2012	4:28:14 PM	PH3 valve closed
3/3/2012	4:28:14 PM	SiCl4 pre valve closed
3/3/2012	4:28:14 PM	SiCl4 post valve closed
3/3/2012	4:28:14 PM	Bypass valve closed
3/3/2012	4:28:14 PM	Bubbler valve closed
3/3/2012	4:28:14 PM	Main Vac valve opened
3/3/2012	4:28:14 PM	Helium MFC set to  0.000000
3/3/2012	4:28:14 PM	H2 MFC set to  0.000000
3/3/2012	4:28:14 PM	BCl3 MFC set to  0.000000
3/3/2012	4:28:14 PM	PH3 MFC set to  0.000000
3/3/2012	4:28:14 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:28:14 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:28:15 PM	Tube furnace set to 150
3/3/2012	4:28:45 PM	H2 valve closed
3/3/2012	4:28:45 PM	BCl3 valve closed
3/3/2012	4:28:45 PM	PH3 valve closed
3/3/2012	4:28:45 PM	SiCl4 pre valve closed
3/3/2012	4:28:45 PM	SiCl4 post valve closed
3/3/2012	4:28:45 PM	Bypass valve closed
3/3/2012	4:28:45 PM	Bubbler valve closed
3/3/2012	4:28:45 PM	Helium valve opened
3/3/2012	4:28:45 PM	Main Vac valve opened
3/3/2012	4:28:45 PM	Helium MFC set to  20.000000
3/3/2012	4:28:45 PM	H2 MFC set to  0.000000
3/3/2012	4:28:45 PM	BCl3 MFC set to  0.000000
3/3/2012	4:28:45 PM	PH3 MFC set to  0.000000
3/3/2012	4:28:45 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:28:45 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:28:45 PM	Tube furnace set to 150
3/3/2012	4:29:15 PM	Helium valve closed
3/3/2012	4:29:15 PM	H2 valve closed
3/3/2012	4:29:15 PM	BCl3 valve closed
3/3/2012	4:29:15 PM	PH3 valve closed
3/3/2012	4:29:15 PM	SiCl4 pre valve closed
3/3/2012	4:29:15 PM	SiCl4 post valve closed
3/3/2012	4:29:15 PM	Bypass valve closed
3/3/2012	4:29:15 PM	Bubbler valve closed
3/3/2012	4:29:15 PM	Main Vac valve opened
3/3/2012	4:29:15 PM	Helium MFC set to  0.000000
3/3/2012	4:29:15 PM	H2 MFC set to  0.000000
3/3/2012	4:29:15 PM	BCl3 MFC set to  0.000000
3/3/2012	4:29:15 PM	PH3 MFC set to  0.000000
3/3/2012	4:29:15 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:29:15 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:29:15 PM	Tube furnace set to 150
3/3/2012	4:29:45 PM	H2 valve closed
3/3/2012	4:29:45 PM	BCl3 valve closed
3/3/2012	4:29:45 PM	PH3 valve closed
3/3/2012	4:29:45 PM	SiCl4 pre valve closed
3/3/2012	4:29:45 PM	SiCl4 post valve closed
3/3/2012	4:29:45 PM	Bypass valve closed
3/3/2012	4:29:45 PM	Bubbler valve closed
3/3/2012	4:29:45 PM	Helium valve opened
3/3/2012	4:29:45 PM	Main Vac valve opened
3/3/2012	4:29:45 PM	Helium MFC set to  20.000000
3/3/2012	4:29:45 PM	H2 MFC set to  0.000000
3/3/2012	4:29:45 PM	BCl3 MFC set to  0.000000
3/3/2012	4:29:45 PM	PH3 MFC set to  0.000000
3/3/2012	4:29:45 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:29:45 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:29:45 PM	Tube furnace set to 150
3/3/2012	4:30:15 PM	Helium valve closed
3/3/2012	4:30:15 PM	H2 valve closed
3/3/2012	4:30:15 PM	BCl3 valve closed
3/3/2012	4:30:15 PM	PH3 valve closed
3/3/2012	4:30:15 PM	SiCl4 pre valve closed
3/3/2012	4:30:15 PM	SiCl4 post valve closed
3/3/2012	4:30:15 PM	Bypass valve closed
3/3/2012	4:30:15 PM	Bubbler valve closed
3/3/2012	4:30:15 PM	Main Vac valve opened
3/3/2012	4:30:15 PM	Helium MFC set to  0.000000
3/3/2012	4:30:15 PM	H2 MFC set to  0.000000
3/3/2012	4:30:15 PM	BCl3 MFC set to  0.000000
3/3/2012	4:30:15 PM	PH3 MFC set to  0.000000
3/3/2012	4:30:15 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:30:15 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:30:15 PM	Tube furnace set to 150
3/3/2012	4:30:45 PM	H2 valve closed
3/3/2012	4:30:45 PM	BCl3 valve closed
3/3/2012	4:30:45 PM	PH3 valve closed
3/3/2012	4:30:45 PM	SiCl4 pre valve closed
3/3/2012	4:30:45 PM	SiCl4 post valve closed
3/3/2012	4:30:45 PM	Bypass valve closed
3/3/2012	4:30:45 PM	Bubbler valve closed
3/3/2012	4:30:45 PM	Helium valve opened
3/3/2012	4:30:45 PM	Main Vac valve opened
3/3/2012	4:30:45 PM	Helium MFC set to  20.000000
3/3/2012	4:30:45 PM	H2 MFC set to  0.000000
3/3/2012	4:30:45 PM	BCl3 MFC set to  0.000000
3/3/2012	4:30:45 PM	PH3 MFC set to  0.000000
3/3/2012	4:30:45 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:30:45 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:30:46 PM	Tube furnace set to 150
3/3/2012	4:31:16 PM	Helium valve closed
3/3/2012	4:31:16 PM	H2 valve closed
3/3/2012	4:31:16 PM	BCl3 valve closed
3/3/2012	4:31:16 PM	PH3 valve closed
3/3/2012	4:31:16 PM	SiCl4 pre valve closed
3/3/2012	4:31:16 PM	SiCl4 post valve closed
3/3/2012	4:31:16 PM	Bypass valve closed
3/3/2012	4:31:16 PM	Bubbler valve closed
3/3/2012	4:31:16 PM	Main Vac valve opened
3/3/2012	4:31:16 PM	Helium MFC set to  0.000000
3/3/2012	4:31:16 PM	H2 MFC set to  0.000000
3/3/2012	4:31:16 PM	BCl3 MFC set to  0.000000
3/3/2012	4:31:16 PM	PH3 MFC set to  0.000000
3/3/2012	4:31:16 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:31:16 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:31:16 PM	Tube furnace set to 150
3/3/2012	4:31:46 PM	H2 valve closed
3/3/2012	4:31:46 PM	BCl3 valve closed
3/3/2012	4:31:46 PM	PH3 valve closed
3/3/2012	4:31:46 PM	SiCl4 pre valve closed
3/3/2012	4:31:46 PM	SiCl4 post valve closed
3/3/2012	4:31:46 PM	Bypass valve closed
3/3/2012	4:31:46 PM	Bubbler valve closed
3/3/2012	4:31:46 PM	Helium valve opened
3/3/2012	4:31:46 PM	Main Vac valve opened
3/3/2012	4:31:46 PM	Helium MFC set to  20.000000
3/3/2012	4:31:46 PM	H2 MFC set to  0.000000
3/3/2012	4:31:46 PM	BCl3 MFC set to  0.000000
3/3/2012	4:31:46 PM	PH3 MFC set to  0.000000
3/3/2012	4:31:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:31:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:31:46 PM	Tube furnace set to 150
3/3/2012	4:32:16 PM	Helium valve closed
3/3/2012	4:32:16 PM	H2 valve closed
3/3/2012	4:32:16 PM	BCl3 valve closed
3/3/2012	4:32:16 PM	PH3 valve closed
3/3/2012	4:32:16 PM	SiCl4 pre valve closed
3/3/2012	4:32:16 PM	SiCl4 post valve closed
3/3/2012	4:32:16 PM	Bypass valve closed
3/3/2012	4:32:16 PM	Bubbler valve closed
3/3/2012	4:32:16 PM	Main Vac valve opened
3/3/2012	4:32:16 PM	Helium MFC set to  0.000000
3/3/2012	4:32:16 PM	H2 MFC set to  0.000000
3/3/2012	4:32:16 PM	BCl3 MFC set to  0.000000
3/3/2012	4:32:16 PM	PH3 MFC set to  0.000000
3/3/2012	4:32:16 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:32:16 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:32:16 PM	Tube furnace set to 150
3/3/2012	4:32:46 PM	H2 valve closed
3/3/2012	4:32:46 PM	BCl3 valve closed
3/3/2012	4:32:46 PM	PH3 valve closed
3/3/2012	4:32:46 PM	SiCl4 pre valve closed
3/3/2012	4:32:46 PM	SiCl4 post valve closed
3/3/2012	4:32:46 PM	Bypass valve closed
3/3/2012	4:32:46 PM	Bubbler valve closed
3/3/2012	4:32:46 PM	Helium valve opened
3/3/2012	4:32:46 PM	Main Vac valve opened
3/3/2012	4:32:46 PM	Helium MFC set to  20.000000
3/3/2012	4:32:46 PM	H2 MFC set to  0.000000
3/3/2012	4:32:46 PM	BCl3 MFC set to  0.000000
3/3/2012	4:32:46 PM	PH3 MFC set to  0.000000
3/3/2012	4:32:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:32:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:32:46 PM	Tube furnace set to 150
3/3/2012	4:33:16 PM	Helium valve closed
3/3/2012	4:33:16 PM	H2 valve closed
3/3/2012	4:33:16 PM	BCl3 valve closed
3/3/2012	4:33:16 PM	PH3 valve closed
3/3/2012	4:33:16 PM	SiCl4 pre valve closed
3/3/2012	4:33:16 PM	SiCl4 post valve closed
3/3/2012	4:33:16 PM	Bypass valve closed
3/3/2012	4:33:16 PM	Bubbler valve closed
3/3/2012	4:33:16 PM	Main Vac valve opened
3/3/2012	4:33:16 PM	Helium MFC set to  0.000000
3/3/2012	4:33:17 PM	H2 MFC set to  0.000000
3/3/2012	4:33:17 PM	BCl3 MFC set to  0.000000
3/3/2012	4:33:17 PM	PH3 MFC set to  0.000000
3/3/2012	4:33:17 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:33:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:33:17 PM	Tube furnace set to 150
3/3/2012	4:33:47 PM	H2 valve closed
3/3/2012	4:33:47 PM	BCl3 valve closed
3/3/2012	4:33:47 PM	PH3 valve closed
3/3/2012	4:33:47 PM	SiCl4 pre valve closed
3/3/2012	4:33:47 PM	SiCl4 post valve closed
3/3/2012	4:33:47 PM	Bypass valve closed
3/3/2012	4:33:47 PM	Bubbler valve closed
3/3/2012	4:33:47 PM	Helium valve opened
3/3/2012	4:33:47 PM	Main Vac valve opened
3/3/2012	4:33:47 PM	Helium MFC set to  20.000000
3/3/2012	4:33:47 PM	H2 MFC set to  0.000000
3/3/2012	4:33:47 PM	BCl3 MFC set to  0.000000
3/3/2012	4:33:47 PM	PH3 MFC set to  0.000000
3/3/2012	4:33:47 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:33:47 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:33:47 PM	Tube furnace set to 150
3/3/2012	4:34:17 PM	Helium valve closed
3/3/2012	4:34:17 PM	H2 valve closed
3/3/2012	4:34:17 PM	BCl3 valve closed
3/3/2012	4:34:17 PM	PH3 valve closed
3/3/2012	4:34:17 PM	SiCl4 pre valve closed
3/3/2012	4:34:17 PM	SiCl4 post valve closed
3/3/2012	4:34:17 PM	Bypass valve closed
3/3/2012	4:34:17 PM	Bubbler valve closed
3/3/2012	4:34:17 PM	Main Vac valve opened
3/3/2012	4:34:17 PM	Helium MFC set to  0.000000
3/3/2012	4:34:17 PM	H2 MFC set to  0.000000
3/3/2012	4:34:17 PM	BCl3 MFC set to  0.000000
3/3/2012	4:34:17 PM	PH3 MFC set to  0.000000
3/3/2012	4:34:17 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:34:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:34:17 PM	Tube furnace set to 150
3/3/2012	4:34:47 PM	H2 valve closed
3/3/2012	4:34:47 PM	BCl3 valve closed
3/3/2012	4:34:47 PM	PH3 valve closed
3/3/2012	4:34:47 PM	SiCl4 pre valve closed
3/3/2012	4:34:47 PM	SiCl4 post valve closed
3/3/2012	4:34:47 PM	Bypass valve closed
3/3/2012	4:34:47 PM	Bubbler valve closed
3/3/2012	4:34:47 PM	Helium valve opened
3/3/2012	4:34:47 PM	Main Vac valve opened
3/3/2012	4:34:47 PM	Helium MFC set to  20.000000
3/3/2012	4:34:47 PM	H2 MFC set to  0.000000
3/3/2012	4:34:47 PM	BCl3 MFC set to  0.000000
3/3/2012	4:34:47 PM	PH3 MFC set to  0.000000
3/3/2012	4:34:47 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:34:47 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:34:47 PM	Tube furnace set to 150
3/3/2012	4:35:17 PM	Helium valve closed
3/3/2012	4:35:17 PM	H2 valve closed
3/3/2012	4:35:17 PM	BCl3 valve closed
3/3/2012	4:35:17 PM	PH3 valve closed
3/3/2012	4:35:17 PM	SiCl4 pre valve closed
3/3/2012	4:35:17 PM	SiCl4 post valve closed
3/3/2012	4:35:17 PM	Bypass valve closed
3/3/2012	4:35:17 PM	Bubbler valve closed
3/3/2012	4:35:17 PM	Main Vac valve opened
3/3/2012	4:35:17 PM	Helium MFC set to  0.000000
3/3/2012	4:35:17 PM	H2 MFC set to  0.000000
3/3/2012	4:35:17 PM	BCl3 MFC set to  0.000000
3/3/2012	4:35:17 PM	PH3 MFC set to  0.000000
3/3/2012	4:35:17 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:35:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:35:17 PM	Tube furnace set to 150
3/3/2012	4:35:18 PM	Run finished at 4:35 PM
3/3/2012	4:35:48 PM	Recipe started at 4:35 PM
3/3/2012	4:35:48 PM	Helium valve closed
3/3/2012	4:35:48 PM	H2 valve closed
3/3/2012	4:35:48 PM	BCl3 valve closed
3/3/2012	4:35:48 PM	PH3 valve closed
3/3/2012	4:35:48 PM	SiCl4 pre valve closed
3/3/2012	4:35:48 PM	SiCl4 post valve closed
3/3/2012	4:35:48 PM	Main Vac valve closed
3/3/2012	4:35:48 PM	Bypass valve closed
3/3/2012	4:35:48 PM	Bubbler valve closed
3/3/2012	4:35:48 PM	Helium MFC set to  0.000000
3/3/2012	4:35:48 PM	H2 MFC set to  0.000000
3/3/2012	4:35:48 PM	BCl3 MFC set to  0.000000
3/3/2012	4:35:48 PM	PH3 MFC set to  0.000000
3/3/2012	4:35:48 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:35:48 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:35:48 PM	Tube furnace set to 0
3/3/2012	4:35:51 PM	Helium valve closed
3/3/2012	4:35:51 PM	BCl3 valve closed
3/3/2012	4:35:51 PM	PH3 valve closed
3/3/2012	4:35:51 PM	SiCl4 pre valve closed
3/3/2012	4:35:51 PM	SiCl4 post valve closed
3/3/2012	4:35:51 PM	Main Vac valve closed
3/3/2012	4:35:51 PM	Bypass valve closed
3/3/2012	4:35:51 PM	Bubbler valve closed
3/3/2012	4:35:51 PM	H2 valve opened
3/3/2012	4:35:51 PM	Helium MFC set to  0.000000
3/3/2012	4:35:51 PM	H2 MFC set to  500.000000
3/3/2012	4:35:51 PM	BCl3 MFC set to  0.000000
3/3/2012	4:35:51 PM	PH3 MFC set to  0.000000
3/3/2012	4:35:51 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:35:51 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:35:51 PM	Tube furnace set to 0
3/3/2012	4:36:52 PM	Helium valve closed
3/3/2012	4:36:52 PM	BCl3 valve closed
3/3/2012	4:36:52 PM	PH3 valve closed
3/3/2012	4:36:52 PM	SiCl4 pre valve closed
3/3/2012	4:36:52 PM	SiCl4 post valve closed
3/3/2012	4:36:52 PM	Main Vac valve closed
3/3/2012	4:36:52 PM	Bypass valve closed
3/3/2012	4:36:52 PM	H2 valve opened
3/3/2012	4:36:52 PM	Bubbler valve opened
3/3/2012	4:36:52 PM	Helium MFC set to  0.000000
3/3/2012	4:36:52 PM	H2 MFC set to  500.000000
3/3/2012	4:36:52 PM	BCl3 MFC set to  0.000000
3/3/2012	4:36:52 PM	PH3 MFC set to  0.000000
3/3/2012	4:36:52 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:36:52 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:36:52 PM	Tube furnace set to 0
3/3/2012	4:36:53 PM	Helium valve closed
3/3/2012	4:36:53 PM	BCl3 valve closed
3/3/2012	4:36:53 PM	PH3 valve closed
3/3/2012	4:36:53 PM	SiCl4 pre valve closed
3/3/2012	4:36:53 PM	SiCl4 post valve closed
3/3/2012	4:36:53 PM	Main Vac valve closed
3/3/2012	4:36:53 PM	Bypass valve closed
3/3/2012	4:36:53 PM	H2 valve opened
3/3/2012	4:36:53 PM	Bubbler valve opened
3/3/2012	4:36:53 PM	Helium MFC set to  0.000000
3/3/2012	4:36:53 PM	H2 MFC set to  500.000000
3/3/2012	4:36:53 PM	BCl3 MFC set to  0.000000
3/3/2012	4:36:53 PM	PH3 MFC set to  0.000000
3/3/2012	4:36:53 PM	SiCl4 MFC set to  0.000000
3/3/2012	4:36:53 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:36:53 PM	Tube furnace set to 1000
3/3/2012	4:56:53 PM	Helium valve closed
3/3/2012	4:56:53 PM	PH3 valve closed
3/3/2012	4:56:53 PM	Main Vac valve closed
3/3/2012	4:56:53 PM	Bypass valve closed
3/3/2012	4:56:53 PM	H2 valve opened
3/3/2012	4:56:53 PM	BCl3 valve opened
3/3/2012	4:56:53 PM	SiCl4 pre valve opened
3/3/2012	4:56:53 PM	SiCl4 post valve opened
3/3/2012	4:56:53 PM	Bubbler valve opened
3/3/2012	4:56:53 PM	Helium MFC set to  0.000000
3/3/2012	4:56:53 PM	H2 MFC set to  500.000000
3/3/2012	4:56:53 PM	BCl3 MFC set to  1.500000
3/3/2012	4:56:53 PM	PH3 MFC set to  0.000000
3/3/2012	4:56:53 PM	SiCl4 MFC set to  50.000000
3/3/2012	4:56:53 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	4:56:53 PM	Tube furnace set to 1000
3/3/2012	5:11:53 PM	Helium valve closed
3/3/2012	5:11:53 PM	BCl3 valve closed
3/3/2012	5:11:53 PM	PH3 valve closed
3/3/2012	5:11:53 PM	SiCl4 pre valve closed
3/3/2012	5:11:53 PM	SiCl4 post valve closed
3/3/2012	5:11:53 PM	Main Vac valve closed
3/3/2012	5:11:53 PM	Bypass valve closed
3/3/2012	5:11:53 PM	H2 valve opened
3/3/2012	5:11:53 PM	Bubbler valve opened
3/3/2012	5:11:53 PM	Helium MFC set to  0.000000
3/3/2012	5:11:53 PM	H2 MFC set to  500.000000
3/3/2012	5:11:54 PM	BCl3 MFC set to  0.000000
3/3/2012	5:11:54 PM	PH3 MFC set to  0.000000
3/3/2012	5:11:54 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:11:54 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:11:54 PM	Tube furnace set to 750
3/3/2012	5:16:54 PM	H2 valve closed
3/3/2012	5:16:54 PM	BCl3 valve closed
3/3/2012	5:16:54 PM	PH3 valve closed
3/3/2012	5:16:54 PM	SiCl4 pre valve closed
3/3/2012	5:16:54 PM	SiCl4 post valve closed
3/3/2012	5:16:54 PM	Main Vac valve closed
3/3/2012	5:16:54 PM	Bypass valve closed
3/3/2012	5:16:54 PM	Helium valve opened
3/3/2012	5:16:54 PM	Bubbler valve opened
3/3/2012	5:16:54 PM	Helium MFC set to  500.000000
3/3/2012	5:16:54 PM	H2 MFC set to  0.000000
3/3/2012	5:16:54 PM	BCl3 MFC set to  0.000000
3/3/2012	5:16:54 PM	PH3 MFC set to  0.000000
3/3/2012	5:16:54 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:16:54 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:16:54 PM	Tube furnace set to 0
3/3/2012	5:20:40 PM	Run aborted at 5:20 PM
3/3/2012	5:20:40 PM	Helium valve closed
3/3/2012	5:20:40 PM	H2 valve closed
3/3/2012	5:20:40 PM	BCl3 valve closed
3/3/2012	5:20:40 PM	PH3 valve closed
3/3/2012	5:20:40 PM	SiCl4 pre valve closed
3/3/2012	5:20:40 PM	SiCl4 post valve closed
3/3/2012	5:20:40 PM	Bypass valve closed
3/3/2012	5:20:40 PM	Main Vac valve closed
3/3/2012	5:20:40 PM	Bubbler valve closed
3/3/2012	5:20:40 PM	Helium MFC set to  0.000000
3/3/2012	5:20:40 PM	H2 MFC set to  0.000000
3/3/2012	5:20:40 PM	BCl3 MFC set to  0.000000
3/3/2012	5:20:40 PM	PH3 MFC set to  0.000000
3/3/2012	5:20:40 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:20:41 PM	Tube furnace set to 0
3/3/2012	5:23:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	5:23:43 PM	Recipe started at 5:23 PM
3/3/2012	5:23:43 PM	Helium valve closed
3/3/2012	5:23:43 PM	H2 valve closed
3/3/2012	5:23:43 PM	BCl3 valve closed
3/3/2012	5:23:43 PM	PH3 valve closed
3/3/2012	5:23:43 PM	SiCl4 pre valve closed
3/3/2012	5:23:43 PM	SiCl4 post valve closed
3/3/2012	5:23:43 PM	Main Vac valve closed
3/3/2012	5:23:43 PM	Bypass valve closed
3/3/2012	5:23:43 PM	Bubbler valve closed
3/3/2012	5:23:43 PM	Helium MFC set to  0.000000
3/3/2012	5:23:43 PM	H2 MFC set to  0.000000
3/3/2012	5:23:43 PM	BCl3 MFC set to  0.000000
3/3/2012	5:23:43 PM	PH3 MFC set to  0.000000
3/3/2012	5:23:43 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:23:43 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:23:43 PM	Tube furnace set to 0
3/3/2012	5:23:46 PM	H2 valve closed
3/3/2012	5:23:46 PM	BCl3 valve closed
3/3/2012	5:23:46 PM	PH3 valve closed
3/3/2012	5:23:46 PM	SiCl4 pre valve closed
3/3/2012	5:23:46 PM	SiCl4 post valve closed
3/3/2012	5:23:46 PM	Main Vac valve closed
3/3/2012	5:23:46 PM	Bypass valve closed
3/3/2012	5:23:46 PM	Bubbler valve closed
3/3/2012	5:23:46 PM	Helium valve opened
3/3/2012	5:23:46 PM	Helium MFC set to  500.000000
3/3/2012	5:23:46 PM	H2 MFC set to  0.000000
3/3/2012	5:23:46 PM	BCl3 MFC set to  0.000000
3/3/2012	5:23:46 PM	PH3 MFC set to  0.000000
3/3/2012	5:23:46 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:23:46 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:23:47 PM	Tube furnace set to 0
3/3/2012	5:23:49 PM	Helium valve closed
3/3/2012	5:23:49 PM	H2 valve closed
3/3/2012	5:23:49 PM	BCl3 valve closed
3/3/2012	5:23:49 PM	PH3 valve closed
3/3/2012	5:23:49 PM	SiCl4 pre valve closed
3/3/2012	5:23:49 PM	SiCl4 post valve closed
3/3/2012	5:23:49 PM	Main Vac valve closed
3/3/2012	5:23:49 PM	Bypass valve closed
3/3/2012	5:23:49 PM	Bubbler valve closed
3/3/2012	5:23:49 PM	Helium MFC set to  0.000000
3/3/2012	5:23:49 PM	H2 MFC set to  0.000000
3/3/2012	5:23:49 PM	BCl3 MFC set to  0.000000
3/3/2012	5:23:49 PM	PH3 MFC set to  0.000000
3/3/2012	5:23:49 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:23:49 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:23:49 PM	Tube furnace set to 0
3/3/2012	5:23:50 PM	Run finished at 5:23 PM
3/3/2012	5:23:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	5:29:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	5:29:09 PM	Recipe started at 5:29 PM
3/3/2012	5:29:09 PM	Helium valve closed
3/3/2012	5:29:09 PM	H2 valve closed
3/3/2012	5:29:09 PM	BCl3 valve closed
3/3/2012	5:29:09 PM	PH3 valve closed
3/3/2012	5:29:09 PM	SiCl4 pre valve closed
3/3/2012	5:29:09 PM	SiCl4 post valve closed
3/3/2012	5:29:09 PM	Main Vac valve closed
3/3/2012	5:29:09 PM	Bubbler valve closed
3/3/2012	5:29:09 PM	Bypass valve opened
3/3/2012	5:29:09 PM	Helium MFC set to  0.000000
3/3/2012	5:29:10 PM	H2 MFC set to  0.000000
3/3/2012	5:29:10 PM	BCl3 MFC set to  0.000000
3/3/2012	5:29:10 PM	PH3 MFC set to  0.000000
3/3/2012	5:29:10 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:29:10 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:29:10 PM	Tube furnace set to 0
3/3/2012	5:30:08 PM	Helium valve closed
3/3/2012	5:30:08 PM	H2 valve closed
3/3/2012	5:30:08 PM	BCl3 valve closed
3/3/2012	5:30:08 PM	PH3 valve closed
3/3/2012	5:30:08 PM	SiCl4 pre valve closed
3/3/2012	5:30:08 PM	SiCl4 post valve closed
3/3/2012	5:30:08 PM	Main Vac valve closed
3/3/2012	5:30:08 PM	Bubbler valve closed
3/3/2012	5:30:08 PM	Bypass valve opened
3/3/2012	5:30:08 PM	Helium MFC set to  0.000000
3/3/2012	5:30:08 PM	H2 MFC set to  0.000000
3/3/2012	5:30:08 PM	BCl3 MFC set to  0.000000
3/3/2012	5:30:08 PM	PH3 MFC set to  0.000000
3/3/2012	5:30:08 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:30:08 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:30:09 PM	Tube furnace set to 0
3/3/2012	5:31:09 PM	Helium valve closed
3/3/2012	5:31:09 PM	H2 valve closed
3/3/2012	5:31:09 PM	BCl3 valve closed
3/3/2012	5:31:09 PM	PH3 valve closed
3/3/2012	5:31:09 PM	SiCl4 pre valve closed
3/3/2012	5:31:09 PM	SiCl4 post valve closed
3/3/2012	5:31:09 PM	Bypass valve closed
3/3/2012	5:31:09 PM	Bubbler valve closed
3/3/2012	5:31:09 PM	Main Vac valve opened
3/3/2012	5:31:09 PM	Helium MFC set to  0.000000
3/3/2012	5:31:09 PM	H2 MFC set to  0.000000
3/3/2012	5:31:09 PM	BCl3 MFC set to  0.000000
3/3/2012	5:31:09 PM	PH3 MFC set to  0.000000
3/3/2012	5:31:09 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:31:09 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:31:09 PM	Tube furnace set to 0
3/3/2012	5:31:10 PM	Run finished at 5:31 PM
3/3/2012	5:31:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	5:43:09 PM	Recipe started at 5:43 PM
3/3/2012	5:43:09 PM	Helium valve closed
3/3/2012	5:43:09 PM	H2 valve closed
3/3/2012	5:43:09 PM	BCl3 valve closed
3/3/2012	5:43:09 PM	PH3 valve closed
3/3/2012	5:43:09 PM	SiCl4 pre valve closed
3/3/2012	5:43:09 PM	SiCl4 post valve closed
3/3/2012	5:43:09 PM	Bypass valve closed
3/3/2012	5:43:09 PM	Bubbler valve closed
3/3/2012	5:43:09 PM	Main Vac valve opened
3/3/2012	5:43:09 PM	Helium MFC set to  0.000000
3/3/2012	5:43:09 PM	H2 MFC set to  0.000000
3/3/2012	5:43:09 PM	BCl3 MFC set to  0.000000
3/3/2012	5:43:09 PM	PH3 MFC set to  0.000000
3/3/2012	5:43:09 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:43:09 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:43:09 PM	Tube furnace set to 150
3/3/2012	5:43:39 PM	H2 valve closed
3/3/2012	5:43:39 PM	BCl3 valve closed
3/3/2012	5:43:39 PM	PH3 valve closed
3/3/2012	5:43:39 PM	SiCl4 pre valve closed
3/3/2012	5:43:39 PM	SiCl4 post valve closed
3/3/2012	5:43:39 PM	Bypass valve closed
3/3/2012	5:43:39 PM	Bubbler valve closed
3/3/2012	5:43:39 PM	Helium valve opened
3/3/2012	5:43:39 PM	Main Vac valve opened
3/3/2012	5:43:39 PM	Helium MFC set to  20.000000
3/3/2012	5:43:39 PM	H2 MFC set to  0.000000
3/3/2012	5:43:39 PM	BCl3 MFC set to  0.000000
3/3/2012	5:43:39 PM	PH3 MFC set to  0.000000
3/3/2012	5:43:39 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:43:39 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:43:39 PM	Tube furnace set to 150
3/3/2012	5:44:09 PM	Helium valve closed
3/3/2012	5:44:09 PM	H2 valve closed
3/3/2012	5:44:09 PM	BCl3 valve closed
3/3/2012	5:44:09 PM	PH3 valve closed
3/3/2012	5:44:09 PM	SiCl4 pre valve closed
3/3/2012	5:44:09 PM	SiCl4 post valve closed
3/3/2012	5:44:09 PM	Bypass valve closed
3/3/2012	5:44:09 PM	Bubbler valve closed
3/3/2012	5:44:09 PM	Main Vac valve opened
3/3/2012	5:44:09 PM	Helium MFC set to  0.000000
3/3/2012	5:44:09 PM	H2 MFC set to  0.000000
3/3/2012	5:44:09 PM	BCl3 MFC set to  0.000000
3/3/2012	5:44:09 PM	PH3 MFC set to  0.000000
3/3/2012	5:44:09 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:44:09 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:44:09 PM	Tube furnace set to 150
3/3/2012	5:44:39 PM	H2 valve closed
3/3/2012	5:44:39 PM	BCl3 valve closed
3/3/2012	5:44:39 PM	PH3 valve closed
3/3/2012	5:44:39 PM	SiCl4 pre valve closed
3/3/2012	5:44:39 PM	SiCl4 post valve closed
3/3/2012	5:44:39 PM	Bypass valve closed
3/3/2012	5:44:39 PM	Bubbler valve closed
3/3/2012	5:44:39 PM	Helium valve opened
3/3/2012	5:44:39 PM	Main Vac valve opened
3/3/2012	5:44:39 PM	Helium MFC set to  20.000000
3/3/2012	5:44:39 PM	H2 MFC set to  0.000000
3/3/2012	5:44:39 PM	BCl3 MFC set to  0.000000
3/3/2012	5:44:39 PM	PH3 MFC set to  0.000000
3/3/2012	5:44:39 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:44:39 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:44:39 PM	Tube furnace set to 150
3/3/2012	5:45:09 PM	Helium valve closed
3/3/2012	5:45:09 PM	H2 valve closed
3/3/2012	5:45:09 PM	BCl3 valve closed
3/3/2012	5:45:09 PM	PH3 valve closed
3/3/2012	5:45:09 PM	SiCl4 pre valve closed
3/3/2012	5:45:09 PM	SiCl4 post valve closed
3/3/2012	5:45:09 PM	Bypass valve closed
3/3/2012	5:45:09 PM	Bubbler valve closed
3/3/2012	5:45:09 PM	Main Vac valve opened
3/3/2012	5:45:09 PM	Helium MFC set to  0.000000
3/3/2012	5:45:09 PM	H2 MFC set to  0.000000
3/3/2012	5:45:09 PM	BCl3 MFC set to  0.000000
3/3/2012	5:45:09 PM	PH3 MFC set to  0.000000
3/3/2012	5:45:09 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:45:09 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:45:10 PM	Tube furnace set to 150
3/3/2012	5:45:40 PM	H2 valve closed
3/3/2012	5:45:40 PM	BCl3 valve closed
3/3/2012	5:45:40 PM	PH3 valve closed
3/3/2012	5:45:40 PM	SiCl4 pre valve closed
3/3/2012	5:45:40 PM	SiCl4 post valve closed
3/3/2012	5:45:40 PM	Bypass valve closed
3/3/2012	5:45:40 PM	Bubbler valve closed
3/3/2012	5:45:40 PM	Helium valve opened
3/3/2012	5:45:40 PM	Main Vac valve opened
3/3/2012	5:45:40 PM	Helium MFC set to  20.000000
3/3/2012	5:45:40 PM	H2 MFC set to  0.000000
3/3/2012	5:45:40 PM	BCl3 MFC set to  0.000000
3/3/2012	5:45:40 PM	PH3 MFC set to  0.000000
3/3/2012	5:45:40 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:45:40 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:45:40 PM	Tube furnace set to 150
3/3/2012	5:46:10 PM	Helium valve closed
3/3/2012	5:46:10 PM	H2 valve closed
3/3/2012	5:46:10 PM	BCl3 valve closed
3/3/2012	5:46:10 PM	PH3 valve closed
3/3/2012	5:46:10 PM	SiCl4 pre valve closed
3/3/2012	5:46:10 PM	SiCl4 post valve closed
3/3/2012	5:46:10 PM	Bypass valve closed
3/3/2012	5:46:10 PM	Bubbler valve closed
3/3/2012	5:46:10 PM	Main Vac valve opened
3/3/2012	5:46:10 PM	Helium MFC set to  0.000000
3/3/2012	5:46:10 PM	H2 MFC set to  0.000000
3/3/2012	5:46:10 PM	BCl3 MFC set to  0.000000
3/3/2012	5:46:10 PM	PH3 MFC set to  0.000000
3/3/2012	5:46:10 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:46:10 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:46:10 PM	Tube furnace set to 150
3/3/2012	5:46:40 PM	H2 valve closed
3/3/2012	5:46:40 PM	BCl3 valve closed
3/3/2012	5:46:40 PM	PH3 valve closed
3/3/2012	5:46:40 PM	SiCl4 pre valve closed
3/3/2012	5:46:40 PM	SiCl4 post valve closed
3/3/2012	5:46:40 PM	Bypass valve closed
3/3/2012	5:46:40 PM	Bubbler valve closed
3/3/2012	5:46:40 PM	Helium valve opened
3/3/2012	5:46:40 PM	Main Vac valve opened
3/3/2012	5:46:40 PM	Helium MFC set to  20.000000
3/3/2012	5:46:40 PM	H2 MFC set to  0.000000
3/3/2012	5:46:40 PM	BCl3 MFC set to  0.000000
3/3/2012	5:46:40 PM	PH3 MFC set to  0.000000
3/3/2012	5:46:40 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:46:40 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:46:40 PM	Tube furnace set to 150
3/3/2012	5:47:10 PM	Helium valve closed
3/3/2012	5:47:10 PM	H2 valve closed
3/3/2012	5:47:10 PM	BCl3 valve closed
3/3/2012	5:47:10 PM	PH3 valve closed
3/3/2012	5:47:10 PM	SiCl4 pre valve closed
3/3/2012	5:47:10 PM	SiCl4 post valve closed
3/3/2012	5:47:10 PM	Bypass valve closed
3/3/2012	5:47:10 PM	Bubbler valve closed
3/3/2012	5:47:10 PM	Main Vac valve opened
3/3/2012	5:47:10 PM	Helium MFC set to  0.000000
3/3/2012	5:47:10 PM	H2 MFC set to  0.000000
3/3/2012	5:47:10 PM	BCl3 MFC set to  0.000000
3/3/2012	5:47:10 PM	PH3 MFC set to  0.000000
3/3/2012	5:47:10 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:47:10 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:47:10 PM	Tube furnace set to 150
3/3/2012	5:47:40 PM	H2 valve closed
3/3/2012	5:47:40 PM	BCl3 valve closed
3/3/2012	5:47:40 PM	PH3 valve closed
3/3/2012	5:47:40 PM	SiCl4 pre valve closed
3/3/2012	5:47:40 PM	SiCl4 post valve closed
3/3/2012	5:47:40 PM	Bypass valve closed
3/3/2012	5:47:40 PM	Bubbler valve closed
3/3/2012	5:47:40 PM	Helium valve opened
3/3/2012	5:47:40 PM	Main Vac valve opened
3/3/2012	5:47:40 PM	Helium MFC set to  20.000000
3/3/2012	5:47:40 PM	H2 MFC set to  0.000000
3/3/2012	5:47:40 PM	BCl3 MFC set to  0.000000
3/3/2012	5:47:41 PM	PH3 MFC set to  0.000000
3/3/2012	5:47:41 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:47:41 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:47:41 PM	Tube furnace set to 150
3/3/2012	5:48:11 PM	Helium valve closed
3/3/2012	5:48:11 PM	H2 valve closed
3/3/2012	5:48:11 PM	BCl3 valve closed
3/3/2012	5:48:11 PM	PH3 valve closed
3/3/2012	5:48:11 PM	SiCl4 pre valve closed
3/3/2012	5:48:11 PM	SiCl4 post valve closed
3/3/2012	5:48:11 PM	Bypass valve closed
3/3/2012	5:48:11 PM	Bubbler valve closed
3/3/2012	5:48:11 PM	Main Vac valve opened
3/3/2012	5:48:11 PM	Helium MFC set to  0.000000
3/3/2012	5:48:11 PM	H2 MFC set to  0.000000
3/3/2012	5:48:11 PM	BCl3 MFC set to  0.000000
3/3/2012	5:48:11 PM	PH3 MFC set to  0.000000
3/3/2012	5:48:11 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:48:11 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:48:11 PM	Tube furnace set to 150
3/3/2012	5:48:41 PM	H2 valve closed
3/3/2012	5:48:41 PM	BCl3 valve closed
3/3/2012	5:48:41 PM	PH3 valve closed
3/3/2012	5:48:41 PM	SiCl4 pre valve closed
3/3/2012	5:48:41 PM	SiCl4 post valve closed
3/3/2012	5:48:41 PM	Bypass valve closed
3/3/2012	5:48:41 PM	Bubbler valve closed
3/3/2012	5:48:41 PM	Helium valve opened
3/3/2012	5:48:41 PM	Main Vac valve opened
3/3/2012	5:48:41 PM	Helium MFC set to  20.000000
3/3/2012	5:48:41 PM	H2 MFC set to  0.000000
3/3/2012	5:48:41 PM	BCl3 MFC set to  0.000000
3/3/2012	5:48:41 PM	PH3 MFC set to  0.000000
3/3/2012	5:48:41 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:48:41 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:48:41 PM	Tube furnace set to 150
3/3/2012	5:49:11 PM	Helium valve closed
3/3/2012	5:49:11 PM	H2 valve closed
3/3/2012	5:49:11 PM	BCl3 valve closed
3/3/2012	5:49:11 PM	PH3 valve closed
3/3/2012	5:49:11 PM	SiCl4 pre valve closed
3/3/2012	5:49:11 PM	SiCl4 post valve closed
3/3/2012	5:49:11 PM	Bypass valve closed
3/3/2012	5:49:11 PM	Bubbler valve closed
3/3/2012	5:49:11 PM	Main Vac valve opened
3/3/2012	5:49:11 PM	Helium MFC set to  0.000000
3/3/2012	5:49:11 PM	H2 MFC set to  0.000000
3/3/2012	5:49:11 PM	BCl3 MFC set to  0.000000
3/3/2012	5:49:11 PM	PH3 MFC set to  0.000000
3/3/2012	5:49:11 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:49:11 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:49:11 PM	Tube furnace set to 150
3/3/2012	5:49:41 PM	H2 valve closed
3/3/2012	5:49:41 PM	BCl3 valve closed
3/3/2012	5:49:41 PM	PH3 valve closed
3/3/2012	5:49:41 PM	SiCl4 pre valve closed
3/3/2012	5:49:41 PM	SiCl4 post valve closed
3/3/2012	5:49:41 PM	Bypass valve closed
3/3/2012	5:49:41 PM	Bubbler valve closed
3/3/2012	5:49:41 PM	Helium valve opened
3/3/2012	5:49:41 PM	Main Vac valve opened
3/3/2012	5:49:41 PM	Helium MFC set to  20.000000
3/3/2012	5:49:41 PM	H2 MFC set to  0.000000
3/3/2012	5:49:41 PM	BCl3 MFC set to  0.000000
3/3/2012	5:49:41 PM	PH3 MFC set to  0.000000
3/3/2012	5:49:41 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:49:41 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:49:42 PM	Tube furnace set to 150
3/3/2012	5:50:12 PM	Helium valve closed
3/3/2012	5:50:12 PM	H2 valve closed
3/3/2012	5:50:12 PM	BCl3 valve closed
3/3/2012	5:50:12 PM	PH3 valve closed
3/3/2012	5:50:12 PM	SiCl4 pre valve closed
3/3/2012	5:50:12 PM	SiCl4 post valve closed
3/3/2012	5:50:12 PM	Bypass valve closed
3/3/2012	5:50:12 PM	Bubbler valve closed
3/3/2012	5:50:12 PM	Main Vac valve opened
3/3/2012	5:50:12 PM	Helium MFC set to  0.000000
3/3/2012	5:50:12 PM	H2 MFC set to  0.000000
3/3/2012	5:50:12 PM	BCl3 MFC set to  0.000000
3/3/2012	5:50:12 PM	PH3 MFC set to  0.000000
3/3/2012	5:50:12 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:50:12 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:50:12 PM	Tube furnace set to 150
3/3/2012	5:50:42 PM	H2 valve closed
3/3/2012	5:50:42 PM	BCl3 valve closed
3/3/2012	5:50:42 PM	PH3 valve closed
3/3/2012	5:50:42 PM	SiCl4 pre valve closed
3/3/2012	5:50:42 PM	SiCl4 post valve closed
3/3/2012	5:50:42 PM	Bypass valve closed
3/3/2012	5:50:42 PM	Bubbler valve closed
3/3/2012	5:50:42 PM	Helium valve opened
3/3/2012	5:50:42 PM	Main Vac valve opened
3/3/2012	5:50:42 PM	Helium MFC set to  20.000000
3/3/2012	5:50:42 PM	H2 MFC set to  0.000000
3/3/2012	5:50:42 PM	BCl3 MFC set to  0.000000
3/3/2012	5:50:42 PM	PH3 MFC set to  0.000000
3/3/2012	5:50:42 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:50:42 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:50:42 PM	Tube furnace set to 150
3/3/2012	5:51:12 PM	Helium valve closed
3/3/2012	5:51:12 PM	H2 valve closed
3/3/2012	5:51:12 PM	BCl3 valve closed
3/3/2012	5:51:12 PM	PH3 valve closed
3/3/2012	5:51:12 PM	SiCl4 pre valve closed
3/3/2012	5:51:12 PM	SiCl4 post valve closed
3/3/2012	5:51:12 PM	Bypass valve closed
3/3/2012	5:51:12 PM	Bubbler valve closed
3/3/2012	5:51:12 PM	Main Vac valve opened
3/3/2012	5:51:12 PM	Helium MFC set to  0.000000
3/3/2012	5:51:12 PM	H2 MFC set to  0.000000
3/3/2012	5:51:12 PM	BCl3 MFC set to  0.000000
3/3/2012	5:51:12 PM	PH3 MFC set to  0.000000
3/3/2012	5:51:12 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:51:12 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:51:12 PM	Tube furnace set to 150
3/3/2012	5:51:42 PM	H2 valve closed
3/3/2012	5:51:42 PM	BCl3 valve closed
3/3/2012	5:51:42 PM	PH3 valve closed
3/3/2012	5:51:42 PM	SiCl4 pre valve closed
3/3/2012	5:51:42 PM	SiCl4 post valve closed
3/3/2012	5:51:42 PM	Bypass valve closed
3/3/2012	5:51:42 PM	Bubbler valve closed
3/3/2012	5:51:42 PM	Helium valve opened
3/3/2012	5:51:42 PM	Main Vac valve opened
3/3/2012	5:51:42 PM	Helium MFC set to  20.000000
3/3/2012	5:51:42 PM	H2 MFC set to  0.000000
3/3/2012	5:51:42 PM	BCl3 MFC set to  0.000000
3/3/2012	5:51:42 PM	PH3 MFC set to  0.000000
3/3/2012	5:51:42 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:51:42 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:51:42 PM	Tube furnace set to 150
3/3/2012	5:52:12 PM	Helium valve closed
3/3/2012	5:52:12 PM	H2 valve closed
3/3/2012	5:52:12 PM	BCl3 valve closed
3/3/2012	5:52:12 PM	PH3 valve closed
3/3/2012	5:52:12 PM	SiCl4 pre valve closed
3/3/2012	5:52:12 PM	SiCl4 post valve closed
3/3/2012	5:52:12 PM	Bypass valve closed
3/3/2012	5:52:12 PM	Bubbler valve closed
3/3/2012	5:52:12 PM	Main Vac valve opened
3/3/2012	5:52:12 PM	Helium MFC set to  0.000000
3/3/2012	5:52:12 PM	H2 MFC set to  0.000000
3/3/2012	5:52:12 PM	BCl3 MFC set to  0.000000
3/3/2012	5:52:12 PM	PH3 MFC set to  0.000000
3/3/2012	5:52:12 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:52:12 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:52:13 PM	Tube furnace set to 150
3/3/2012	5:52:43 PM	H2 valve closed
3/3/2012	5:52:43 PM	BCl3 valve closed
3/3/2012	5:52:43 PM	PH3 valve closed
3/3/2012	5:52:43 PM	SiCl4 pre valve closed
3/3/2012	5:52:43 PM	SiCl4 post valve closed
3/3/2012	5:52:43 PM	Bypass valve closed
3/3/2012	5:52:43 PM	Bubbler valve closed
3/3/2012	5:52:43 PM	Helium valve opened
3/3/2012	5:52:43 PM	Main Vac valve opened
3/3/2012	5:52:43 PM	Helium MFC set to  20.000000
3/3/2012	5:52:43 PM	H2 MFC set to  0.000000
3/3/2012	5:52:43 PM	BCl3 MFC set to  0.000000
3/3/2012	5:52:43 PM	PH3 MFC set to  0.000000
3/3/2012	5:52:43 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:52:43 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:52:43 PM	Tube furnace set to 150
3/3/2012	5:53:13 PM	Helium valve closed
3/3/2012	5:53:13 PM	H2 valve closed
3/3/2012	5:53:13 PM	BCl3 valve closed
3/3/2012	5:53:13 PM	PH3 valve closed
3/3/2012	5:53:13 PM	SiCl4 pre valve closed
3/3/2012	5:53:13 PM	SiCl4 post valve closed
3/3/2012	5:53:13 PM	Bypass valve closed
3/3/2012	5:53:13 PM	Bubbler valve closed
3/3/2012	5:53:13 PM	Main Vac valve opened
3/3/2012	5:53:13 PM	Helium MFC set to  0.000000
3/3/2012	5:53:13 PM	H2 MFC set to  0.000000
3/3/2012	5:53:13 PM	BCl3 MFC set to  0.000000
3/3/2012	5:53:13 PM	PH3 MFC set to  0.000000
3/3/2012	5:53:13 PM	SiCl4 MFC set to  0.000000
3/3/2012	5:53:13 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	5:53:13 PM	Tube furnace set to 150
3/3/2012	5:53:14 PM	Run finished at 5:53 PM
3/3/2012	6:08:03 PM	Helium MFC set to  20.000000
3/3/2012	6:08:04 PM	Helium valve opened
3/3/2012	6:08:18 PM	Helium valve closed
3/3/2012	6:08:21 PM	Helium MFC set to  0.000000
3/3/2012	6:09:29 PM	Recipe started at 6:09 PM
3/3/2012	6:09:29 PM	Helium valve closed
3/3/2012	6:09:29 PM	H2 valve closed
3/3/2012	6:09:29 PM	BCl3 valve closed
3/3/2012	6:09:29 PM	PH3 valve closed
3/3/2012	6:09:29 PM	SiCl4 pre valve closed
3/3/2012	6:09:29 PM	SiCl4 post valve closed
3/3/2012	6:09:29 PM	Main Vac valve closed
3/3/2012	6:09:29 PM	Bypass valve closed
3/3/2012	6:09:29 PM	Bubbler valve closed
3/3/2012	6:09:29 PM	Helium MFC set to  0.000000
3/3/2012	6:09:29 PM	H2 MFC set to  0.000000
3/3/2012	6:09:29 PM	BCl3 MFC set to  0.000000
3/3/2012	6:09:29 PM	PH3 MFC set to  0.000000
3/3/2012	6:09:29 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:09:29 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:09:29 PM	Tube furnace set to 0
3/3/2012	6:09:32 PM	Helium valve closed
3/3/2012	6:09:32 PM	BCl3 valve closed
3/3/2012	6:09:32 PM	PH3 valve closed
3/3/2012	6:09:32 PM	SiCl4 pre valve closed
3/3/2012	6:09:32 PM	SiCl4 post valve closed
3/3/2012	6:09:32 PM	Main Vac valve closed
3/3/2012	6:09:32 PM	Bypass valve closed
3/3/2012	6:09:32 PM	Bubbler valve closed
3/3/2012	6:09:32 PM	H2 valve opened
3/3/2012	6:09:32 PM	Helium MFC set to  0.000000
3/3/2012	6:09:32 PM	H2 MFC set to  500.000000
3/3/2012	6:09:32 PM	BCl3 MFC set to  0.000000
3/3/2012	6:09:32 PM	PH3 MFC set to  0.000000
3/3/2012	6:09:32 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:09:32 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:09:32 PM	Tube furnace set to 0
3/3/2012	6:10:35 PM	Helium valve closed
3/3/2012	6:10:35 PM	BCl3 valve closed
3/3/2012	6:10:35 PM	PH3 valve closed
3/3/2012	6:10:35 PM	SiCl4 pre valve closed
3/3/2012	6:10:35 PM	SiCl4 post valve closed
3/3/2012	6:10:35 PM	Main Vac valve closed
3/3/2012	6:10:35 PM	Bypass valve closed
3/3/2012	6:10:35 PM	H2 valve opened
3/3/2012	6:10:35 PM	Bubbler valve opened
3/3/2012	6:10:35 PM	Helium MFC set to  0.000000
3/3/2012	6:10:35 PM	H2 MFC set to  500.000000
3/3/2012	6:10:35 PM	BCl3 MFC set to  0.000000
3/3/2012	6:10:35 PM	PH3 MFC set to  0.000000
3/3/2012	6:10:35 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:10:35 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:10:35 PM	Tube furnace set to 0
3/3/2012	6:10:36 PM	Helium valve closed
3/3/2012	6:10:36 PM	BCl3 valve closed
3/3/2012	6:10:36 PM	PH3 valve closed
3/3/2012	6:10:36 PM	SiCl4 pre valve closed
3/3/2012	6:10:36 PM	SiCl4 post valve closed
3/3/2012	6:10:36 PM	Main Vac valve closed
3/3/2012	6:10:36 PM	Bypass valve closed
3/3/2012	6:10:36 PM	H2 valve opened
3/3/2012	6:10:36 PM	Bubbler valve opened
3/3/2012	6:10:36 PM	Helium MFC set to  0.000000
3/3/2012	6:10:36 PM	H2 MFC set to  500.000000
3/3/2012	6:10:36 PM	BCl3 MFC set to  0.000000
3/3/2012	6:10:36 PM	PH3 MFC set to  0.000000
3/3/2012	6:10:36 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:10:36 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:10:36 PM	Tube furnace set to 1000
3/3/2012	6:30:36 PM	Helium valve closed
3/3/2012	6:30:36 PM	PH3 valve closed
3/3/2012	6:30:36 PM	Main Vac valve closed
3/3/2012	6:30:36 PM	Bypass valve closed
3/3/2012	6:30:36 PM	H2 valve opened
3/3/2012	6:30:36 PM	BCl3 valve opened
3/3/2012	6:30:36 PM	SiCl4 pre valve opened
3/3/2012	6:30:36 PM	SiCl4 post valve opened
3/3/2012	6:30:36 PM	Bubbler valve opened
3/3/2012	6:30:36 PM	Helium MFC set to  0.000000
3/3/2012	6:30:36 PM	H2 MFC set to  500.000000
3/3/2012	6:30:36 PM	BCl3 MFC set to  1.500000
3/3/2012	6:30:36 PM	PH3 MFC set to  0.000000
3/3/2012	6:30:36 PM	SiCl4 MFC set to  50.000000
3/3/2012	6:30:36 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:30:36 PM	Tube furnace set to 1000
3/3/2012	6:45:36 PM	Helium valve closed
3/3/2012	6:45:36 PM	BCl3 valve closed
3/3/2012	6:45:36 PM	PH3 valve closed
3/3/2012	6:45:36 PM	SiCl4 pre valve closed
3/3/2012	6:45:36 PM	SiCl4 post valve closed
3/3/2012	6:45:36 PM	Main Vac valve closed
3/3/2012	6:45:36 PM	Bypass valve closed
3/3/2012	6:45:36 PM	H2 valve opened
3/3/2012	6:45:36 PM	Bubbler valve opened
3/3/2012	6:45:36 PM	Helium MFC set to  0.000000
3/3/2012	6:45:36 PM	H2 MFC set to  500.000000
3/3/2012	6:45:36 PM	BCl3 MFC set to  0.000000
3/3/2012	6:45:36 PM	PH3 MFC set to  0.000000
3/3/2012	6:45:36 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:45:36 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:45:36 PM	Tube furnace set to 750
3/3/2012	6:50:37 PM	H2 valve closed
3/3/2012	6:50:37 PM	BCl3 valve closed
3/3/2012	6:50:37 PM	PH3 valve closed
3/3/2012	6:50:37 PM	SiCl4 pre valve closed
3/3/2012	6:50:37 PM	SiCl4 post valve closed
3/3/2012	6:50:37 PM	Main Vac valve closed
3/3/2012	6:50:37 PM	Bypass valve closed
3/3/2012	6:50:37 PM	Helium valve opened
3/3/2012	6:50:37 PM	Bubbler valve opened
3/3/2012	6:50:37 PM	Helium MFC set to  500.000000
3/3/2012	6:50:37 PM	H2 MFC set to  0.000000
3/3/2012	6:50:37 PM	BCl3 MFC set to  0.000000
3/3/2012	6:50:37 PM	PH3 MFC set to  0.000000
3/3/2012	6:50:37 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:50:37 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:50:37 PM	Tube furnace set to 0
3/3/2012	6:51:01 PM	Run aborted at 6:51 PM
3/3/2012	6:51:01 PM	Helium valve closed
3/3/2012	6:51:01 PM	H2 valve closed
3/3/2012	6:51:01 PM	BCl3 valve closed
3/3/2012	6:51:01 PM	PH3 valve closed
3/3/2012	6:51:01 PM	SiCl4 pre valve closed
3/3/2012	6:51:01 PM	SiCl4 post valve closed
3/3/2012	6:51:01 PM	Bypass valve closed
3/3/2012	6:51:01 PM	Main Vac valve closed
3/3/2012	6:51:01 PM	Bubbler valve closed
3/3/2012	6:51:01 PM	Helium MFC set to  0.000000
3/3/2012	6:51:01 PM	H2 MFC set to  0.000000
3/3/2012	6:51:01 PM	BCl3 MFC set to  0.000000
3/3/2012	6:51:01 PM	PH3 MFC set to  0.000000
3/3/2012	6:51:01 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:51:02 PM	Tube furnace set to 0
3/3/2012	6:51:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	6:51:04 PM	Recipe started at 6:51 PM
3/3/2012	6:51:05 PM	Helium valve closed
3/3/2012	6:51:05 PM	H2 valve closed
3/3/2012	6:51:05 PM	BCl3 valve closed
3/3/2012	6:51:05 PM	PH3 valve closed
3/3/2012	6:51:05 PM	SiCl4 pre valve closed
3/3/2012	6:51:05 PM	SiCl4 post valve closed
3/3/2012	6:51:05 PM	Main Vac valve closed
3/3/2012	6:51:05 PM	Bypass valve closed
3/3/2012	6:51:05 PM	Bubbler valve closed
3/3/2012	6:51:05 PM	Helium MFC set to  0.000000
3/3/2012	6:51:05 PM	H2 MFC set to  0.000000
3/3/2012	6:51:05 PM	BCl3 MFC set to  0.000000
3/3/2012	6:51:05 PM	PH3 MFC set to  0.000000
3/3/2012	6:51:05 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:51:05 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:51:05 PM	Tube furnace set to 0
3/3/2012	6:51:08 PM	H2 valve closed
3/3/2012	6:51:08 PM	BCl3 valve closed
3/3/2012	6:51:08 PM	PH3 valve closed
3/3/2012	6:51:08 PM	SiCl4 pre valve closed
3/3/2012	6:51:08 PM	SiCl4 post valve closed
3/3/2012	6:51:08 PM	Main Vac valve closed
3/3/2012	6:51:08 PM	Bypass valve closed
3/3/2012	6:51:08 PM	Bubbler valve closed
3/3/2012	6:51:08 PM	Helium valve opened
3/3/2012	6:51:08 PM	Helium MFC set to  500.000000
3/3/2012	6:51:08 PM	H2 MFC set to  0.000000
3/3/2012	6:51:08 PM	BCl3 MFC set to  0.000000
3/3/2012	6:51:08 PM	PH3 MFC set to  0.000000
3/3/2012	6:51:08 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:51:08 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:51:08 PM	Tube furnace set to 0
3/3/2012	6:51:08 PM	Helium valve closed
3/3/2012	6:51:08 PM	H2 valve closed
3/3/2012	6:51:08 PM	BCl3 valve closed
3/3/2012	6:51:08 PM	PH3 valve closed
3/3/2012	6:51:08 PM	SiCl4 pre valve closed
3/3/2012	6:51:08 PM	SiCl4 post valve closed
3/3/2012	6:51:08 PM	Main Vac valve closed
3/3/2012	6:51:08 PM	Bypass valve closed
3/3/2012	6:51:08 PM	Bubbler valve closed
3/3/2012	6:51:08 PM	Helium MFC set to  0.000000
3/3/2012	6:51:08 PM	H2 MFC set to  0.000000
3/3/2012	6:51:08 PM	BCl3 MFC set to  0.000000
3/3/2012	6:51:08 PM	PH3 MFC set to  0.000000
3/3/2012	6:51:08 PM	SiCl4 MFC set to  0.000000
3/3/2012	6:51:08 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	6:51:08 PM	Tube furnace set to 0
3/3/2012	6:51:09 PM	Run finished at 6:51 PM
3/3/2012	6:51:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2012	7:03:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2012	7:03:37 PM	Recipe started at 7:03 PM
3/3/2012	7:03:37 PM	Helium valve closed
3/3/2012	7:03:37 PM	H2 valve closed
3/3/2012	7:03:37 PM	BCl3 valve closed
3/3/2012	7:03:37 PM	PH3 valve closed
3/3/2012	7:03:37 PM	SiCl4 pre valve closed
3/3/2012	7:03:37 PM	SiCl4 post valve closed
3/3/2012	7:03:37 PM	Main Vac valve closed
3/3/2012	7:03:37 PM	Bubbler valve closed
3/3/2012	7:03:37 PM	Bypass valve opened
3/3/2012	7:03:37 PM	Helium MFC set to  0.000000
3/3/2012	7:03:37 PM	H2 MFC set to  0.000000
3/3/2012	7:03:37 PM	BCl3 MFC set to  0.000000
3/3/2012	7:03:37 PM	PH3 MFC set to  0.000000
3/3/2012	7:03:37 PM	SiCl4 MFC set to  0.000000
3/3/2012	7:03:37 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	7:03:38 PM	Tube furnace set to 0
3/3/2012	7:04:37 PM	Helium valve closed
3/3/2012	7:04:37 PM	H2 valve closed
3/3/2012	7:04:37 PM	BCl3 valve closed
3/3/2012	7:04:37 PM	PH3 valve closed
3/3/2012	7:04:37 PM	SiCl4 pre valve closed
3/3/2012	7:04:37 PM	SiCl4 post valve closed
3/3/2012	7:04:37 PM	Main Vac valve closed
3/3/2012	7:04:37 PM	Bubbler valve closed
3/3/2012	7:04:37 PM	Bypass valve opened
3/3/2012	7:04:37 PM	Helium MFC set to  0.000000
3/3/2012	7:04:37 PM	H2 MFC set to  0.000000
3/3/2012	7:04:37 PM	BCl3 MFC set to  0.000000
3/3/2012	7:04:37 PM	PH3 MFC set to  0.000000
3/3/2012	7:04:37 PM	SiCl4 MFC set to  0.000000
3/3/2012	7:04:37 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	7:04:37 PM	Tube furnace set to 0
3/3/2012	7:05:37 PM	Helium valve closed
3/3/2012	7:05:37 PM	H2 valve closed
3/3/2012	7:05:37 PM	BCl3 valve closed
3/3/2012	7:05:37 PM	PH3 valve closed
3/3/2012	7:05:37 PM	SiCl4 pre valve closed
3/3/2012	7:05:37 PM	SiCl4 post valve closed
3/3/2012	7:05:37 PM	Bypass valve closed
3/3/2012	7:05:37 PM	Bubbler valve closed
3/3/2012	7:05:37 PM	Main Vac valve opened
3/3/2012	7:05:37 PM	Helium MFC set to  0.000000
3/3/2012	7:05:37 PM	H2 MFC set to  0.000000
3/3/2012	7:05:37 PM	BCl3 MFC set to  0.000000
3/3/2012	7:05:37 PM	PH3 MFC set to  0.000000
3/3/2012	7:05:37 PM	SiCl4 MFC set to  0.000000
3/3/2012	7:05:37 PM	Bypass solenoid MFC set to  0.000000
3/3/2012	7:05:37 PM	Tube furnace set to 0
3/3/2012	7:05:38 PM	Run finished at 7:05 PM
3/3/2012	7:05:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
